PROCESSING A SUBSTRATE, AND METHODS THEREFOR

TECHNICAL FIELD [0001] Embodiments of the present disclosure relate to apparatuses and methods for transportation of carriers, particularly carriers used during processing of large area substrates. More specifically, embodiments of the present disclosure relate to apparatuses and methods for contactless transportation of carriers employable in processing systems for vertical substrate processing, e.g. material deposition on large area substrates for display production. In particular, embodiments of the present disclosure relate to apparatuses for transportation of a first carrier and a second carrier in vertical substrate processing systems, e.g. for the manufacture of organic light-emitting diode (OLED) devices.

BACKGROUND [0002] Techniques for layer deposition on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD) and thermal evaporation. Coated substrates may be used in several applications and in several technical fields. For instance, coated substrates may be used in the field of display devices. Display devices can be used in the manufacture of television screens, computer monitors, mobile phones, other hand-held devices, and the like for displaying information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

[0003] For instance, coated substrates may be used in the field of organic light emitting diode (OLED) devices. OLEDs can be used for the manufacture of television screens, computer monitors, mobile phones, other hand-held devices and the like, e.g. for displaying information. An OLED device, such as an OLED display, may include one or more layers of an organic material situated between two electrodes that are deposited on a substrate.

[0004] During the deposition of a coating material on a substrate, the substrate may be held by a substrate carrier, and a mask may be held by a mask carrier in front of the substrate. A material pattern, e.g. a plurality of pixels, corresponding to an opening pattern of the mask can be deposited on the substrate, e.g. by material evaporation.

[0005] The functionality of an OLED device typically depends on the accuracy of the coating pattern and the thickness of the organic material, which should be within a predetermined range. For obtaining high-resolution OLED devices, technical challenges with respect to the deposition of evaporated materials need to be mastered. In particular, an accurate and smooth transport of a substrate carrier carrying a substrate and/or of a mask carrier carrying a mask through a vacuum system is challenging. Further, a precise handling of the substrate carrier with respect to the mask carrier under vacuum conditions is important for achieving high quality deposition results, e.g. for producing high- resolution OLED devices.

[0006] Accordingly, there is a continuing demand for improved apparatuses and methods for transportation of carriers as well as for providing improved vacuum processing systems which overcome at least some problems of the state of the art.

SUMMARY [0007] In light of the above, an apparatus for transportation of a first carrier and a second carrier in a vacuum chamber, a processing system for vertically processing a substrate, a method of transporting a first carrier and a second carrier in a vacuum chamber and a method of adjusting a distance between a first carrier and a second carrier in a vacuum chamber according to the independent claims are provided. Further aspects, advantages, and features are apparent from the dependent claims, the description, and the accompanying drawings.

[0008] According to an aspect of the present disclosure, an apparatus for transportation of a first carrier and a second carrier in a vacuum chamber is provided. The apparatus includes a first transport system provided along a first transport path and including a first upper track section. The first upper track section includes one or more magnetic bearings for contactlessly holding the first carrier in a first carrier transportation space. The one or more magnetic bearings are centrally arranged above a center of gravity of the first carrier to be transported. Additionally, the first upper track section includes a drive unit for moving the first carrier along the first transport path. The one or more magnetic bearings and the drive unit are arranged above the first carrier transportation space. Further, the apparatus includes a second transport system provided along a second transport path horizontally offset from the first transport path and including a second upper track section. The second upper track section includes one or more further magnetic bearings for contactlessly holding the second carrier in a second carrier transportation space. The one or more further magnetic bearings are centrally arranged above a center of gravity of the second carrier to be transported. Additionally, the second upper track section includes a further drive unit for moving the second carrier along the second transportation path. The one or more further magnetic bearings and the further drive unit are arranged above the second carrier transportation space. The one or more further magnetic bearings of the second upper track section are arranged next to the one or more magnetic bearings of the first upper track section.

[0009] According to a further aspect of the present disclosure, a processing system for vertically processing a substrate is provided. The processing system includes at least one vacuum chamber including a processing device. Further, the processing system includes an apparatus for transportation of a first carrier and a second carrier in a vacuum chamber according to any embodiments described herein.

[0010] According to another aspect of the present disclosure, a method of transporting a first carrier and a second carrier in a vacuum chamber is provided. The method includes contactlessly holding the first carrier in a first carrier transportation space using one or more magnetic bearings. The one or more magnetic bearings are centrally arranged above a center of gravity of the first carrier to be transported. Additionally, the method includes contactlessly holding the second carrier in a second carrier transportation space using one or more further magnetic bearings. The one or more further magnetic bearings are centrally arranged above a center of gravity of the second carrier to be transported. The one or more further magnetic bearings are arranged next to the one or more magnetic bearings. Further, the method includes transporting the first carrier in a transport direction using a drive unit being arranged above the first carrier transportation space. Yet further, the method includes transporting the second carrier in a transport direction using a further drive unit being arranged above the second carrier transportation space.

[0011] According to another aspect of the present disclosure, a method of adjusting a distance between a first carrier and a second carrier in a vacuum chamber is provided. The method includes providing an apparatus for transportation of a first carrier and a second carrier. The apparatus includes a first transport system provided along a first transport path and including a first upper track section. The first upper track section includes one or more magnetic bearings for contactlessly holding the first carrier in a first carrier transportation space. The one or more magnetic bearings are centrally arranged above a center of gravity of the first carrier to be transported. Additionally, the first upper track section includes a drive unit for moving the first carrier along the first transport path. The one or more magnetic bearings and the drive unit are arranged above the first carrier transportation space. Further, the apparatus includes a second transport system provided along a second transport path horizontally offset from the first transport path and including a second upper track section. The second upper track section includes one or more further magnetic bearings for contactlessly holding the second carrier in a second carrier transportation space. The one or more further magnetic bearings are centrally arranged above a center of gravity of the second carrier to be transported. Additionally, the second upper track section includes a further drive unit for moving the second carrier along the second transportation path. The one or more further magnetic bearings and the further drive unit are arranged above the second carrier transportation space. The one or more further magnetic bearings of the second upper track section are arranged next to the one or more magnetic bearings of the first upper track section. Additionally, the apparatus includes a second carrier transfer assembly for moving the second carrier from the second transport path towards the first transport path in a second carrier transfer direction. The second carrier transfer assembly includes a second transfer actuator provided in an atmospheric space, particularly outside of the vacuum chamber or in an atmospheric box. Further, the method of adjusting a distance between the first carrier and the second carrier in the vacuum chamber includes moving the second carrier from the second transport path towards the first transport path in a second carrier transfer direction by using the second transfer actuator. Alternatively, the method of adjusting a distance between the first carrier and the second carrier in the vacuum chamber includes moving the second carrier from the second transport path away from the first transport path in a second carrier transfer direction by using the second transfer actuator.

