Title:
BAKING DEVICE USED IN MANUFACTURING PROCESS OF DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2021/168915
Kind Code:
A1
Abstract:
Disclosed is a baking device used in a manufacturing process of a display panel. In the baking device, a first pipeline (301) and a second pipeline (302), which are in communication and uniformly distributed, are arranged in a baking plate (20), such that a heating liquid injected from the head end of the first pipeline (301) uniformly heats the baking plate (20) in the process of flowing through the two pipelines, thereby improving the uniformity of the baking temperature of the baking plate (20) to a substrate, and further ensuring the stability of the baking process of the substrate.
Inventors:
MENG XIAOLONG (CN)
Application Number:
PCT/CN2020/079199
Publication Date:
September 02, 2021
Filing Date:
March 13, 2020
Export Citation:
Assignee:
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
H01L21/67
Foreign References:
| CN1630932A | 2005-06-22 | |||
| CN105405798A | 2016-03-16 | |||
| CN108549167A | 2018-09-18 | |||
| CN108735628A | 2018-11-02 | |||
| CN101046638A | 2007-10-03 | |||
| CN104681402A | 2015-06-03 | |||
| CN106971938A | 2017-07-21 | |||
| CN106997218A | 2017-08-01 | |||
| JP2012174820A | 2012-09-10 | |||
| CN105880128A | 2016-08-24 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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