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Title:
APPARATUS AND METHOD FOR MANUFACTURING A COMPOSITE FILM
Document Type and Number:
WIPO Patent Application WO/2022/242879
Kind Code:
A1
Abstract:
According to one aspect of the present disclosure, an apparatus (10, 20) for manufacturing a composite film (104) is provided. The composite film (104) includes a first film (101), at least one deposited layer (101a) and at least one second film (102, 103) having a lamination layer. The apparatus (10, 20) includes a vacuum chamber (400), a deposition apparatus (200) for depositing the at least one deposited layer (101a) on the first film (101), and a laminating apparatus (300) for laminating the at least one second film (102, 103) to the first film (101) such that the lamination layer of the at least one second film faces the at least one deposited layer (101a), wherein the deposition apparatus (200) and the laminating apparatus (300) are provided within the vacuum chamber (400). According to a further aspect of the present disclosure, a method (30) for manufacturing a composite film is provided, including providing (32) a first film, depositing (33) at least one deposited layer on the first film, providing (34) at least one second film having a lamination layer, and laminating (36) the at least one second film to the first film such that the lamination layer of the at least one second film faces the at least one deposited layer, wherein the depositing (33) and the laminating (36) are performed in the same vacuum chamber. According to a further aspect of the present disclosure, a composite film manufactured by the apparatus and using the method according to aspects of the present disclosure is provided.

Inventors:
CROUCH TARQUIN LUCAS (GB)
Application Number:
PCT/EP2021/063674
Publication Date:
November 24, 2022
Filing Date:
May 21, 2021
Export Citation:
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Assignee:
APPLIED MATERIALS INC (US)
CROUCH TARQUIN LUCAS (GB)
International Classes:
C23C14/56; B32B15/04; B32B18/00; B32B37/00; B65D65/00; B65H18/20; C08J5/18; C23C14/58; C23C16/54; C23C16/56
Foreign References:
JP2012052170A2012-03-15
JP2015003464A2015-01-08
US20160133838A12016-05-12
EP3736134A12020-11-11
Other References:
FREELAND A W ET AL: "SIMULTANEOUS DEPOSITION AND LAMINATION PROCESS IN VACUUM", JOURNAL OF VACUUM SCIENCE, AMERICAN INSTITUTE OF PHYSICS, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747, vol. 13, no. 3, PART 01, 1 May 1995 (1995-05-01), pages 1192 - 1195, XP000531617, ISSN: 0734-2101, DOI: 10.1116/1.579860
Attorney, Agent or Firm:
ZIMMERMANN & PARTNER PATENTANWÄLTE MBB (DE)
Download PDF:
Claims:
CLAIMS

1. An apparatus (10, 20) for manufacturing a composite film (104) comprising a first film (101), at least one deposited layer (101a) and at least one second film (102, 103) having a lamination layer, the apparatus (10, 20) comprising: a vacuum chamber (400); a deposition apparatus (200) for depositing the at least one deposited layer (101a) on the first film (101); and a laminating apparatus (300) for laminating the at least one second film (102, 103) to the first film (101) such that the lamination layer of the at least one second film (102, 103) faces the at least one deposited layer (101a), wherein the deposition apparatus (200) and the laminating apparatus (300) are provided within the vacuum chamber (400).

2. The apparatus (10, 20) according to claim 1, wherein the at least one deposited layer (101a) comprises one of a metallic layer, a metallic oxide layer, a non-metallic oxide layer, or a barrier layer, particularly a metallic barrier layer.

3. The apparatus (10, 20) according to any one of claims 1 to 2, wherein the laminating apparatus (300) comprises a thermal lamination apparatus, and the lamination layer of the at least one second layer (102, 103) is a thermally-activated lamination layer.

4. The apparatus (10, 20) according to any one of claims 1 to 3, wherein the deposition apparatus (200) comprises one of a thermal evaporation deposition apparatus, a physical vapor deposition apparatus and a chemical vapor deposition apparatus. 5. The apparatus (10, 20) according to any one of claims 1 to 4, wherein the at least one second film (102, 103) comprises a printed film or a coloured film. 6. The apparatus (10, 20) according to claim 5, further comprising at least one printing apparatus configured for printing at least one layer of material on the at least one second film (102, 103).

7. The apparatus (20) according to any one of claims 1 to 6, further comprising: a first unwinding spool (111) provided upstream of the deposition apparatus (200), the first unwinding spool (111) being configured for unwinding the first film (101); at least one second unwinding spool (112, 113) provided upstream of the laminating apparatus (300), the at least one second unwinding spool (112, 113) being configured for unwinding the at least one second film (102, 103); and a composite film winding spool (114) provided downstream of the laminating apparatus

(300), the composite film winding spool (114) being configured for winding the composite film (104).

8. The apparatus (20) according to claim 7, wherein at least one of the first unwinding spool (111), the at least one second unwinding spool (112, 113) and the composite film winding spool

(114) are provided in the vacuum chamber (400).

9. The apparatus (20) according to claim 7, wherein at least one of the first unwinding spool (111), the at least one second unwinding spool (112, 113) and the composite film winding spool (114) are provided in at least one spool chamber (401, 402, 403, 404).

