AUTOMATED WAREHOUSE AND ARTICLE REMOVAL METHOD

Title:

AUTOMATED WAREHOUSE AND ARTICLE REMOVAL METHOD

Document Type and Number:

WIPO Patent Application WO/2012/035693

Kind Code:

A1

Abstract:

A clean stocker (100) provided with: a rotary reticle rack (111) and rotary empty-pod rack (112) that store reticles and pods separately; a manual loading port (160) via which reticle-containing pods are supplied to an operator; a rotary reticle-containing-pod rack (113) that temporarily stores reticle-containing pods; a detection unit (180) that detects instructions from the operator; a pod opener (140) that, when a first instruction is detected, obtains a reticle from the rotary reticle rack (111), obtains an empty pod from the rotary empty-pod rack (112), and stores the obtained reticle in the empty pod; and a pod transport device (130) that places reticle-containing pods on the rotary reticle-containing-pod rack (113), and when a second instruction is detected, moves a reticle-containing pod from the rotary reticle-containing-pod rack (113) to the manual loading port (160).

Inventors:

NOMURA MISAKI

Application Number:

PCT/JP2011/004162

Publication Date:

March 22, 2012

Filing Date:

July 25, 2011

Export Citation:

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Assignee:

MURATEC AUTOMATION CO LTD (JP)
NOMURA MISAKI

International Classes:

B65G1/00; B65G1/04; B65G1/133; H01L21/027; H01L21/673

Foreign References:

JP2008030914A	2008-02-14
JPH0494306A	1992-03-26
JPS63267601A	1988-11-04
JPS63127906A	1988-05-31
JPS62217036A	1987-09-24

Other References: