Title:
APPARATUS AND METHOD FOR MANUFACTURING HIGH-DENSITY IN-LINE CARBON NANOTUBE THIN FILM
Document Type and Number:
WIPO Patent Application WO/2021/043236
Kind Code:
A1
Abstract:
An apparatus and method for manufacturing an in-line carbon nanotube thin film. The apparatus comprises a container body (1), a buffer partition plate (4), and a solvent leading-out part (5); the buffer partition plate (4) is located at the lower part of the container body (1); the solvent leading-out part (5) is communicated with the inside of the container body (1) by means of a through hole on the side wall of the container body (1), and extends to the outside of the container body (1). The method comprises the following steps: injecting a carbon nanotube solution into the container; immersing a substrate into the carbon nanotube solution; injecting a sealing fluid which does not dissolve in the carbon nanotube solution along the substrate or the side wall of the container; and leading the solvent out or pulling the substrate to cause a relative movement between the substrate and the liquid surface, so as to form a large-area high-density in-line carbon nanotube thin film.
Inventors:
HAN JIE (CN)
WANG HUI (CN)
WANG HUI (CN)
Application Number:
PCT/CN2020/113382
Publication Date:
March 11, 2021
Filing Date:
September 04, 2020
Export Citation:
Assignee:
BEIJING HUA TAN YUAN XIN ELECTRONICS TECH CO LTD (CN)
BEIJING INST OF CARBON BASED INTEGRATED CIRCUIT (CN)
BEIJING INST OF CARBON BASED INTEGRATED CIRCUIT (CN)
International Classes:
C01B32/168; B05D1/18; B05D7/24; B82Y30/00; C01B32/158; C03C17/00; C08J7/06; C08J7/12; H01L51/00; C08L101/00
Foreign References:
| CN110451484A | 2019-11-15 | |||
| CN110482530A | 2019-11-22 | |||
| CN110611029A | 2019-12-24 | |||
| CN110589804A | 2019-12-20 | |||
| CN104334494A | 2015-02-04 | |||
| CN1922106A | 2007-02-28 |
Other References:
GAO BING, ZHANG XIAOPIN, QIU SONG, JIN HEHUA, SONG QIJUN, LI QINGWEN: "Assembly of aligned semiconducting carbon nanotubes in organic solvents via introducing inter-tube electrostatic repulsion", CARBON, ELSEVIER OXFORD, GB, vol. 146, 1 May 2019 (2019-05-01), GB, pages 172 - 180, XP055788372, ISSN: 0008-6223, DOI: 10.1016/j.carbon.2019.01.095
Attorney, Agent or Firm:
BEIJING BEVON INTELLECTUAL PROPERTY AGENCY (CN)
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