[0012] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0013] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIG. 1 shows a schematic view of an apparatus for transportation of a first carrier and a second carrier in a vacuum chamber according to embodiments described herein; FIGS. 2 and 3 A show schematic views of an apparatus for transportation of a first carrier and a second carrier in a vacuum chamber according to further embodiments described herein;

FIG. 3B shows a schematic side view of an upper portion of an apparatus for transportation of a first carrier and a second carrier in a vacuum chamber according to embodiments described herein;

FIG. 4 shows a schematic view of an upper portion of an apparatus for transportation of a first carrier and a second carrier in a vacuum chamber according to further embodiments described herein; FIG. 5 shows a schematic view of a processing system for vertically processing a substrate according to embodiments described herein;

FIG. 6 shows a flowchart for illustrating a method of transporting a first carrier and a second carrier in a vacuum chamber according to embodiments described herein; and FIG. 7 shows a flowchart for illustrating a method of adjusting a distance between a first carrier and a second carrier in a vacuum chamber according to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0014] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0015] With exemplary reference to FIG. 1, an apparatus 100 for transportation of a first carrier 10A and a second carrier 10B in a vacuum chamber 210 according to the present disclosure is described. For instance, the vacuum chamber 210 can be a vacuum chamber of a processing system 200 for vertically processing a substrate as described herein. The apparatus for transportation of a first carrier and a second carrier may also be referred to as transport apparatus herein.

[0016] According to embodiments which can be combined with any other embodiments described herein, the apparatus 100 includes a first transport system 101 provided along a first transport path Tl in a transport direction T. The transport direction T is perpendicular to the paper plane of FIG. 1. The first transport system 101 includes a first upper track section 11U. The first upper track section 11U includes one or more magnetic bearings 120 for contactlessly holding the first carrier 10A in a first carrier transportation space 15 A. The one or more magnetic bearings 120 are centrally arranged above a center of gravity Gl of the first carrier 10A to be transported. Additionally, the first upper track section 11U includes a drive unit 130 for moving the first carrier 10A along the first transport path Tl . The one or more magnetic bearings 120 and the drive unit 130 are arranged above the first carrier transportation space 15 A.

[0017] Additioanlly, the apparatus 100 includes a second transport system 102 provided along a second transport path T2 horizontally offset from the first transport path Tl and including a second upper track section 14U. The second upper track section 14U inlcudes one or more further magnetic bearings 120B for contactlessly holding the second carrier 10B in a second carrier transportation space 15B. The one or more further magnetic bearings 120B are centrally arranged above a center of gravity G2 of the second carrier 10B to be transported. Further, the second upper track section 14U includes a further drive unit 130B for moving the second carrier 10B along the second transportation path T2. The one or more further magnetic bearings 120B and the further drive unit 130B are arranged above the second carrier transportation space 15B. As exemplarily shown in FIG. 1, the one or more further magnetic bearings 120B are arranged next to the one or more magnetic bearings 120.

[0018] Accordingly, embodiments of the apparatus for transportation of a first carrier and a second carrier as described herein are improved compared to conventional carrier transportation apparatuses, particularly with respect to compactness as well as with respect to accurate and smooth transportation of carriers in a vacuum chamber, e.g. in which a high temperature vacuum environment is provided. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs compared to conventional carrier transportation apparatuses. In particular, embodiments of the apparatus for transportation of a carrier as described herein are more insensitive against manufacturing tolerances, deformation, and thermal expansion. Further, beneficially a simpler integration of the apparatus for transportation of a first carrier and a second carrier into a vacuum chamber is provided.

[0019] Before various further embodiments of the present disclosure are described in more detail, some aspects with respect to some terms used herein are explained. [0020] In the present disclosure, a“carrier transportation space” may be understood as a zone where the carrier is arranged in the transportation direction along the transport path during the transport of the carrier. In particular, as exemplarily shown in FIG. 1, the carrier transportation space can be a vertical carrier transportation space having a height H extending in a vertical direction and a width W extending in a horizontal direction. For instance, the aspect ratio of H/W can be H/W > 5, particularly H/W > 10. Unless explicitly described, the term“carrier transportation space” as used herein may refer to the first carrier transportation space and/or the second carrier transportation space as described herein.

[0021] With exemplary reference to FIG. 1, it is to be understood that an upper track section as described herein beneficially provides for a magnetic levitation system for contactlessly transporting a carrier. As schematically shown in FIG.l, the first carrier 10A is contactlessly held in the first carrier transportation space 15A between an upper chamber wall 212 and a bottom chamber wall 211. The second carrier 10B is contactlessly held in the second carrier transportation space 15B between the upper chamber wall 212 and the bottom chamber wall 211. In particular, the upper chamber wall 212 can be a ceiling of a vacuum chamber. Accordingly, the bottom chamber wall 211 can be the bottom wall of a vacuum chamber.

[0022] With reference to FIG. 1, in the present disclosure the expression“centrally arranged above the center of gravity of a carrier” can be understood in that a vertical plane 111 extending through the center of gravity G of the carrier also extends through the magnetic bearings. In other words, the vertical plane 111 extending through the center of gravity G of the carrier, e.g. the first carrier 10A or the second carrier 10B, may intersect with the respective magnetic bearings, e.g. the one or more magnetic bearings 120 or the one or more further magnetic bearings 120B. In particular, the vertical plane 111 may approximately intersect with a center of the respective magnetic bearings. The expression“approximately intersect with a center of the respective magnetic bearings”, can be understood in that the vertical plane 111 intersects the magnetic bearings at a lateral distance from the center of the respective magnetic bearings. In particular, the vertical plane 111 can intersect the magnetic bearings with a lateral deviation from the center of the respective magnetic bearings, i.e. at a lateral distance to the center of the respective magnetic bearings. The term“lateral deviation” may be understood as a lateral deviation from the center of the respective magnetic bearings in the direction of the lateral edges of the respective magnetic bearings. Accordingly, a vertical plane 111 intersecting exactly the center of the respective magnetic bearings has a lateral deviation of 0% from the center of the respective magnetic bearings. A vertical plane 111 intersecting exactly an edge of the respective magnetic bearings has a lateral deviation of 100% from the center of the respective magnetic bearings. According to some embodiments which can be combined with other embodiments described herein, the lateral deviation of the vertical plane 111 intersecting the center of the respective magnetic bearings may be ± 75%, particularly ± 50%, more particularly ± 25%, more particularly ± 10%. According to an example, the vertical plane 111 may represent a plane of symmetry for the respective magnetic bearings. As exemplarily shown in FIG. 1, a drive unit as described herein may be laterally arranged with respect to the respective magnetic bearings.

[0023] In the present disclosure, a“magnetic levitation system” can be understood as a system configured for holding an object, e.g. a carrier, in a contactless manner by using magnetic force. In the present disclosure, the term“levitating” or“levitation” refers to the state of an object, e.g. a carrier carrying a substrate or a mask, wherein the object floats without mechanical contact or support. Further, moving or transporting an object refers to providing a driving force, e.g. a force in a direction different than that of the levitation force, wherein the object is moved from one position to another, different position, for example a different position along the transport direction. For example, a carrier carrying a substrate or a mask can be levitated, i.e. by a force counteracting gravity, and can be moved in a direction different to a direction parallel to gravity while being levitated.

