Title:
AQUEOUS DISPERSION COMPRISING INORGANIC PARTICLES
Document Type and Number:
WIPO Patent Application WO/2022/240209
Kind Code:
A1
Abstract:
Inorganic particles comprised in an aqueous dispersion according to the present invention consist of agglomerates of crystalline and amorphous microparticles, and exhibit spherical and smooth surfaces. The spherical appearance, low crystallinity, and narrow particle size distribution of the inorganic particles are further advantageous in reducing scratch defects in a CMP process. In addition, since the microparticles on the inorganic particle surfaces provide more active sites and thus the removal rate is high, the inorganic particles may be advantageous as next-generation CMP polishing materials. In addition, the aqueous dispersion according to the present invention further comprises an amino acid, and the amino acid may be adsorbed on a surface of a silicon oxide wafer to strengthen electrostatic attraction between the silicon oxide wafer and the inorganic particles, resulting in an effect of further improving the removal rate.
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Inventors:
KIM TAESUNG (KR)
KWAK DONGGEON (KR)
YUN JUNHO (KR)
NAM JAE-DO (KR)
KIM NA YEON (KR)
KWAK DONGGEON (KR)
YUN JUNHO (KR)
NAM JAE-DO (KR)
KIM NA YEON (KR)
Application Number:
PCT/KR2022/006798
Publication Date:
November 17, 2022
Filing Date:
May 12, 2022
Export Citation:
Assignee:
RESEARCH ＆ BUSINESS FOUNDATION SUNGKYUNKWAN UNIV (KR)
International Classes:
C09G1/02; C09K3/14
Domestic Patent References:
| WO2021172954A2 | 2021-09-02 |
Foreign References:
| KR20190139568A | 2019-12-18 | |||
| KR20190063989A | 2019-06-10 | |||
| KR20060015851A | 2006-02-21 |
Other References:
KIM, NAYEON ET AL.: "A novel CMP (chemical mechanical planarization) abrasive of nanocluster colloidal ceria; surface topology, Crystallinity, activity, and oxide removal rate", 2021 KICHE SPRING MEETING, KOREAN INSTITUTE OF CHEMICAL ENGINEERS, SEOUL, vol. 27, no. 1, 21 April 2021 (2021-04-21), Seoul, pages 906, XP009542601
TANG JO SING JULIA, BADER ROMINA SIGRID, GOERLITZER ERIC S. A., WENDISCH JAN FEDJA, BOURRET GILLES REMI, REY MARCEL, VOGEL NICOLAS: "Surface Patterning with SiO 2 @PNiPAm Core–Shell Particles", ACS OMEGA, ACS PUBLICATIONS, US, vol. 3, no. 9, 30 September 2018 (2018-09-30), US , pages 12089 - 12098, XP055944105, ISSN: 2470-1343, DOI: 10.1021/acsomega.8b01985
MONSHI, A.M.R. FOROUGHIM.R. MONSHI: "Modified Scherrer Equation to Estimate More Accurately Nano-Crystallite Size Using XRD", WORLD JOURNAL OF NANO SCIENCE AND ENGINEERING, vol. 02, no. 03, 2012, pages 154 - 160
IULIANELLI, G.C.V. ET AL.: "Influence of TiO2 nanoparticle on the thermal, morphological and molecular characteristics of PHB matrix", POLYMER TESTING, vol. 65, 2018, pages 156 - 162
THROMAT, N.M. GAUTIER-SOYERG. BORDIER: "Formation of the CeY2O3 interface: an in situ XPS study", SURFACE SCIENCE, vol. 345, no. 3, 1996, pages 290 - 302
ZHANG, C.J. LIN: "Visible-light induced oxo-bridged Zr IV- O- Ce III redox centre in tetragonal ZrO 2-CeO 2 solid solution for degradation of organic pollutants", PHYSICAL CHEMISTRY CHEMICAL PHYSICS, vol. 13, no. 9, 2011, pages 3896 - 3905
VAN DEN BRAND, J. ET AL.: "Correlation between hydroxyl fraction and O/Al atomic ratio as determined from XPS spectra of aluminum oxide layers", SURFACE AND INTERFACE ANALYSIS: AN INTERNATIONAL JOURNAL DEVOTED TO THE DEVELOPMENT AND APPLICATION OF TECHNIQUES FOR THE ANALYSIS OF SURFACES, INTERFACES AND THIN FILMS, vol. 36, no. 1, 2004, pages 81 - 88
TANG JO SING JULIA, BADER ROMINA SIGRID, GOERLITZER ERIC S. A., WENDISCH JAN FEDJA, BOURRET GILLES REMI, REY MARCEL, VOGEL NICOLAS: "Surface Patterning with SiO 2 @PNiPAm Core–Shell Particles", ACS OMEGA, ACS PUBLICATIONS, US, vol. 3, no. 9, 30 September 2018 (2018-09-30), US , pages 12089 - 12098, XP055944105, ISSN: 2470-1343, DOI: 10.1021/acsomega.8b01985
MONSHI, A.M.R. FOROUGHIM.R. MONSHI: "Modified Scherrer Equation to Estimate More Accurately Nano-Crystallite Size Using XRD", WORLD JOURNAL OF NANO SCIENCE AND ENGINEERING, vol. 02, no. 03, 2012, pages 154 - 160
IULIANELLI, G.C.V. ET AL.: "Influence of TiO2 nanoparticle on the thermal, morphological and molecular characteristics of PHB matrix", POLYMER TESTING, vol. 65, 2018, pages 156 - 162
THROMAT, N.M. GAUTIER-SOYERG. BORDIER: "Formation of the CeY2O3 interface: an in situ XPS study", SURFACE SCIENCE, vol. 345, no. 3, 1996, pages 290 - 302
ZHANG, C.J. LIN: "Visible-light induced oxo-bridged Zr IV- O- Ce III redox centre in tetragonal ZrO 2-CeO 2 solid solution for degradation of organic pollutants", PHYSICAL CHEMISTRY CHEMICAL PHYSICS, vol. 13, no. 9, 2011, pages 3896 - 3905
VAN DEN BRAND, J. ET AL.: "Correlation between hydroxyl fraction and O/Al atomic ratio as determined from XPS spectra of aluminum oxide layers", SURFACE AND INTERFACE ANALYSIS: AN INTERNATIONAL JOURNAL DEVOTED TO THE DEVELOPMENT AND APPLICATION OF TECHNIQUES FOR THE ANALYSIS OF SURFACES, INTERFACES AND THIN FILMS, vol. 36, no. 1, 2004, pages 81 - 88
Attorney, Agent or Firm:
KIM, Aera (KR)
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