Title:
APPLICATION OF AZOLE COMPOUND IN IMPROVING STABILITY OF CHEMICALLY MECHANICAL POLISHING LIQUID
Document Type and Number:
WIPO Patent Application WO/2016/107413
Kind Code:
A1
Abstract:
The present invention aims to providing a solution for poor stability of a polishing liquid prepared by amino silane modified grinding particles. The stability of the pH, nanometer particle size, and polishing speed of such a system in a period of storage can be significantly improved by adding an azole compound. The speed of removing a silica dielectric material by such a silica grinding particle polishing liquid is increased, and the stability of the pH, nanometer particle size, and polishing speed of the polishing liquid in the period of storage is also improved.
Inventors:
CHEN BAOMING (CN)
GAO YUAN (CN)
JING JIANFEN (CN)
CAI XINYUAN (CN)
ZHANG JIAN (CN)
SONG KAI (CN)
WANG YUCHUN (CN)
GAO YUAN (CN)
JING JIANFEN (CN)
CAI XINYUAN (CN)
ZHANG JIAN (CN)
SONG KAI (CN)
WANG YUCHUN (CN)
Application Number:
PCT/CN2015/097564
Publication Date:
July 07, 2016
Filing Date:
December 16, 2015
Export Citation:
Assignee:
CHEN BAOMING (CN)
GAO YUAN (CN)
JING JIANFEN (CN)
CAI XINYUAN (CN)
ZHANG JIAN (CN)
SONG KAI (CN)
GAO YUAN (CN)
JING JIANFEN (CN)
CAI XINYUAN (CN)
ZHANG JIAN (CN)
SONG KAI (CN)
International Classes:
C09G1/02; C09G1/00; C09K3/14
Foreign References:
| CN102585704A | 2012-07-18 | |||
| CN101802125A | 2010-08-11 | |||
| CN101802116A | 2010-08-11 | |||
| US20040118051A1 | 2004-06-24 |
Attorney, Agent or Firm:
HANHONG LAW FIRM (CN)
上海翰鸿律师事务所 (CN)
上海翰鸿律师事务所 (CN)
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