[0024] In the present disclosure, the term“contactless” can be understood in the sense that a weight, e.g. the weight of a carrier, particularly the weight of a carrier carrying a substrate or a mask, is not held by a mechanical contact or mechanical forces but is held by a magnetic force. In other words, the term“contactless” as used throughout the description can be understood in that a carrier is held in a levitating or floating state using magnetic forces instead of mechanical forces, i.e. contact forces. [0025] In the present disclosure, a“carrier” can be understood as a carrier configured for holding a substrate, also referred to as substrate carrier. For instance, the carrier can be a substrate carrier for carrying a large area substrate. It is to be understood that the embodiments of the apparatus for transportation of a carrier may also be used for other carrier types, e.g. mask carriers. Accordingly, additionally or alternatively, the carrier may be a carrier configured for carrying a mask. In particular, the first carrier 10A as described herein can be a substrate carrier, e.g. carrying a substrate 1, and the second carrier 10B as described herein can be a mask carrier, e.g. carrying a mask 2. The size of the substrate carrier may be different than the size of the mask carrier. For instance, a height and/or a width of the substrate carrier can be larger than a height and/or a width of the mask carrier. Alternatively, the height and/or the width of the substrate carrier can be smaller than the height and/or the width of the mask carrier. Further, it is to be understood that unless explicitly stated in the present disclosure, the term“carrier” as used herein may refer to the first carrier and/or the second carrier as described herein.

[0026] In the present disclosure, the term“substrate” may particularly embrace substantially inflexible substrates, e.g., a wafer, slices of transparent crystal such as sapphire or the like, or a glass plate. However, the present disclosure is not limited thereto, and the term“substrate” may also embrace flexible substrates such as a web or a foil. The term“substantially inflexible” is understood to distinguish over“flexible”. Specifically, a substantially inflexible substrate can have a certain degree of flexibility, e.g. a glass plate having a thickness of 0.5 mm or below, wherein the flexibility of the substantially inflexible substrate is small in comparison to the flexible substrates. According to embodiments described herein, the substrate may be made of any material suitable for material deposition. For instance, the substrate may be made of a material selected from the group consisting of glass (for instance soda-lime glass, borosilicate glass etc.), metal, polymer, ceramic, compound materials, carbon fiber materials or any other material or combination of materials which can be coated by a deposition process.

[0027] In the present disclosure, the term“large area substrate” refers to a substrate having a main surface with an area of 0.5 m ² or larger, particularly of 1 m ² or larger. In some embodiments, a large area substrate can be GEN 4.5, which corresponds to about 0.67 m ² of substrate (0.73x0.92m), GEN 5, which corresponds to about 1.4 m ² of substrate (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m ² of substrate (1.95 m x 2.2 m), GEN 8.5, which corresponds to about 5.7 m ² of substrate (2.2 m x 2.5 m), or even GEN 10, which corresponds to about 8.7 m ² of substrate (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented. Further, the substrate thickness can be from 0.1 to 1.8 mm, particularly about 0.9 mm or below, such as 0.7 mm or 0.5.

[0028] In the present disclosure, a“transport system” can be understood as a system configured for transporting a carrier in a transport direction along a transport path. The term“transport direction” can be understood as the direction in which the carrier is transported along the transport path. Typically, the transport direction can be an essentially horizontal direction.

[0029] In the present disclosure, an“upper track section” can be understood as an upper part of a transport system as described herein including one or more magnetic bearings and a drive unit.

[0030] In the present disclosure, a“magnetic bearing” can be understood as a bearing configured for holding or supporting an object, e.g. a carrier as described herein, in a contactless manner, i.e. without physical contact. Accordingly, the one or more magnetic bearings as described herein may be configured to generate a magnetic force acting on the carrier, such that the carrier is contactlessly held at a predetermined distance from a base structure, e.g. the upper chamber wall 212 as shown in FIG. 1. In particular, the one or more magnetic bearings 120 can be configured to generate a magnetic force acting in an essentially vertical direction V such that the vertical width of a gap 122 between the upper chamber wall 212 and a carrier as described herein can be maintained essentially constant.

[0031] In the present disclosure, a“drive unit” can be understood as a unit configured for moving an object, e.g. a carrier as described herein, in a contactless manner in the transport direction. In particular, the drive unit as described herein may be configured to generate a magnetic force acting on the carrier in the transport direction. Accordingly, the drive unit can be a linear motor. For example, the linear motor can be an iron-core linear motor. Alternatively, the linear motor can be an ironless linear motor. An ironless linear motor can be beneficial for avoiding a torsional moment on the carrier caused by vertical forces due to possible interaction of the passive magnetic elements of the carrier and the iron-core of the linear motor.

[0032] Some embodiments described herein involve the notion of a “vertical direction”. A vertical direction is considered a direction substantially parallel to the direction along which the force of gravity extends. A vertical direction may deviate from exact verticality (the latter being defined by the gravitational force) by an angle of, e.g., up to 15 degrees. Further, some embodiments described herein may involve the notion of a“lateral direction”. A lateral direction is to be understood to distinguish over a vertical direction. A lateral direction may be perpendicular or substantially perpendicular to the exact vertical direction defined by gravity.

[0033] With exemplary reference to FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the one or more magnetic bearings 120 and the one or more further magnetic bearings 120B are arranged mirror symmetric with respect to a plane of symmetry 105. The plane of symmetry 105 is located between the first carrier transportation space 15A and the second carrier transportation space 15B. In particular, the plane of symmetry 105 is a vertical plane.

[0034] With exemplary reference to FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the drive unit 130 and the further drive unit 130B are arranged mirror symmetric with respect to the plane of symmetry 105. Typically, a lateral distance of the drive unit 130 to the plane of symmetry 105 is larger than a lateral distance of the one or more magnetic bearings 120 to the plane of symmetry 105. Further, typically a lateral distance of the further drive unit 130B to the plane of symmetry 105 is larger than a lateral distance of the one or more further magnetic bearings 120B to the plane of symmetry 105.

[0035] With exemplary reference to FIG. 1, it is to be understood that typically the lateral distance of the drive unit 130 to the plane of symmetry 105 substantially corresponds, particularly is equal, to the lateral distance of the further drive unit 130B to the plane of symmetry 105. Accordingly, typically the lateral distance of the one or more magnetic bearings 120 to the plane of symmetry 105 substantially corresponds, particularly is equal, to the lateral distance of the one or more further magnetic bearings 120B to the plane of symmetry 105.

[0036] With exemplary reference to FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the one or more magnetic bearings 120 include one or more first actuators 121 for contactlessly holding . The drive unit 130 may include one or more second actuators 132 for moving the first carrier 10A along the first transport path Tl. Further, the one or more further magnetic bearings 120B may include one or more third actuators 121B for contactlessly holding the second carrier 10B. The further drive unit 130B may include one or more fourth actuators 132B for moving the second carrier 10B along the second transportation path T2.

