Title:
ASYMMETRIC OUT-OF-PLANE ACCELEROMETER
Document Type and Number:
WIPO Patent Application WO/2019/152075
Kind Code:
A3
Abstract:
A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.
Inventors:
THOMPSON MATTHEW (US)
JOHARI-GALLE HOURI (US)
BALDASARRE LEONARDO (US)
NITZAN SARAH (US)
WILLIAMS KIRT (US)
JOHARI-GALLE HOURI (US)
BALDASARRE LEONARDO (US)
NITZAN SARAH (US)
WILLIAMS KIRT (US)
Application Number:
PCT/US2018/048135
Publication Date:
October 17, 2019
Filing Date:
August 27, 2018
Export Citation:
Assignee:
INVENSENSE INC (US)
International Classes:
B81B5/00; G01P15/125; G01P15/08
Domestic Patent References:
| WO2013104828A1 | 2013-07-18 |
Foreign References:
| US20130192371A1 | 2013-08-01 | |||
| EP2775309A1 | 2014-09-10 | |||
| US20090308159A1 | 2009-12-17 |
Attorney, Agent or Firm:
SHVARTS, Alexander et al. (US)
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