10. A method (30) for manufacturing a composite film, the method (30) comprising: providing (32) a first film; depositing (33) at least one deposited layer on the first film; providing (34) at least one second film having a lamination layer; and laminating (36) the at least one second film to the first film such that the lamination layer of the at least one second film faces the at least one deposited layer, wherein the depositing (33) and the laminating (36) are performed in the same vacuum chamber.

11. The method (30) according to claim 10, wherein the at least one deposited layer is one of a metallic layer, a metallic oxide layer, a non-metallic oxide layer, or a barrier layer, particularly a metallic barrier layer.

12. The method (30) according to any one of claims 10 to 11, wherein the laminating (36) comprises thermal laminating, and the lamination layer of the at least one second film is a thermally-activated lamination layer. 13. The method (30) according to any one of claims 10 to 12, wherein the depositing (33) at least one deposited layer comprises one of thermal evaporation, physical vapor deposition and chemical vapor deposition.

14. The method (30) according to any one of claims 10 to 13, further comprising: printing (35) at least one layer of material on the at least one second film prior to the laminating (36). 15. A composite film (104) comprising a first film (101), at least one deposited layer (101a) and at least one second film (102, 103) having a lamination layer, the composite film (104) being manufactured by the apparatus (10, 20) according to any one of claims 1 to 9 using the method (30) according to any one of claims 10 to 14.

Description:
APPARATUS AND METHOD FOR MANUFACTURING A COMPOSITE FILM

TECHNICAL FIELD

[0001] Embodiments of the present disclosure relate to an apparatus for manufacturing a composite film. Particularly, the composite film includes a first film, having at least one layer of material deposited thereon, laminated to at least one second film, wherein the deposition and lamination are performed in the same vacuum chamber. Embodiments of the present disclosure further relate to a method of manufacturing a composite film.

BACKGROUND

[0002] Substrates, e.g. flexible substrates, are regularly processed while being moved past processing equipment. Processing may comprise coating of a flexible substrate with a coating material, e.g. metal, particularly aluminum or copper, semiconductors or dielectric materials. Particularly, coating of metal, semiconductor or plastic films or foils is in high demand in the packaging industry, the semiconductor industry and other industries. Systems performing this task generally include a deposition drum coupled to a transport system for moving the substrate along a substrate transportation path, wherein at least a portion of the substrate is processed while the substrate is guided on the deposition drum. So-called roll-to-roll (R2R) coating systems allowing substrates to be coated while being moved on the guiding surface of a deposition drum can provide a high throughput.

[0003] An evaporation process, such as a thermal evaporation process, a PVD (physical vapor deposition) process and/or a CVD (chemical vapor deposition) process can be utilized for depositing thin layers of coating material on the flexible substrate. Roll-to-roll deposition systems are also experiencing a strong increase in demand in the display industry and the photovoltaic (PV) industry. For example, touch panel elements, flexible displays, and flexible PV modules result in an increasing demand for depositing suitable layers in roll-to-roll coaters with low manufacturing costs. Such devices are typically manufactured with several layers of coating material, which may be produced in roll-to-roll coating apparatuses which successively utilize several deposition units. The deposition units may be adapted for coating the substrate with a particular coating material while the substrate is moved past the deposition units by a transport system, e.g. a roller assembly.

[0004] Flexible substrates such as foils may comprise multiple layers which are laminated together to produce a composite film. Common lamination techniques for manufacturing composite film include solvent lamination, solventless lamination, and extrusion lamination. For example, substrates on which one or more layers of material are deposited are subsequently laminated to a further layer so as to protect the deposited layer, or to improve the aesthetic or optical properties of the composite film. At a point in time during the manufacturing of a composite film, between the deposition of the one or more deposited layers and the lamination of the composite film, the exposed deposited layer (e.g. a barrier layer) may be damaged or oxidized, reducing the quality of the completed film. For example, if the exposed deposited layer contacts a roller or passes through a gate valve, the layers of fragile deposited or printed material may be particularly susceptible to damage, e.g. scratching, rubbing or marring. Further, if the exposed deposited layer, particularly a metallic layer, passes through a processing chamber containing air or oxygen, the deposited layer may become oxidized before the further protective layers may be laminated. A deposited layer which is damaged or oxidized leads to reduced quality of the resulting composite film.

[0005] In view of the above, there remains a need for an apparatus and methods for manufacturing composite films having improved quality, particularly for manufacturing laminated composite films with one or more deposited layers.

SUMMARY

[0006] In light of the above, an apparatus for manufacturing a composite film is provided. Further, a method for manufacturing a composite film is provided. Further aspects, benefits, and features of the present disclosure are apparent from the claims, the description, and the accompanying drawings.

[0007] According to one aspect of the present disclosure, an apparatus for manufacturing a composite film is provided. The composite film includes a first film, at least one deposited layer and at least one second film having a lamination layer. The apparatus includes a vacuum chamber, a deposition apparatus for depositing the at least one deposited layer on the first film, and a laminating apparatus for laminating the at least one second film to the first film such that the lamination layer of the at least one second film faces the at least one deposited layer, wherein the deposition apparatus and the laminating apparatus are provided within the vacuum chamber.