[0037] In the present disclosure, a“first actuator” of the one or more magnetic bearings can be understood as an active and controllable element of the magnetic bearings. Accordingly, a“third actuator” of the one or more further magnetic bearings can be understood as an active and controllable element of the magnetic bearings. In particular, the one or more first actuators and/or the one or more third actuators may include a controllable magnet such as an electromagnet. The magnetic field of the one or more first actuators and/or the one or more third actuators may be actively controllable for maintaining and/ or adjusting distance between the upper chamber wall 212 and the carrier, e.g. the first carrier and or the second carrier, respectively. In other words, a“first actuator” of the one or more magnetic bearings and/or a“third actuator” of the one or more further magnetic bearings can be understood as an element with a controllable and adjustable magnetic field to provide a magnetic levitation force acting on the respective carrier, e.g. the first carrier and/or the second carrier.

[0038] The one or more second actuators 132 and/or the one or more fourth actuators 132B can be one or more controllable magnets, e.g. electromagnets. Accordingly, the one or more second actuators 132 and/or the one or more fourth actuators 132B may be actively controllable for exerting a moving force on the carrier in the transport direction. As exemplarily shown in FIG. 1, one or more second magnetic counterparts 182 may be arranged at the first carrier 10A and/or the second carrier 10B, particularly at a top part of the first carrier 10A and/or the second carrier 10B. The one or more second magnetic counterparts 182 of the carrier, e.g. the first carrier 10A and/or the second carrier 10B, may magnetically interact with the one or more second actuators 132 of the drive unit 130 and/or the one or more fourth actuators 132B of the further drive unit 130B, respectively. In particular, the one or more second magnetic counterparts 182 can be passive magnetic elements. For instance, the one or more second magnetic counterparts 182 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0039] According to some embodiments, which can be combined with other embodiments described herein, the one or more first actuators 121, the one or more second actuators 132, the one or more third actuators 121B and one or more fourth actuators 132B can be arranged in an atmospheric space. The expression“atmospheric space” can be understood as a space having atmospheric pressure conditions, i.e. approximately 1.0 bar. For example, the atmospheric space may be a space provided outside of the vacuum chamber. Alternatively, the atmospheric space can be provided by an atmospheric box or atmospheric container (not explicitly shown) provided inside of the vacuum chamber.

[0040] With exemplary reference to FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the one or more first actuators 121, the one or more second actuators 132, the one or more third actuators 121B, and the one or more fourth actuators 132B can be attached to an outside surface of an upper chamber wall 212, particularly of a vacuum chamber 210. Accordingly, beneficially the active elements of the one or more magnetic bearings are arranged at a location which is well accessible for mounting /or maintenance resulting in a reduction of costs. According to an example, the outside surface of the upper chamber wall 212 may include receptions for receiving the one or more first actuators 121, the one or more second actuators 132, the one or more third actuators 121B, and the one or more fourth actuators 132B, as exemplarily shown in FIG. 1.

[0041] It is to be understood that the one or more first actuators 121 are configured for contactlessly holding the first carrier 10A and the one or more third actuators 121B are configured for contactlessly holding the second carrier 10B. As exemplarily shown in FIG. 1, one or more first magnetic counterparts 181 may be arranged at the first carrier 10A and/or the second carrier 10B, particularly at a top part of the first carrier 10A and/or the second carrier 10B. The one or more first magnetic counterparts 181 of the first carrier 10A may magnetically interact with the one or more first actuators 121 of the one or more magnetic bearings 120. The one or more first magnetic counterparts 181 of the second carrier 10B may magnetically interact with the one or more third actuators 121B of the one or more further magnetic bearings 120B. In particular, the one or more first magnetic counterparts 181 can be passive magnetic elements. For instance, the one or more first magnetic counterparts 181 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0042] For example, an output parameter such as an electric current which is applied to the one or more first actuators may be controlled depending on an input parameter such as a distance between the upper chamber wall 212 and the first carrier 10 A. For instance, a distance (e.g. the gap 122 indicated in FIG. 1) between the upper chamber wall 212 and the first carrier 10A may be measured by a distance sensor, and the magnetic field strength of the one or more first actuators may be set depending on the measured distance. In particular, the magnetic field strength may be increased in the case of a distance above a predetermined threshold value, and the magnetic field strength may be decreased in the case of a distance below the threshold value. The one or more first actuators may be controlled in a closed loop or feedback control.

[0043] Similarly, an output parameter such as an electric current which is applied to the one or more third actuators may be controlled depending on an input parameter such as a distance between the upper chamber wall 212 and the second carrier 10B. For instance, a distance (e.g. the gap 122 indicated in FIG. 1) between the upper chamber wall 212 and the second carrier 10B may be measured by a distance sensor, and the magnetic field strength of the one or more third actuators may be set depending on the measured distance. In particular, the magnetic field strength may be increased in the case of a distance above a predetermined threshold value, and the magnetic field strength may be decreased in the case of a distance below the threshold value. The one or more third actuators may be controlled in a closed loop or feedback control.

[0044] With exemplary reference to FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the apparatus 100 further includes a first lower track section 11L and a second lower track section 14L. The first lower track section 11L comprises a first contactless guiding arrangement 140 A for guiding the first carrier 10A along the first transport path Tl. The second lower track section 14L includes a second contactless guiding arrangement 140B for guiding the second carrier 10B along the second transport path T2.

[0045] In the present disclosure, a“lower track section” can be understood as a lower part of a transport system as described herein. Typically, the lower track section is arranged at a vertical distance from the upper track section. In particular, the lower track section may include a contactless guiding arrangement as described herein for guiding a first carrier 10A and/ or a second carrier 10B in the transport direction T.

[0046] With exemplary reference to FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the first lower track section 11L and the second lower track section 14L are movable in a vertical direction V. In particular, the apparatus may include an actuator 124 coupled to the first lower track section 11L and the second lower track section 14L for modifying a distance between the first lower track section 11L and the first upper track section 11U as well as for modifying a distance between the second lower track section 14L and the second upper track section 14U.

[0047] As exemplarily shown in FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the first contactless guiding arrangement 140A and/or the second contactless guiding arrangement 140B can include one or more passive magnetic bearings 125. In particular, as exemplarily shown in FIG. 1, the one or more passive magnetic bearings 125 can be vertically arranged. Accordingly, the one or more passive magnetic bearings 125 are configured for providing a magnetic force acting on the respective carrier, particularly the first carrier 10A and/or the second carrier 10B, in a horizontal direction, particularly a lateral direction L, as exemplarily indicated in FIG. 1.

[0048] For instance, as exemplarily shown in FIG. 1, the one or more passive magnetic bearings 125 may be provided by vertical passive magnetic elements arranged in parallel. Typically, at least two passive magnetic elements are arranged to provide a reception for a third magnetic counterpart 183 of the respective carrier, particularly the first carrier 10A and/or the second carrier 10B. Accordingly, in the presence of a carrier, the third magnetic counterpart 183 is arranged between oppositely arranged passive magnetic elements of the one or more passive magnetic bearings 125. Typically, the third magnetic counterpart 183 includes a passive magnetic element. In FIG. 1, a north pole N portion of the passive magnetic elements is schematically indicted by the hatching pattern. A south pole portion of the passive magnetic elements is represented by the blank element adjacent to the north pole N portion.

