ASYMMETRIC MEMBRANE CMUT DEVICES AND FABRICATION METHODS

WIPO Patent Application WO2005087391

A3

Asymmetric membrane capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.

DEGERTEKIN F LEVENT (US)
MCLEAN JEFFREY JOHN (US)
KNIGHT JOSHUA GLENN (US)

PCT/US2005/008259

April 27, 2006

March 11, 2005

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GEORGIA TECH RES INST (US)
DEGERTEKIN F LEVENT (US)
MCLEAN JEFFREY JOHN (US)
KNIGHT JOSHUA GLENN (US)

B06B1/02; (IPC1-7): B06B1/02

US20030114760A1

2003-06-19

MCLEAN J ET AL: "Capacitive micromachined ultrasonic transducers with asymmetric membranes for microfluidic applications", 2001 IEEE ULTRASONICS SYMPOSIUM. PROCEEDINGS. AN INTERNATIONAL SYMPOSIUM (CAT. NO.01CH37263) IEEE PISCATAWAY, NJ, USA, vol. 2, 2001, pages 925 - 928 vol.2, XP002337241, ISBN: 0-7803-7177-1

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