Title:
AUTOMATIC SURFACE SHAPE MEASUREMENT APPARATUS AND METHOD USING LASER INTERFEROMETRY
Document Type and Number:
WIPO Patent Application WO/2021/203707
Kind Code:
A1
Abstract:
An automatic surface shape measurement apparatus and method using laser interferometry. The apparatus comprises: a laser interferometer (4), a binocular camera (1), a diffraction light spot receiving camera (3), a CGH, a light spot receiving screen having a central light passing hole, a lens under test, and a projection crosshair detector (2); the laser interferometer (4) is fixedly connected to the binocular camera (1); the diffraction light spot receiving camera (3) is fixedly connected to the CGH; the lens under test is fixedly connected to the projection crosshair detector (2); the CGH is placed in front of the focus of a standard lens of the laser interferometer (4) in a direction away from the laser interferometer (4); the light spot receiving screen having a central light passing hole can be removed and put back at the focus of the standard lens of the laser interferometer (4). According to an automatic multi-stage pose adjustment method for a laser interferometry surface shape measurement light path based on the binocular camera (1), the projection crosshair detector (2), the diffraction light spot receiving camera (3), and interference fringe aberration decoupling, a jump from mm-level mechanical positioning to sub-micron level optical positioning is achieved, and thus, automatic nm-level optical element surface shape measurement is completed.
Inventors:
TAO XIAOPING (CN)
ZHANG XUEJUN (CN)
HU HAIXIANG (CN)
CHENG QIANG (CN)
XUE DONGLIN (CN)
DENG WEIJIE (CN)
ZHANG XUEJUN (CN)
HU HAIXIANG (CN)
CHENG QIANG (CN)
XUE DONGLIN (CN)
DENG WEIJIE (CN)
Application Number:
PCT/CN2020/129277
Publication Date:
October 14, 2021
Filing Date:
November 17, 2020
Export Citation:
Assignee:
CHANGCHUN INST OPTICS FINE MECH & PHYSICS CAS (CN)
International Classes:
G01B11/24
Foreign References:
| CN111536896A | 2020-08-14 | |||
| CN110567393A | 2019-12-13 | |||
| CN102889856A | 2013-01-23 | |||
| CN107796329A | 2018-03-13 | |||
| CN109724532A | 2019-05-07 | |||
| JPS6244606A | 1987-02-26 |
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