[0049] As exemplarily shown in FIG. 1, typically the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 are arranged such that a south pole portion of the passive magnetic element of the third magnetic counterpart 183 faces a south pole portion of the passive magnetic element of the one or more passive magnetic bearings 125 (right hand side of the first contactless guiding arrangement 140 A and left hand side of the second contactless guiding arrangement 140B shown in FIG. 1). Accordingly, a north pole portion of the passive magnetic element of the third magnetic counterpart 183 may face a north pole portion of the passive magnetic element of the one or more passive magnetic bearings 125 (left hand side of the first contactless guiding arrangement 140 A and right hand side of the second contactless guiding arrangement 140B shown in FIG. 1). Accordingly, the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 can be arranged such that repulsive magnetic forces act between the passive magnetic element of the third magnetic counterpart 183 and the passive magnetic elements of the one or more passive magnetic bearings 125. Although not explicitly shown, it is to be understood that alternatively the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 can be arranged such that attractive magnetic forces act between the passive magnetic element of the third magnetic counterpart 183 and the passive magnetic elements of the one or more passive magnetic bearings 125.

[0050] As shown in FIGS. 1 to 3, the first contactless guiding arrangement 140 A and the second contactless guiding arrangement 140B can be connected to a common support structure 145. The common support structure 145 can be coupled to an actuator 124 for modifying a distance between the lower track sections and the upper track sections. Further, a protective bellow 174 for ensuring a vacuum sealing between movable elements of the actuator 124 and the vacuum chamber may be provided, as exemplarily shown in FIG. 3A.

[0051] According to an alternative configuration of the contactless guiding arrangements as exemplarily shown in FIG. 2, the one or more passive magnetic bearings 125 may be provided in a reception of a common support structure 145 for the first contactless guiding arrangement 140 A and the second contactless guiding arrangement 140B. In particular, according to the alternative configuration, the one or more passive magnetic bearings 125 are arranged below the third magnetic counterpart 183 of the respective carriers.

[0052] Accordingly, a contactless lateral guiding of the carrier can be provided beneficially. Further, it is to be noted that providing a passive guiding arrangement is particularly well suited for providing a robust carrier transport in high temperature vacuum environments at low costs. [0053] In the present disclosure, a“passive magnetic bearing” can be understood as a bearing having passive magnetic elements, which are not subject to active control or adjustment, at least not during operation of the apparatus. In particular, a passive magnetic bearing may be adapted for generating a magnetic field, e.g. a static magnetic field. In other words, a passive magnetic bearing may not be configured for generating an adjustable magnetic field. For instance, the magnetic elements of the one or more passive magnetic bearings may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0054] Accordingly, a“passive magnetic element” or“passive magnet” as used herein may be understood as a magnet which is not actively controlled, e.g. via a feedback control. For example, no output parameter such as a magnetic field strength of the passive magnet is controlled depending on an input parameter such as a distance. The “passive magnetic element” or“passive magnet” may rather provide a side stabilization of the carrier without any feedback control. For example, a“passive magnetic element” or“passive magnet” as described herein may include one or more permanent magnets. Alternatively or additionally, a“passive magnetic element” or“passive magnet” may include one or more electromagnets which may not be actively controlled.

[0055] Accordingly, it is to be understood that the first transport system 101 can be a magnetic levitation system including a first upper track section 11U being fixed and a first lower track section 11L being movable in a vertical direction V. Accordingly, the second transport system 102 can be a magnetic levitation system including a second upper track section 14U being fixed and a second lower track section 14L being movable in the vertical direction V.

[0056] With exemplary reference to FIG. 3A, according to some embodiments, which can be combined with other embodiments described herein, the apparatus 100 may further include a first carrier transfer assembly 150A for moving the first carrier 10A away from the first transport path Tl in a first carrier transfer direction Sl. The first carrier transfer assembly 150A typically includes a first transfer actuator 154A provided in an atmospheric space, particularly outside of the vacuum chamber or in an atmospheric box.

[0057] In the present disclosure, a“first carrier transfer assembly” can be understood as an assembly configured to move the first carrier, particularly being a substrate carrier, between different transportation paths laterally offset from each other. In particular, typically the first carrier transfer assembly is configured for laterally moving the first carrier in a first carrier transfer direction Sl, e.g. for switching a path of the first carrier. With exemplary reference to FIG. 3A, it is to be understood that the term“first carrier transfer direction Sl” can be understood as a horizontal direction, particularly being perpendicular to the transport direction T.

[0058] With exemplary reference to FIG. 3 A, according to some embodiments, which can be combined with other embodiments described herein, the first carrier transfer assembly 150A includes one or more carrier transfer elements 152. For instance, the one or more carrier transfer elements 152 can be elongated elements extending in the first carrier transfer direction S 1. As exemplarily indicated by the double sided arrows, the one or more carrier transfer elements 152 are movable in the first carrier transfer direction Sl for transferring the first carrier 10A, particularly for switching a path, e.g. from the first transportation path Tl to the second transportation path T2 or vice versa. In particular, the one or more carrier transfer elements 152 can be connected to a first transfer actuator 154A. For instance, the first transfer actuator 154A can be provided outside of the vacuum chamber 210. Further, protective bellows 156 may be provided for ensuring a vacuum sealing between the one or more carrier transfer elements 152 and the vacuum chamber.

[0059] For example, FIG. 3A shows two carrier transfer elements each being connected to a separate transfer actuator, wherein respective bellows are provided. However, it is to be understood that alternatively more than two carrier transfer elements may be provided. Further, it is to be understood that according to an alternative configuration, the carrier transfer elements may be connected or coupled to a common transfer actuator.

[0060] With exemplary reference to FIG. 3A, according to some embodiments, which can be combined with other embodiments described herein, the apparatus 100 may further include a second carrier transfer assembly 150B for moving the second carrier 10B from the second transport path T2 towards the first transport path Tl or for moving the second carrier 10B from the second transport path T2 away from the first transport path Tl in a second carrier transfer direction S2. The second carrier transfer assembly 150B typically includes a second transfer actuator 154B provided in an atmospheric space, particularly outside of the vacuum chamber or in an atmospheric box. For instance, the second transfer actuator 154B can be arranged on the same side of the vacuum chamber 210 as the first transfer actuator 154A, as exemplarily shown in FIG. 3 A.

[0061] In the present disclosure, a “second carrier transfer assembly” can be understood as an assembly configured to move the second carrier, particularly being a mask carrier, towards the first carrier for adjusting a distance between the second carrier and the first carrier. In particular, typically the second carrier transfer assembly is configured for laterally moving the second carrier in a second carrier transfer direction S2. With exemplary reference to FIG. 3A, it is to be understood that the term“second carrier transfer direction S2” can be understood as a horizontal direction, particularly being perpendicular to the transport direction T. [0062] It is to be understood, the second carrier transfer assembly 150B may include one or more carrier transfer elements 152 which can be configured similarly to the one or more carrier transfer elements of the second carrier transfer assembly 150B. According to an example, as exemplarily shown in FIG. 3 A, one or more carrier transfer elements 152 of the second carrier transfer assembly 150B may be configured to extend around the first carrier transportation space 15A and the second carrier transportation space 15B. In particular, as exemplarily shown in FIG. 3A, the upper carrier transfer elements of the one or more carrier transfer elements 152 are arranged above the first carrier 10A and the first carrier 10B. For example the upper carrier transfer elements can be arranged in a space or a gap provided between neighboring actuators of the magnetic bearings and the drive units as described herein. For simplification of illustration, the actuators of the magnetic bearings and the drive units as described herein are indicated by reference number 190 in FIG. 3B.

