Title:
ARRAY SUBSTRATE, MANUFACTURING METHOD FOR ARRAY SUBSTRATE, AND DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/168768
Kind Code:
A1
Abstract:
Embodiment of the present application disclose an array substrate, a manufacturing method for the array substrate, and a display device. The array substrate comprises a substrate, a gate, and an oxide semiconductor layer. The material of the oxide semiconductor layer comprises a modified metal element, and the proportion of the modified metal element in all the metal elements is gradually decreased in a direction from the gate towards the oxide semiconductor layer, so that the technical problems of poor stability and low mobility of a metal oxide thin film transistor can be solved.
Inventors:
LI SHAN (CN)
WU WEI (CN)
XIAO JUNCHENG (CN)
WU WEI (CN)
XIAO JUNCHENG (CN)
Application Number:
PCT/CN2022/083634
Publication Date:
September 14, 2023
Filing Date:
March 29, 2022
Export Citation:
Assignee:
GUANGZHOU CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
G02F1/1368; H01L27/12; H01L21/77
Foreign References:
| CN103840011A | 2014-06-04 | |||
| CN112514079A | 2021-03-16 | |||
| CN114008793A | 2022-02-01 | |||
| CN101473444A | 2009-07-01 | |||
| US20190067469A1 | 2019-02-28 | |||
| CN101257048A | 2008-09-03 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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