Title:
APPARATUS FOR REMOVING BUBBLES IN SOLUTION AND COATING MACHINE
Document Type and Number:
WIPO Patent Application WO/2019/090890
Kind Code:
A1
Abstract:
An apparatus for removing bubbles in a polyimide solution and a coating machine comprising same. The apparatus comprises a first tank (1), a second tank (2) provided in the first tank (1), and an ultrasonic generator (3) provided on the first tank (1); the volume of the second tank (2) is smaller than that of the first tank (1); the first tank (1) and the second tank (2) respectively form a first accommodating chamber (11) and a second accommodating chamber (21) that are not interconnected; the first accommodating chamber (11) is filled with water, and the second accommodating chamber (21) is filled with a solution; a solution outlet pipe (22), a solution inlet pipe (23), and an exhaust pipe (24) communicated with the second accommodating chamber (21) are respectively provided on the second tank (2); the solution outlet pipe (22) is connected to a solution pipeline of a coating nozzle (5); the solution inlet pipe (23) is connected to a storage tank (4). The apparatus for removing bubbles in a polyimide solution and a coating machine comprising same implement the removal of in a polyimide solution, so that bubble removal time can be shortened, and time required by a process is greatly reduced.
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Inventors:
ZHENG YING (CN)
Application Number:
PCT/CN2017/115999
Publication Date:
May 16, 2019
Filing Date:
December 13, 2017
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
B05C11/10; B01D19/02
Foreign References:
| CN201840914U | 2011-05-25 | |||
| CN104231289A | 2014-12-24 | |||
| CN102778817A | 2012-11-14 | |||
| CN106140567A | 2016-11-23 | |||
| CN104524818A | 2015-04-22 | |||
| US5834625A | 1998-11-10 |
Attorney, Agent or Firm:
MING & YUE INTELLECTUAL PROPERTY LAW FIRM (CN)
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