[0063] It is to be understood that the space 191 or the gap between said neighboring actuators is configured such that the upper carrier transfer elements be arranged between said neighboring actuators, as exemplarily shown in FIG. 3B. Further, it is to be understood that the carrier transfer elements as described herein typically extend in the lateral direction L.

[0064] As exemplarily shown in FIG. 3 A, the upper chamber wall 212 may be configured to extend into the vacuum chamber 210. In particular, the upper chamber wall 212 equipped with the magnetic bearings and the drive units as described herein may extend into the vacuum chamber in the vertical direction by 50 mm to 100 mm. For example, as exemplarily shown in FIG. 3 A, the upper chamber wall 212 can be implemented as a tub-like plate element. Further, it is to be understood that the upper chamber wall can have recesses 192 for that upper carrier transfer elements. In particular, from Fig. 3B it is to be understood that the upper carrier transfer elements are provided inside the vacuum chamber and the magnetic bearings and the drive units as described herein are provided in an atmospheric box or outside of the vacuum chamber.

[0065] As schematically indicated in FIG. 3A, according to some embodiments which can be combined with other embodiments described herein, the one or more carrier transfer elements 152 include a carrier holding portion 153 for holding a carrier as described herein. In particular, the carrier holding portion 153 can be adapted to be coupled to respective coupling elements provided at the first carrier. For example, in FIG. 3 A the coupling elements of the first carrier are schematically illustrated as recesses. It is to be understood that carrier holding portion 153 and the coupling elements of the carrier can have other configurations which are configured for coupling the carrier holding portion of the carrier transfer elements to the first carrier.

[0066] With exemplary reference to FIG. 4, according to some embodiments, which can be combined with other embodiments described herein, the apparatus 100 further includes at least one side stabilization device 160 with at least one stabilization magnet 161 configured to apply a restoring force F on a carrier as described herein in a lateral direction L transverse to the transport direction T. For example, the at least one stabilization magnet 161 can be arranged above the first carrier transportation space 15A and/or the second carrier transportation space 15B, particularly in an atmospheric space. In particular, the at least one stabilization magnet 161 can be attached to an outside surface of the upper chamber wall 212. Typically, the at least one stabilization magnet 161 can be arranged at a lateral distance with respect to the drive units, e.g. the drive unit 130 and the further drive unit 130B.

[0067] Accordingly, the at least one side stabilization device 160 may beneficially stabilize the carrier at a predetermined lateral position by applying a restoring force on a carrier as described herein in the case of a lateral displacement of the carrier. The restoring force F pushes or pulls the carrier back to the predetermined lateral position. Accordingly, the at least one side stabilization device 160 may beneficially generate a stabilization force configured to counteract a displacement of the carrier from a carrier transportation space, e.g. the first carrier transportation space 15A and or the second carrier transportation space 15B, in the lateral direction L. In other words, the at least one side stabilization device 160 may be configured to generate a restoring force F which pushes and/or pulls the respective carrier back into the respective carrier transportation space, when the carrier is displaced in the lateral direction L from a predetermined lateral position or equilibrium position that is exemplarily depicted in FIG. 4.

[0068] As exemplarily shown in FIG. 4, the at least one stabilization magnet 161 may be a passive magnet having a north pole N and a south pole S. In some embodiments, the at least one stabilization magnet may include a plurality of passive magnets which can be arranged one after the other in the transport direction. Typically, the direction of the magnetic field lines inside the at least one stabilization magnet (which run from the south pole to the north pole inside the magnet) may essentially correspond to the lateral direction L.

[0069] At least one carrier stabilization magnet 162 may be attached to a carrier as described herein, e.g. the first carrier and/or the second carrier, in such a way that a displacement of the respective carrier from the respective carrier transportation space in the lateral direction L leads to repulsive magnetic force between the at least one stabilization magnet 161 of the at least one side stabilization device 160 and the at least one carrier stabilization magnet 162 counteracting the displacement. Accordingly, the carrier, e.g. the first carrier and/or the second carrier, beneficially remains in the equilibrium position that is shown in FIG. 4 during the holding and during the transport of the carrier along the transport path.

[0070] As exemplarily shown in FIG. 4, the at least one carrier stabilization magnet 162 can be a passive magnet having a north pole N and a south pole S, which are arranged such that the direction of the magnetic field lines inside the at least one carrier stabilization magnet 162 essentially correspond to the lateral direction L.

[0071] In particular, the least one carrier stabilization magnet 162 can be arranged in an inverse orientation as compared to the at least one stabilization magnet 161 of the at least one side stabilization device 160. Accordingly, the north pole N of the at least one carrier stabilization magnet 162 is arranged close to and attracted by the south pole S of the at least one stabilization magnet 161, and the south pole S of the at least one carrier stabilization magnet 162 is arranged close to and attracted by the north pole N of the at least one stabilization magnet 161 of the at least one side stabilization device 160, when the carrier, e.g. the first carrier and/or the second carrier, is arranged in the equilibrium position. For example, when the second carrier is displaced from the equilibrium position in a first lateral direction (e.g. toward the left side of FIG. 4), the north pole N of the at least one carrier stabilization magnet 162 approaches the north pole N of the at least one stabilization magnet 161 of the at least one side stabilization device 160 which leads to a restoring force urging the carrier back toward the equilibrium position. When the second carrier is displaced from the equilibrium position in a second (opposite) lateral direction (e.g. toward the right side of FIG. 4), the south pole S of the at least one carrier stabilization magnet 162 approaches the south pole S of the at least one stabilization magnet 161 of the at least one side stabilization device 160 which leads to a restoring force urging the carrier back toward the equilibrium position. Accordingly, the at least one side stabilization device 160 stabilizes the second carrier at a predetermined lateral position such that lateral movements of the carrier can be reduced or prevented. The explanations above with respect to the second carrier and the at least one side stabilization device 160 corresponding to the second carrier, mutatis mutandis, apply to the first carrier and the at least one side stabilization device 160 corresponding to the first carrier.

[0072] With exemplary reference to FIG. 4, according to some embodiments, which can be combined with other embodiments described herein, the apparatus 100 may further include a safety arrangement 170. Typically, the safety arrangement 170 includes a lateral guard guiding element 171 provided between the first carrier transportation space 15A and the second carrier transportation space 15B. In particular, as exemplarily shown in FIG. 4, the lateral guard guiding element 171 may be provided in the plane of symmetry 105, as described herein. The lateral guard guiding element 171 can be implemented as a guiding rail or as a plurality of guiding pins in a row.

[0073] As exemplarily shown in FIG. 4, additionally or alternatively the safety arrangement 170 may include a safety roller 172 for providing a vertical support, particularly a vertical safety support, for the carrier, e.g. the first carrier and/or the second carrier, particularly in the case that the one or more first actuators 121 and/or the one or more third actuators 121B are deactivated. Typically, the safety roller 172 is connected to a holder 173 attached to an inside surface of the upper chamber wall 212. The holder holding the safety roller may also function as lateral guard guiding element.