[0008] According to a further aspect of the present disclosure, a method for manufacturing a composite film is provided. The method includes providing a first film, depositing at least one deposited layer on the first film, providing at least one second film having a lamination layer, and laminating the at least one second film to the first film such that the lamination layer of the at least one second film faces the at least one deposited layer, wherein the depositing and the laminating are performed in the same vacuum chamber.

[0009] According to a further aspect of the present disclosure, a composite film including a first film, at least one deposited layer and at least one second film having a lamination layer is provided, wherein the composite film is manufactured by the apparatus according to aspects of the present disclosure using the method according to aspects of the present disclosure.

[0010] The aspects of the present disclosure allow for improved quality of the resulting composite film, as damage or oxidation of the one or more deposited layers is avoided. Further aspects, advantages, and features of the present disclosure are apparent from the dependent claims, the description, and the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0011] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following. Typical embodiments are depicted in the drawings and are detailed in the description which follows.

FIG. 1 shows a schematic side view of an apparatus for manufacturing a composite film according to embodiments described herein; FIG. 2 shows a schematic side view of an apparatus for manufacturing a composite film according to embodiments described herein;

FIG. 3 shows a schematic side view of a laminating apparatus of the apparatus for manufacturing a composite film according to embodiments described herein; and

FIG. 4 is a flow diagram of a method of processing a flexible substrate according to embodiments described herein.

DETAILED DESCRIPTION

[0012] Reference will now be made in detail to the various embodiments, one or more examples of which are illustrated in each figure. Each example is provided by way of explanation and is not meant as a limitation. For example, features illustrated or described as part of one embodiment can be used on or in conjunction with any other embodiment to yield yet a further embodiment. It is intended that the present disclosure includes such modifications and variations.

[0013] Within the following description of the drawings, the same reference numbers refer to the same or to similar components. Generally, only the differences with respect to the individual embodiments are described. Unless specified otherwise, the description of a part or aspect in one embodiment applies to a corresponding part or aspect in another embodiment as well.

[0014] According to an aspect of the present disclosure, an apparatus for manufacturing a composite film is provided. FIG. 1 shows a schematic side view of the apparatus 10 for manufacturing a composite film 104 according to embodiments described herein. The composite film includes a first film 101, at least one deposited layer 101a and at least one second film 102, 103. The at least one second film 102, 103 includes a lamination layer. The apparatus 10 includes a vacuum chamber 400, a deposition apparatus 200 for depositing the at least one deposited layer 101a on the first film 101, and a laminating apparatus 300 for laminating the at least one second film 102, 103 to the first film 101 such that the lamination layer of the at least one second film 102, 103 faces the at least one deposited layer 101a, wherein the deposition apparatus 200 and the laminating apparatus 300 are provided within the vacuum chamber 400. [0015] By providing the deposition apparatus 200 and the laminating apparatus 300 within the same vacuum chamber 400, potential defects in the at least one deposited layer 101a which result in reduced quality of the resulting composite film 104 are reduced or avoided. For example, the first film 101 with one or more exposed deposited layers 101a is not transported from one vacuum chamber to another through a gate valve, so potentially damaging contact between the one or more exposed deposited layers 101a and the gate valve is avoided. As a further example, first film 101 may be provided to the laminating apparatus 300 directly after the at least one deposited layer 101a is deposited thereon, without further transporting or routing across additional rollers, preventing contact between the at least one deposited layer 101a and a roller. Instead, the at least one second layers 102, 103 may be laminated over the deposited layers 101a directly after the deposited layers 101a are formed, so that the deposited layers 101a are protected from damage or dislodging of surface particles. Further, compared to a process where the lamination is performed in atmospheric conditions, the one or more exposed deposited layers 101a are not subjected to a different processing environment prior to being laminated, which avoids oxidation of the exposed deposited layers. Further, exothermic oxidation of the one or more exposed deposited layers 101a which may induce heating of the first film 101 is avoided, improving the adherence of the deposited layers 101a to the first film 101. It follows that the apparatus and method according to aspects of the present disclosure allow for the manufacture of a composite film with improved quality.

[0016] The term “film” as used herein shall particularly embrace flexible substrates such as a plastic film, a web, a foil, or a strip. The term film shall also embrace other types of flexible substrates. It is noted that a film as used within the embodiments described herein is typically bendable. The term “film” or “flexible substrate” may be synonymously used with the term “foil” or the term “web”. In particular, it is to be understood that some embodiments of the processing system described herein can be utilized for coating any kind of flexible substrate, e.g. for manufacturing flat coatings with a uniform thickness, or for manufacturing coating patterns or coating structures in a predetermined shape on the film or on top of an underlying coating structure. For example, electronic devices may be formed on the film by masking, etching and/or depositing. For example, a film as described herein may include materials like PET, HC-PET, PE, PI, PU, TaC, OPP, CPP, one or more metals, paper, combinations thereof, and coated substrates like Hard Coated PET (e g. HC-PET, HC-TaC) and the like. [0017] The term “composite film” as used herein shall particularly embrace a structure which includes a plurality of films, deposited material layers and/or printed material layers joined in a manner to produce a layered product. The plurality of films may include any number of film layers, where at least one of the film layers includes a layer of material deposited thereon prior to the film layers being joined. Particularly, a “composite film” in the context of the present disclosure includes a first film, at least one layer of material deposited on the first film, and at least one second film joined to the first film over the at least one layer of deposited material. The term “at least one second film” includes any number of “second” films to be laminated to the first film. For example, a single “second film” may be laminated to the first film to form a composite film formed of two film layers, or three “second films” may be laminated to the first film to form a composite film formed of four film layers. The respective layers of the composite film may be joined by lamination, particularly thermal lamination. The composite film may further include at least one lamination layer, for example a glue layer, which may be provided on at least one surface of the second film, particularly the surface which is to be facing the layer of material deposited on the first film.

