Title:
ATTACHED BODY PRODUCTION METHOD, ATTACHED BODY, AND MICROSTRUCTURE FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/246457
Kind Code:
A1
Abstract:
Provided are: an attached body production method that can achieve a state in which gas between a mold and a molded product has been reliably removed, and allows a sheet process to be performed in an imprinting method; an attached body; and a microstructure formation method. This attached body production method comprises: a sealing material 4-disposing step for disposing a sealing material 4 on a mold 1 and/or a molded product 2 so that a molded surface of the molded product 2 is surrounded by the sealing material 4 when the mold 1 and the molded product 2 are attached together; a pressure reduction step for reducing the pressure of the atmosphere around the mold 1 and the molded product 2 in a state where the mold 1 and the molded product 2 are separated from each other; a sealing step for putting the mold 1 and the molded product 2 on top of each other, and sealing a space between the mold 1 and the molded product 2 with the sealing material 4; and a first pressure-application step for applying pressure with a fluid in a state where the space between the mold 1 and the molded product 2 is sealed, wherein the sealing material 4 has fluidity in at least the sealing step, and is configured to attach to only one of the mold 1 and the molded product 2 when the molded product 2 is released from the mold 1.
Inventors:
TANIGUCHI YUTAKA (JP)
TANAKA SATORU (JP)
TANAKA SATORU (JP)
Application Number:
PCT/JP2020/021727
Publication Date:
December 10, 2020
Filing Date:
June 02, 2020
Export Citation:
Assignee:
SCIVAX CORP (JP)
International Classes:
B29C59/02; H01L21/027
Foreign References:
| US20090183831A1 | 2009-07-23 | |||
| JP2004504718A | 2004-02-12 | |||
| JP2010517300A | 2010-05-20 |
Attorney, Agent or Firm:
OKUDA Noritsugu (JP)
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