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Title:
AUTOMATED APPLICATION OF DRIFT CORRECTION TO SAMPLE STUDIED UNDER ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2021/034569
Kind Code:
A3
Abstract:
Control system configured for sample tracking in an electron microscope environment registers a movement associated with a region of interest located within an active area of a sample under observation with an electron microscope. The registered movement includes at least one directional constituent. The region of interest is positioned within a field of view of the electron microscope. The control system directs an adjustment of the electron microscope control component to one or more of dynamically center and dynamically focus the view through the electron microscope of the region of interest. The adjustment comprises one or more of a magnitude element and a direction element.

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Inventors:
WALDEN II (US)
DAMIANO JR (US)
NACKASHI DAVID (US)
GARDINER DANIEL (US)
UEBEL MARK (US)
FRANKS ALAN (US)
JACOBS BENJAMIN (US)
Application Number:
PCT/US2020/045937
Publication Date:
April 29, 2021
Filing Date:
August 12, 2020
Export Citation:
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Assignee:
PROTOCHIPS INC (US)
International Classes:
G01N23/2251; H01J37/21; H01J37/22; H01J37/244; H01J37/28
Foreign References:
KR101964529B12019-04-02
US20030201393A12003-10-30
US20120104253A12012-05-03
US20180286630A12018-10-04
KR20180119699A2018-11-02
Attorney, Agent or Firm:
MATHAVAN, Parthiban, A. (US)
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