Title:
ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/149129
Kind Code:
A1
Abstract:
Provided are a manufacturing method of an array substrate and an array substrate manufactured by using the same. The manufacturing method comprises: providing a substrate (110); fabricating a gate metal layer (120) at the substrate, the gate metal layer comprising gate lines (121) and common electrode signal lines (122) arranged at intervals; forming a gate insulating layer (130), an active layer (140a), a source-drain layer (150), a passivation layer (160) and a protection pattern (140b) at the gate metal layer; forming a via (170) at each of the passivation layer and the gate insulating layer for connection with the common electrode signal line; and causing an orthographic projection of the protection pattern to be partially overlapped with an orthographic projection of the via on the substrate, and causing the orthographic projection of the protection pattern to be partially overlapped with an orthographic projection of the gate line on the substrate.
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Inventors:
XIAO ZHILIAN (CN)
ZHAO HAISHENG (CN)
XIAO HONGXI (CN)
PEI XIAOGUANG (CN)
LIU CHONG (CN)
ZHAO HAISHENG (CN)
XIAO HONGXI (CN)
PEI XIAOGUANG (CN)
LIU CHONG (CN)
Application Number:
PCT/CN2017/102280
Publication Date:
August 23, 2018
Filing Date:
September 19, 2017
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
BEIJING BOE OPTOELECTRONICS TECH CO LTD (CN)
BEIJING BOE OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
H01L21/77; H01L27/02; H01L27/12
Foreign References:
| CN106876387A | 2017-06-20 | |||
| CN102651340A | 2012-08-29 | |||
| CN102403311A | 2012-04-04 | |||
| US6569717B1 | 2003-05-27 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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