[0074] With exemplary reference to FIG. 4, according to some embodiments which can be combined with other embodiments described herein, a protective element 163, e.g. a protective strip, may be attached to the least one carrier stabilization magnet 162. In particular, the protective element 163 can be attached to a side of the at least one carrier stabilization magnet 162 facing the holder 173. [0075] With exemplary reference to FIG. 4, according to some embodiments, which can be combined with other embodiments described herein, the apparatus 100 may further include an adjustment device 155. The adjustment device 155 is configured to adjust one or more of the group consisting of a position, particularly a vertical position, of at least one stabilization magnet 161 of at least one side stabilization device 160 with respect to a carrier transportation space as described herein, an orientation or angular position of the at least one stabilization magnet 161, a position, particularly a vertical position, of a lateral guard guiding element 171, and an orientation or angular position of the lateral guard guiding element 171. In particular, the adjustment device can be configured to move the at least one stabilization magnet 161 and/or configured to move the lateral guard guiding element 171 in a vertical direction, as exemplarily indicated by the arrows depicted in FIG. 4.

[0076] Accordingly, the adjustment device 155 can alter the state of the at least one stabilization magnet 161 in such a way that the restoring force F exerted by the side stabilization device on the carrier, e.g. the first carrier and/or the second carrier, is changed, particularly reduced or switched off completely. After a reduction or deactivation of the restoring force F exerted on the carrier by the side stabilization device, the carrier can be moved away from the side stabilization device in the lateral direction.

[0077] Accordingly, by enabling an adjustment of the restoring force F via the adjustment device 155, the carrier can be reliably held and guided along the transport path in a transport state of the side stabilization device. In a deactivated switch state of the side stabilization device and the carrier can be moved in the lateral direction L. Further, the restoring force F exerted on a carrier in the case of a displacement of the carrier in the lateral direction L can be adjusted.

[0078] Further, with exemplary reference to FIG. 4, it is to be understood that the adjustment device 155 can be configured to move the lateral guard guiding element 171 such that a carrier as described herein can be moved in a lateral direction. For instance, the lateral guard guiding element 171 may be vertically moved upwards to allow for a lateral movement of the first carrier and/or the second carrier. Further, as shown in FIG. 4, a protective bellow 174 for ensuring a vacuum sealing between the movable lateral guard guiding element 171 and the vacuum chamber may be provided. Alternatively, the lateral guard guiding element 171 may be rotated (not explicitly shown in FIG. 3 A), e.g. around an axis extending in the lateral direction or around an axis extending in the transport direction, to allow for a lateral movement of the carrier.

[0079] With exemplary reference to FIG. 3A, it is to be understood that a carrier according to the present disclosure includes a main body 13 for carrying an object, e.g. a substrate 1 or a mask 2. For instance, the main body 13 can be implemented as a carrier plate configured for holding a substrate or a mask. Alternatively, the main body 13 can be implemented as a carrier frame configured for holding a substrate or a mask. As exemplarily shown in FIG. 3A, the main body has a first end 11 and a second end 12. The second end 12 is opposite to the first end 11. The first end 11 of the main body 13 includes one or more first magnetic counterparts 181 (shown in FIGS. 1 and 2) for interacting with one or more magnetic bearings as described herein. The first end 11 further includes one or more second magnetic counterparts 182 (shown in FIGS. 1 and 2) for interacting with a drive unit as described herein. Additionally, the second end 12 of the main body 13 includes a third magnetic counterpart 183 (shown in FIGS. 1 and 2) for interacting with one or more passive magnetic bearings 125 of a contactless guiding arrangement as described herein.

[0080] With exemplary reference to FIGS. 1 to 3, it is to be understood that the first carrier 10A and or the second carrier 10B can be asymmetric carriers, i.e. not being symmetrical with respect to a vertical plane 111 extending through the center of gravity

(G1/G2 shown in FIGS. 1 and 2) when the respective carrier is in a vertical orientation.

[0081] From FIGS. 1 to 3, it is to be understood that the dimension of a carrier as described herein, i.e. the first carrier and the second carrier, typically corresponds to the dimension of the respective carrier transportation space, i.e. the first carrier transportation space and the second carrier transportation space. Accordingly, the carrier may have a height He corresponding to the height H of the carrier transportation space. Further, the carrier may have a width Wc corresponding to the width W of the carrier transportation space. Accordingly, the aspect ratio of Hc/Wc can be Hc/Wc ³ 5, particularly H _c /W _c > 10. [0082] According to some embodiments which can be combined with any other embodiments described herein, the upper chamber wall may be implemented as a separate plate element, particularly a tub-like plate element as exemplarily shown in FIG. 3 A. Accordingly, beneficially the actuators of the magnetic bearings and the actuators of the drive units can be pre-mounted to the upper chamber wall before the upper chamber wall is mounted to the side walls of the chamber. Providing the upper chamber wall with pre-mounted one or more first actuators and pre-mounted one or more second actuators may facilitate the assembly procedure and can reduce the costs. Accordingly, compared to the state of the art, beneficially a simpler integration of a transport apparatus, particularly having a magnetic levitation system, into the chamber is provided.

[0083] With exemplary reference to FIG. 5, a processing system 200 for vertically processing a substrate according to the present disclosure is described. According to embodiments which can be combined with any other embodiments described herein, the processing system 200 includes at least one vacuum chamber 210, particularly a vacuum processing chamber, including a processing device 205. Further, the processing system 200 includes an apparatus 100 for transportation of a first carrier 10A and a second carrier 10B according to any embodiments described herein. In particular, typically the processing device 205 is arranged in the vacuum processing chamber and the processing device 205 may be selected from the group consisting of a deposition source, an evaporation source, e.g. an evaporation source for depositing one or more organic materials for OLED production, and a sputter source.

[0084] In the present disclosure, the term“vacuum” can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. Typically, the pressure in a vacuum chamber as described herein may be between 10 ⁵ mbar and about 10 ⁸ mbar, more typically between 10 ⁵ mbar and 10 ⁷ mbar, and even more typically between about 10 ⁶ mbar and about 10 ⁷ mbar. According to some embodiments, the pressure in the vacuum chamber may be considered to be either the partial pressure of the evaporated material within the vacuum chamber or the total pressure (which may approximately be the same when only the evaporated material is present as a component to be deposited in the vacuum chamber). In some embodiments, the total pressure in the vacuum chamber may range from about 10 ⁴ mbar to about 10 ⁷ mbar, especially in the case that a second component besides the evaporated material is present in the vacuum chamber (such as a gas or the like). Accordingly, the vacuum chamber can be a“vacuum deposition chamber”, i.e. a vacuum chamber configured for vacuum deposition. [0085] With exemplary reference to the flowchart shown in FIG. 6, a method 300 of transporting a first carrier 10A and a second carrier 10B in a vacuum chamber 210 according to the present disclosure is described. According to embodiments which can be combined with any other embodiments described herein, the method 300 includes contactlessly holding the first carrier 10A (represented by block 310 in FIG. 6) in a first carrier transportation space 15A using one or more magnetic bearings 120. The one or more magnetic bearings are centrally arranged above a center of gravity of the first carrier 10A to be transported.