[0018] When referring to a film being laminated to another film such that a lamination layer “faces” another layer, e.g. a deposited layer, the term “faces” is not limited to direct contact between the layers in the laminated composite film. Rather, said layers, the surfaces of which were exposed prior to lamination and are arranged in the laminated composite film, are oriented opposite to one another, such that the surfaces of the respective layers face each other. In other words, a deposited layer oriented on a top side of the first film may be said to be “facing” a lamination layer oriented on a bottom side of a second film. The resulting composite film may include additional layers therebetween, e.g. a layer of printed material, between the two layers which are said to be “facing” each other

[0019] A composite film 104 and/or individual films 101, 102, 103 of the composite film 104 may be transported while being processed in a vacuum chamber 400. For example, the first film 101, at least one second film 102, 103 and/or the resulting composite film 104 may be transported along a respective film transportation path through the apparatus, e.g. first film 101 may be transported past deposition apparatus 200 for coating first film 101. In some implementations, the first film 101 and/or at least one second film 102, 103 may be unwound from at least one unwinding spool, may be transported on the outer surface of a deposition drum, and/or may be guided along the outer surfaces of further rollers. The resulting composite film 104 may be wound onto a winding spool.

[0020] The apparatus according to aspects of the present disclosure may be configured for manufacturing a composite film 104 with a length of 500 m or more, 1000 m or more, or several kilometres. The width of the composite film 104 may be 100 mm or more, 300 mm or more 500 mm or more, or 1 m or more. The width of the composite film 104 may be 5 m or less, particularly 2 m or less. Typically, the thickness of the composite film 104 may be 20 pm or more and 1 mm or less, particularly from 50 pm to 200 pm.

[0021] The apparatus according to aspects of the present disclosure may be used for the manufacture of a composite film 104 for food packaging. In this application, the at least one deposited layer 101a of the composite film 104 may include one or more barrier layers to reduce the permeation rates for gases such as oxygen, carbon dioxide and water vapor. By avoiding damage to the one or more barrier layers, the performance of the barrier layers is improved, leading to improved shelf life of products packed into the composite film 104, and the quality of the packed food can be maintained over a longer period of time. The barrier properties of the composite film 104 may depend on the type and thickness of the films as well as on the type and thickness of the barrier layers deposited thereon. The materials deposited to form the one or more barrier layers which provide vapor barrier properties may include aluminum or aluminum oxide. However, the present application is not limited thereto, and any material may be used which exhibits suitable vapor barrier properties.

[0022] The apparatus according to aspects of the present disclosure may be used for the manufacture of a composite film 104 having improved aesthetic or optical properties. The one or more deposited layers 101a included in the composite film 104 may be a metallic layer, which exhibits high reflectivity. Damage or oxidation of the reflective metallic layer may reduce the aesthetic quality of the resulting composite film 104, as such damage or oxidation would be visible in the end product. Further, the one or more deposited layers 101a may be provided with a particular aesthetic pattern, or the composite film 104 may include additional printed layers such as text, images or designs. When exposed, such aesthetic layers may be fragile, and damaging such layers may result in reduced legibility or reduced aesthetic quality. [0023] The quality of the resulting composite film 104 may further depend on the cleanliness of the surface of the first film 101 before depositing the one or more deposited layers 101a. Debris and small particles may be present on the surface of the first film 101 before coating. These particles may be overcoated with the deposited layer 101a and may be later mechanically removed by contact with rollers of the apparatus configured for transporting the first film 101. At the positions of these defects, the compound film 104 may not include the deposited layer 101a, resulting in a composite film 104 with, for example, reduced gas barrier performance or reduced aesthetic quality.

[0024] According to an embodiment, which may be combined with other embodiments described herein, the at least one second film 102, 103 may include a printed film or a coloured film. In other words, the at least one second film 102, 103 may be provided with a layer of printed material prior to the at least one second film 102, 103 being laminated to the first film 101, or the at least one second film 102, 103 may be formed from a material having a colouring treatment, e.g. a tinting treatment, applied thereto. The printed film or coloured film may be pre-printed or pre-coloured and loaded into the apparatus 10 to be laminated to the first film 101 to form composite film 104. Alternatively, the apparatus 10 for manufacturing the composite film 104 may be optionally provided with at least one printing apparatus configured for printing at least one layer of material on the at least one second film 102, 103. The at least one printing apparatus may be provided in the vacuum chamber 400, i.e. in the same vacuum chamber 400 as the deposition apparatus 200 and the laminating apparatus 300, or may be provided outside of the vacuum chamber 400. Providing the at least one printing apparatus in the same vacuum chamber 400 has the advantage in that the at least one second film 102, 103 with the fragile layer of printed material printed thereon may be laminated to the first film 101 or further ones of the at least one second film 102, 103 directly after printing. It follows that potential damage to the layer of printed material, e.g. damage caused by contact with a roller or a gate valve, may be avoided, similar to the at least one deposited layer 101a.

