Title:
APPARATUS AND METHOD FOR THE LASER-INTERFERENCE PATTERNING OF SUBSTRATES WITH PERIODIC DOT PATTERNS FOR ANTIREFLECTIVE PROPERTIES
Document Type and Number:
WIPO Patent Application WO/2023/280793
Kind Code:
A3
Abstract:
The present invention relates to the area of patterning substrates with periodic dot patterns in the micrometre or submicrometre range, in particular an apparatus and a method for patterning surfaces and the interior of a transparent substrate by means of laser-interference patterning. The patterning produced in this way with periodic dot patterns in the micrometre or submicrometre range is distinguished by a pronounced antireflective property. The present invention also relates to a patterned substrate with antireflective properties that comprises a periodic dot pattern.
Inventors:
KUNZE TIM (DE)
ALAMRI SABRI (DE)
ALAMRI SABRI (DE)
Application Number:
PCT/EP2022/068490
Publication Date:
April 06, 2023
Filing Date:
July 04, 2022
Export Citation:
Assignee:
FUSION BIONIC GMBH (DE)
International Classes:
G03F7/20; G02B27/09; G02B27/10
Foreign References:
| US20040227927A1 | 2004-11-18 | |||
| EP2596899B1 | 2020-11-11 | |||
| US20060046156A1 | 2006-03-02 | |||
| US20010035991A1 | 2001-11-01 | |||
| US20120081687A1 | 2012-04-05 |
Other References:
LASAGNI ANDRÉS ET AL: "High speed surface functionalization using direct laser interference patterning, towards 1 m/min fabrication speed with sub-μm resolution", PROCEEDINGS OF SPIE, IEEE, US, vol. 8968, 6 March 2014 (2014-03-06), pages 89680A - 89680A, XP060034456, ISBN: 978-1-62841-730-2, DOI: 10.1117/12.2041215
ZHOU Y ET AL: "ARTICLES YOU MAY BE INTERESTED IN Fabrication of large-area 3D optical fishnet metamaterial by laser interference lithography", APPL. PHYS. LETT. APPL. PHYS. LETT. PHYSICS LETTERS, 30 September 2013 (2013-09-30), XP093021250, Retrieved from the Internet [retrieved on 20230206]
ZHOU Y ET AL: "ARTICLES YOU MAY BE INTERESTED IN Fabrication of large-area 3D optical fishnet metamaterial by laser interference lithography", APPL. PHYS. LETT. APPL. PHYS. LETT. PHYSICS LETTERS, 30 September 2013 (2013-09-30), XP093021250, Retrieved from the Internet
Attorney, Agent or Firm:
GRUNER, Leopold Joachim (DE)
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