[0086] Additionally, the method 300 includes contactlessly holding the second carrier 10B (represented by block 320 in FIG. 6) in a second carrier transportation space 15B using one or more further magnetic bearings 120B. The one or more further magnetic bearings 120B are centrally arranged above a center of gravity of the second carrier 10B to be transported. The one or more further magnetic bearings 120B are arranged next to the one or more magnetic bearings 120. In particular, the one or more magnetic bearings 120 and the one or more further magnetic bearings 120B are arranged mirror symmetric with respect to a plane of symmetry 105. The plane of symmetry 105 is located between the first carrier transportation space 15A and the second carrier transportation space 15B. In particular, the plane of symmetry 105 is a vertical plane.

[0087] Further, the method 300 includes transporting the first carrier 10A (represented by block 330 in FIG. 6) in a transport direction T along a first transport path Tl using a drive unit 130 being arranged above the first carrier transportation space 15 A. Additionally, the method 300 includes transporting the second carrier 10B (represented by block 340 in FIG. 6) in a transport direction T along a second transport path T2 using a further drive unit 130B being arranged above the second carrier transportation space 15B. [0088] It is to be understood that the method 300 of transporting a first carrier 10A and a second carrier 10B can be conducted by using an apparatus 100 for transportation of a first carrier 10A and a second carrier 10B according to any embodiments described herein.

[0089] With exemplary reference to the flowchart shown in FIG. 7, a method 400 of adjusting a distance between a first carrier 10A and a second carrier 10B in a vacuum chamber 210 according to the present disclosure is described. According to embodiments which can be combined with any other embodiments described herein, the method 400 includes providing an apparatus 100 (represented by block 410 in FIG. 7) for transportation of a first carrier 10A and a second carrier 10B, according to any embodiments described herein including a second carrier transfer assembly 150B for moving the second carrier 10B from the second transport path T2 towards the first transport path Tl in a second carrier transfer direction S2. The second carrier transfer assembly 150B includes a second transfer actuator 154B provided in an atmospheric space, particularly outside of the vacuum chamber or in an atmospheric box. Further, the method 400 includes moving the second carrier 10B (represented by block 420 in FIG. 7) from the second transport path T2 towards the first transport path Tl in a second carrier transfer direction S2 by using the second transfer actuator 154B.

[0090] According to embodiments which can be combined with any other embodiments described herein, the method 400 may include levitating the second carrier 10B by using one or more further magnetic bearings 120B having one or more third actuators 121B for contactlessly holding the second carrier 10B in a second carrier transportation space 15B of a second transport path T2. Additionally, the method 400 may include attracting the second carrier 10B by using the one or more third actuators 121B, particularly of a second transport system as described herein, to reduce a distance between the one or more third actuators 121B and the second carrier 10B. In particular, attracting the second carrier 10B may include reducing a gap between the upper chamber wall 212 and the second carrier 10B by 2/3 of an original vertical width of the gap between the upper chamber wall 212 and the second carrier 10B. For instance, reducing the gap can include a vertical gap width reduction from 3 mm to 1 mm. Accordingly, a vertical gap width provided between a safety roller 172 and the second carrier 10B may be increased by 2/3, e.g. from 3 mm to 5 mm.

[0091] Further, the method 400 may include one or more carrier transfer elements 152 of a second carrier transfer assembly 150B towards the second carrier 10B up to a holding position. In particular, the holding position may be the position in which the carrier holding portion 153 of the one or more carrier transfer elements 152 can hold the carrier when the carrier is lowered in a vertical direction to have contact with the coupling elements of the second carrier. For instance, the coupling elements of the second carrier can be recesses, as exemplarily shown in FIG. 3A. Accordingly, the holding position can be a position in which the carrier holding portion 153 of the one or more carrier transfer elements 152 have entered the respective recesses of the second carrier 10B.

[0092] Further, the method 400 may include lowering the second carrier 10B by using the one or more third actuators 121B, particularly of a second transport system as described herein, to establish a contact between the one or more carrier transfer elements 152 and the second carrier 10B, particularly the coupling elements of the second carrier. For example, when the contact between the one or more carrier transfer elements 152 and the second carrier 10B is established, a gap between the safety roller 172, as exemplarily shown in FIG. 3 A, and the second carrier 10B may have a vertical gap width of approximately 1 mm. Accordingly, the vertical distance between the second carrier and the upper chamber wall 212 during lateral movement of the carrier may be approximately 5 mm.

[0093] Yet further, the method 400 includes adjusting a distance between the first carrier 10A and the second carrier 10B by moving the second carrier 10B from the second transport path T2 towards the first transport path Tl in a second carrier transfer direction S2 by using the second transfer actuator 154B. Alternatively, adjusting a distance between the first carrier 10A and the second carrier 10B may include moving the second carrier 10B from the second transport path T2 away from the first transport path Tl in a second carrier transfer direction S2 by using the second transfer actuator 154B. [0094] According to some embodiments, which can be combined with other embodiments described herein, the method 400 further includes vertically moving at least one element selected from the group consisting of a first lower track section 11L of the first transport path, a second lower track section 14L of a second transport system, a lateral guard guiding element provided at at least one side of the second carrier transportation space 15B, and at least one side stabilization device 160 as described herein.

[0095] In particular, the first lower track section 11L and the second lower track section 14L may be vertically moved downwards by using an actuator 124 for modifying a distance between the lower track sections and the upper track sections, as described herein. Further, as exemplarily described with reference to FIG. 4, the at least one stabilization magnet 161 of the at least one side stabilization device 160 may be moved vertically upwards to allow for a lateral movement of the second carrier. Moreover, as exemplarily described with reference to FIG. 4, the lateral guard guiding element 171 may be vertically moved upwards to allow for a lateral movement of the second carrier. Alternatively, the lateral guard guiding element 171 may be rotated, e.g. around an axis extending in the lateral direction or around an axis extending in the transport direction, to allow for a lateral movement of the second carrier. Accordingly, it is to be understood that before moving the second carrier in a lateral direction, elements of the transport system hindering a lateral movement of the second carrier (e.g. the at least one stabilization magnet 161 and/or the lateral guard guiding element 171 and/or the contactless guiding arrangement) are moved to release the second carrier in a lateral direction.

[0096] In view of the above, it is to be understood that compared to the state of the art, embodiments of the present disclosure beneficially provide for an apparatus for transportation of a first carrier and a second carrier in a vacuum chamber, a processing system for vertically processing a substrate, a method of transporting a first carrier and a second carrier in a vacuum chamber and a method of adjusting a distance between a first carrier and a second carrier in a vacuum chamber which are improved with respect to accurate and smooth transportation of the carriers in high temperature vacuum environments, particularly for high quality display manufacturing, e.g. for organic light emitting diode (OLED) displays. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs and are more insensitive against manufacturing tolerances, deformation, and thermal expansion compared to the state of the art. [0097] While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope, and the scope is determined by the claims that follow.