[0025] In one embodiment, composite film 104 may include a first film 101 with at least one deposited layer (101a) deposited thereon, a printed film 102 having a lamination layer on a first surface of the printed film 102 and a layer of printed material on the opposite surface of the printed film 102, and a further film 103 having a lamination layer. The printed film 102 is laminated to the first film 101 such that the lamination layer of the printed film 102 faces the at least one deposited layer 101a. Subsequently or simultaneously, the further film 103 is laminated to the printed film 102 such that the lamination layer of the further film 103 faces the layer of printed material of the printed film 102. Thus, the printed film 102 is laminated over and protects the at least one deposited layer 101a, and the further film 103 is laminated over and protects the layer of printed material.

[0026] The apparatus 10 for manufacturing the composite film 104 includes a deposition apparatus 200. In the present disclosure, a “deposition apparatus” may be understood as an apparatus configured for depositing material on a film. For example, the deposition apparatus 200 may be a physical vapor deposition (PVD) apparatus, a chemical vapor deposition (CVD) apparatus, an evaporation deposition apparatus, or another deposition apparatus known in the art.

[0027] The deposition apparatus 200 may include a deposition drum 202. In the present disclosure, a “deposition drum” can be understood as a drum or a roller having a film support surface for contacting the film. In particular, the deposition drum 202 may be rotatable about a rotation axis and may include a film guiding region. Typically, the film guiding region is a curved film support surface, e.g. a cylindrically symmetric surface, of the deposition drum 202. The curved film support surface of the deposition drum may be adapted to be (at least partly) in contact with the first film 101 during operation of the deposition apparatus 200. The deposition drum 202 may be heated or cooled depending on the material to be deposited. The deposition apparatus 200 exemplarily shown in the figures includes a deposition drum 202, however, the present disclosure is not limited thereto. For example, the first film 101 may be transported past the at least one deposition unit 201 by spanning the first film 101 between two rollers.

[0028] The deposition apparatus 200 may include at least one deposition unit 201. Particularly, the deposition apparatus may include a plurality of deposition units 201. During guiding of the first film 101 by the deposition drum 202 past the deposition unit 201, the film may be in direct contact with the substrate support surface of the deposition drum 202. As the deposition drum 202 rotates, the film is guided past the deposition unit 201 which faces toward the curved film support surface of the deposition drum, so that the first film 101 can be coated with a layer of deposited material while being moved past the deposition unit 201 at a predetermined speed. The deposition unit 201 may include a deposition source configured for providing a material to be deposited onto first film 101. For example, the deposition unit 201 may include a sputter source or an evaporation source.

[0029] The vacuum chamber 400 may be at a pressure below atmospheric pressure. For instance, the processing system may include equipment allowing for generating or maintaining a vacuum in the vacuum chamber 400. The apparatus 10 may include vacuum pumps, evacuation ducts, vacuum seals and the like for generating or maintaining the vacuum in the vacuum chamber 400. For instance, the vacuum chamber 400 may have one or more vacuum pumps for evacuating the vacuum chamber. In some embodiments, two or more turbo-vacuum pumps may be connected to the vacuum chamber 400.

[0030] The term “vacuum”, as used herein, can be understood in the sense of a technical vacuum having a vacuum pressure of less than 10 mbar, for example, 10 3 mbar. Typically, the pressure in a vacuum chamber as described herein may be between 10 3 mbar and about 10 8 mbar, more typically between 10 5 mbar and 10 7 mbar, and even more typically between about 10 6 mbar and about 1 O 7 mbar.

[0031] FIG. 2 shows a schematic view of an apparatus 20 for manufacturing a composite film 104 according to embodiments described herein. The setup of the vacuum chamber, the deposition apparatus, the laminating apparatus, as well as the transport system may correspond to the respective features of the apparatus 10 shown in FIG. 1, so that reference can be made to the above explanations without repetition. According to an embodiment, which may be combined with other embodiments described herein, the apparatus 20 may further include a first unwinding spool 111 provided upstream of the deposition apparatus 200, the first unwinding spool 111 being configured for unwinding the first film 101, at least one second unwinding spool 112, 113 provided upstream of the laminating apparatus 300, the at least one second unwinding spool 112, 113 being configured for unwinding the at least one second film 102, 103, and a composite film winding spool 114 provided downstream of the laminating apparatus 300, the composite film winding spool 114 being configured for winding the composite film 104.

