Title:
APPARATUS AND METHOD FOR SELF-ASSEMBLY OF SEMICONDUCTOR LIGHT EMITTING ELEMENTS
Document Type and Number:
WIPO Patent Application WO/2022/097784
Kind Code:
A1
Abstract:
According to an embodiment, provided is an apparatus for the self-assembly of semiconductor light emitting elements on a substrate, the apparatus being characterized by comprising: a chamber in which a fluid and semiconductor light emitting elements are accommodated; a conveyance unit for conveying a substrate including assembly electrodes to an assembly position; a first ultrasonic vibrator module positioned on one side of the chamber and driven so that the semiconductor light emitting elements are dispersed in the fluid; a second ultrasonic vibrator module positioned on one side or the other side of the chamber and driven so that the semiconductor light emitting elements are dispersed in a certain pattern in the fluid; and a voltage application unit for applying a voltage to the assembly electrodes to form an electric field so that the semiconductor light emitting elements in the certain pattern are placed on the substrate.
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Inventors:
LEE HYUNHO (KR)
YANG DOHWAN (KR)
YANG DOHWAN (KR)
Application Number:
PCT/KR2020/015466
Publication Date:
May 12, 2022
Filing Date:
November 06, 2020
Export Citation:
Assignee:
LG ELECTRONICS INC (KR)
International Classes:
H01L21/67; H01L21/52; H01L25/075
Foreign References:
| KR20200026765A | 2020-03-11 | |||
| CN110718611A | 2020-01-21 | |||
| CN110690247A | 2020-01-14 | |||
| US20190058080A1 | 2019-02-21 | |||
| KR20200005516A | 2020-01-15 |
Attorney, Agent or Firm:
PARK, Jang-Won (KR)
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