[0032] The deposition apparatus 200 as exemplarily shown in FIG. 2 includes a deposition drum 202 and a plurality of deposition units 201a-f provided around the circumference of the deposition drum 202. For example, the deposition apparatus 200 may include a plurality of sputter sources or a plurality of evaporation sources. The modular design of the deposition apparatus 200 facilitates replacing deposition units 201a-f by radially removing a deposition unit 201a-f and loading another deposition unit 201a-f into the deposition apparatus 200. Gas separation walls may be provided between two adjacent deposition units 201a-f in order to reduce a flow of process gases from one deposition unit to other deposition units, e.g. to an adjacent deposition unit during operation, respectively. Accordingly, beneficially a high gas separation between neighboring deposition units 201a-f can be provided.

[0033] The terms “upstream of’ and “downstream of’ as used herein may refer to the position of the respective component with respect to another component along a film transportation path. For example, during operation, the film is guided from the first unwinding spool 111, through the vacuum chamber 400, past the deposition apparatus 200 and subsequently guided to the laminating apparatus 300 along a first film transportation path, e.g. via a roller assembly. Accordingly, with respect to the first film transport path, the deposition apparatus 200 is arranged upstream of the laminating apparatus 300, and the laminating apparatus 300 is arranged downstream of the deposition apparatus 200. When, during operation, a film is first guided by or transported past a first roller or a first component and subsequently guided by or transported past a second roller or a second component, the second roller or second component is arranged downstream of the first roller or first component.

[0034] The apparatus may be configured to transport the first film 101, the at least one second film 102, 103 and/or the resulting composite film 104 along respective film transportation paths with a roller assembly including a plurality of guiding rollers configured to guide the respective film on a respective roller surface. At least one roller may be an active roller with a drive or motor for rotating the roller. In some arrangements, more than one active roller may be provided. For example, an unwinding spool 111, 112, 113, the deposition drum 202 and/or the composite film winding spool 114 may be active rollers. In some arrangements, the roller assembly may include one or more passive rollers. As exemplarily shown in FIG. 2, rollers may be provided, for example, along the transport path between the first unwinding spool 111 configured for unwinding the first film 101 and the deposition apparatus 200. However, the arrangement of rollers as shown in the figures is not limiting, and any arrangement of rollers may be implemented to guide the respective films along a transport path in the apparatus 20. [0035] In order to avoid damage to the exposed deposited layers 101a, the transport system configured to transport the first film 101 may be configured such that a roller may not come into contact with the exposed deposited layers 101a. Particularly, the transport system is configured such that no rollers along the transport path of the first film 101 between the deposition apparatus 200 and the laminating apparatus 300 contact the coated surface of first film 101, i.e. the at least one deposited layer 101a. Note that this limitation does not exclude a roller or rollers being provided between the deposition apparatus 200 and the laminating apparatus 300 which contact the opposite surface of the first film 101, i.e. the non-coated surface of the first film 101, as exemplarily shown in FIG. 2.

[0036] An “active” roller or roll as used herein may be understood as a roller that is provided with a drive or a motor for actively moving or rotating the respective roller. For example, an active roller may be adjusted to provide a predetermined torque. Active rollers can be configured as substrate tensioning rollers configured for tensioning the substrate with a predetermined tensioning force during operation. A “passive” roller as used herein may be understood as a roller or roll that is not provided with a drive for actively moving or rotating the passive roller. The passive roller may be rotated by the frictional force of the film that may be in direct contact with an outer roller surface during operation.

[0037] In the present disclosure, a “roll” or “roller” may be understood as a device which provides a surface with which the film or part of the film may come in contact during transport of the film along a transportation path in the apparatus. At least a part of the roller as referred to herein may include a circular-like shape for contacting a film during transport. The substantially cylindrical shape may be formed about a straight longitudinal axis. According to some embodiments, a roller may be a guiding roller adapted to guide a film while the film is transported, e.g. during a deposition process, a lamination process, or while the film is present in the apparatus. The roller may be configured as a spreader roller, i.e. an active roller adapted for providing a defined tension for the film, a processing roller, e.g. a deposition drum, for supporting the film while material is deposited thereon, a deflecting roller for deflecting the film along a transportation path, an adjusting roller, an unwinding spool, a winding spool etc. [0038] The apparatus may be configured to guide the respective films at a speed of 1 m/s or more, particularly 5 m/s or more, more particularly 10 m/s or more, or even 15 m/s or more. A high-speed roll-to-roll (R2R) coating system may be provided. The guiding speed of the respective films may be determined by an active roller, also referred to as the “master roller”, which may be preset to rotate at a predetermined rotation speed. One or more further active rollers may be tension- controlled rollers such that the tension of the substrate can be controlled as appropriate and an extensive or an insufficient substrate tension can be avoided. In other arrangements, e.g. in an apparatus configured for sputter deposition, the transport system may be configured for a lower guiding speed of the film, e.g. a guiding speed of 10 m/min or less.

[0039] According to an embodiment, which may be combined with other embodiments described herein, at least one of the first unwinding spool 111, the at least one second unwinding spool 112, 113 and the composite film winding spool 114 may be provided in at least one spool chamber 401, 402, 403, 404. For example, first unwinding spool 111 which is configured for unwinding the first film 101 may be provided in a first unwinding spool chamber 401 which is separate from the vacuum chamber 400. Similarly, the at least one second unwinding spool 112, 113 which is configured for unwinding the at least one second film 102, 103 may be provided in a respective second unwinding spool chamber 402, 403, and/or the composite film winding spool 114 which is configured for winding the composite film 104 may be provided in a composite film winding spool chamber 404. The respective spool chambers 401, 402, 403, 404 may be provided with gate valves 401a, 402a, 403 a, 404a arranged at a wall of vacuum chamber 400 to allow for a respective film to be transported into and out of the vacuum chamber 400. Particularly, the gate valves 401a, 402a, 403a, 404a include a seal such that the respective spool chamber 401, 402, 403, 404 can be vented, while the vacuum chamber 400 may be maintained in an evacuated state. Providing the unwinding and winding spools within separate spool chambers facilitates quick and efficient loading and unloading of the respective spools, without venting the vacuum chamber 400. Due to the comparative robustness of the first film, the at least one second film and the composite film in comparison to the fragile exposed deposited layer 101a, the respective films may pass through the respective gate valves with no or negligible damage which has no effect on the quality of the resulting composite film. [0040] Alternatively, the quality of the composite film 104 may be further improved by avoiding any contact between a respective film and a gate valve. For example, if one of the first film or the at least one second film is a material which may be scratched or marred easily, an alternative arrangement may be used where contact with a gate valve is avoided. According to an embodiment, which may be combined with other embodiments described herein, at least one of the first unwinding spool 111, the at least one second unwinding spool 112, 113, and the composite film winding spool 104 may be provided in the vacuum chamber 400. In other words, at least one of the winding and/or unwinding spools may be provided in the same vacuum chamber 400 as the deposition apparatus 200 and the laminating apparatus 300. Such an arrangement allows for the respective films to be transported through the apparatus without passing through a vacuum chamber gate valve, reducing the occurrence of scratching, rubbing or marring of the surfaces of the respective films prior to deposition, prior to lamination or after lamination. It follows that the quality of the resulting composite film 104 is further improved. However, in such an apparatus, the vacuum chamber 400 is to be vented for the loading and unloading of the respective winding and unwinding spools, which may increase the time to manufacture a composite film 104.

[0041] The apparatus 10, 20 of the present disclosure includes a laminating apparatus 300, as exemplarily shown in the detail view of FIG. 3. The laminating apparatus 300 is configured to join each one of the first film 101 and the at least one second film 102, 103 to each other to produce composite film 104. The laminating apparatus 300 according to embodiments of the present disclosure may include a pair of pinch rollers 303 configured for bringing each one of the films 101, 102, 103 to be laminated into contact with each other, and for applying pressure to the stack of films 101, 102, 103 so that the stack of films 101, 102, 103 are laminated together. The laminating apparatus 300 may optionally include a pair of input rollers 301 configured for guiding the stack of films 101, 102, 103 into the laminating apparatus 300. Guiding rollers 301 may further be configured for applying pressure to the stack of films 101, 102, 103. Pinch rollers 303 and/or guiding rollers 301 may be configured to be active rollers or passive rollers. As exemplarily shown, guiding rollers 301 are provided at the entrance, i.e. at an upstream side, of laminating apparatus 300 and pinch rollers 303 are provided at the exit, i.e. at a downstream side, of laminating apparatus 300. [0042] According to an embodiment, which may be combined with other embodiments described herein, the laminating apparatus 300 may include a thermal laminating apparatus. A thermal lamination apparatus joins two or more films using a thermally-activated lamination layer by applying heat and pressure to laminate the films together. Thermal lamination may be advantageous over common techniques, e.g. solvent lamination, as there is no wet coating process to manage. For example, thermal lamination can avoid the providing and storing coating solution or the use of a complex coating head or drying ovens, and potential splashing of solvents and subsequent cleanup can also be avoided. Further, thermal lamination has minimal curing time in comparison to common lamination techniques. Laminating apparatus 300 may include, for example, a heater 302 configured to heat the stack of films 101, 102, 103 such that each film of the stack of films 101, 102, 103 are thermally joined to each other to form composite film 104. As exemplarily shown, heater 302 may include a non-contact heater, e.g. an infrared heater. Alternatively, the heater may include a contact heater, e.g. a heated roller. Particularly, one of pinch rollers 303 or guide rollers 301 may be heated rollers. The heater 302 is exemplarily shown as being provided downstream of the guiding rollers 301 and upstream of the pinch rollers 303, however the present disclosure is not limited thereto. For example, laminating apparatus 300 may be provided with a heater 302 downstream of pinch rollers 303, or may be provided with heaters 302 both upstream and downstream of pinch rollers 303. The laminating apparatus 300 may be contained within an enclosure, as exemplarily shown in FIG. 3, in order to block or hinder heat from the laminating apparatus 300 from heating other components in the apparatus 10, 20.

[0043] Alternatively, laminating apparatus 300 may be configured for joining first film 101 and at least one second film 102, 103 using a joining layer. For example, the at least one second film 102, 103 may include a joining layer, e.g. a glue layer, which facilitates joining of a further second film 102, 103. The laminating apparatus 300 may join the stack of layers 101, 102, 103 and the joining layer by applying pressure via pinch rollers 303, and/or by heating the stack of films using the heater 302 to produce a composite film 104.

[0044] According to a further aspect described herein, a method for manufacturing a composite film is provided. As diagrammatically shown in FIG. 4, the method 30 begins at start 31 and concludes at end 37. The method 30 includes providing 32 a first film, depositing 33 at least one deposited layer on the first film, providing 34 at least a second film, and laminating 36 the at least one second film to the first film over the at least one deposited layer, wherein the depositing 33 and the laminating 36 are performed in the same vacuum chamber.

[0045] In box 32, a first film is provided. Similarly, in box 34, at least one second film is provided. For example, the first film may be provided upstream of a deposition apparatus and a laminating apparatus on a first unwinding spool configured for unwinding the first film. The providing 32 of the first film may include mounting a first unwinding spool loaded with the first film, and threading first film through or past a deposition apparatus and a laminating apparatus along a transport path, and attaching an end of the first film to a winding spool configured for winding the composite film, such that the first film is provided in an initial position ready for processing. Similarly, the providing 34 of the at least one second film may include mounting at least one second unwinding spool loaded with each respective second film, and threading the at least one second film through or past the laminating apparatus along a transport path, and attaching an end of each respective second film to the winding spool configured for winding the composite film, such that the at least one second film is provided in an initial position ready for processing. The providing 32 of the first film and/or the providing 34 of the at least one second film may include mounting a first unwinding spool loaded with the first film and the at least one second unwinding spool loaded with each respective second film in a separate chamber, for example, an unwinding chamber, which may be attached to a wall of the vacuum chamber with a gate valve for transporting the first film and/or the at least one second film therethrough.

[0046] In box 33, at least one deposited layer is deposited on the first film. The depositing 33 of the at least one deposited layer may include transporting the first film past a deposition source, so that a layer of material may be deposited on a surface of the first film. According to an embodiment, which may be combined with other embodiments described herein, the depositing 33 of the at least one deposited layer includes one of thermal evaporation, physical vapor deposition (PVD) and chemical vapor deposition (CVD). The depositing 33 of the at least one deposited layer may include transporting the first film on a deposition drum, particularly a heated deposition drum. According to embodiments, which may be combined with other embodiments herein, the at least one deposited layer may be a metallic layer, a metallic oxide layer, a non-metallic oxide layer, or a barrier layer. Particularly, the at least one deposited layer may be a metallic barrier layer or a metallic oxide barrier layer. More particularly, the at least one deposited layer may be an aluminium barrier layer or an aluminium oxide barrier layer.

[0047] In box 36, the at least one second film is laminated to the first film over the at least one deposited layer. The depositing 33 of the at least one deposited layer onto the first film and the laminating 36 of the at least one second film to the first film is performed in the same vacuum chamber. According to an embodiment, which may be combined with other embodiments described herein, the laminating 36 may include thermal laminating. The laminating 36 may further include providing at least one joining layer, particularly a glue layer, between the first film and the at least one second film.

[0048] According to an embodiment, which may be combined with other embodiments described herein, method 30 may further include printing 35 at least one second film prior to the laminating 36. The printing 35 may include depositing at least one layer of printed material onto a surface of the at least one second film prior to laminating 36, so that the at least one layer of printed material is included in the resulting composite film. For example, the at least one layer of printed material may include a layer of ink printed in a design, text, or a pattern. Particularly, the printing 35 and the laminating 36 may be performed in the same vacuum chamber. Similar to performing the depositing 33 and the laminating 36 in the same vacuum chamber, performing printing 35 and laminating 36 in the same chamber allows for damage and/or oxidation of the at least one layer of printed material to be avoided, resulting in a composite film with improved quality. The printing 35 may be performed according to any printing method for printing designs, text or patterns onto films or flexible substrates, particularly onto plastic films.

[0049] According to an embodiment, which may be combined with other embodiments described herein, method 30 may further include providing 32 a first film, depositing 33 at least one deposited layer on the first film, providing 34 at least one printed film having a lamination layer on a first surface of the printed film and a layer of printed material on the opposite surface of the printed film, providing at least one further film having a lamination layer, and laminating 36 the at least one printed film to the first film and the at least one further film to the at least one printed film, such that the lamination layer of the at least one second film faces the at least one deposited layer and the lamination layer of the at least one further film faces the at least one layer of printed material.

[0050] According to a further aspect of the present disclosure, a composite film 104 is provided, wherein the composite film 104 is manufactured by the apparatus and method according to aspects and embodiments described herein. The composite film 104 includes a first film 101, at least one deposited layer 101a deposited on the first film 101, and at least one second film 102, 103 which is laminated to the first film 101 over the at least one deposited layer 101a. The at least one deposited layer 101a may include a metallic layer or a barrier layer. A composite film 104 manufactured by the apparatus according to aspects and embodiments described herein exhibits higher quality of the at least one deposited layer 101a, particularly a deposited layer 101a with greatly reduced scratching, marring or damage, and/or greatly reduced oxidation as compared to composite films manufactured by conventional apparatus. This advantageous effect is achieved by laminating the at least one second film 102, 103 to the first film 101 over the at least one deposited layer 101a in the same vacuum chamber and directly following the deposition of the at least one deposited layer 101a, so that the at least one deposited layer 101a is protected from damage and/or oxidation.

[0051] While the foregoing is directed to embodiments of the disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.