Title:
BALANCE STAGE
Document Type and Number:
WIPO Patent Application WO/2023/132435
Kind Code:
A1
Abstract:
A balance stage is disclosed. According to the present invention, provided is the balance stage comprising: a lower base disposed on a mounting surface; an inner rail which extends in the circumferential direction, and which is supported by the lower base so as to be rotatable with respect to the lower base around a center axis in the circumferential direction; an outer rail which extends in the circumferential direction, and which is supported by the inner rail so as to be rotatable with respect to the inner rail around a center axis; an upper base supported by the outer rail such that an object is disposed thereon; and a rotation support part fastened between the lower base and the upper base so as to restrain the rotation of the upper base with respect to the lower base. The present invention enables precise angle control while being implemented with a relatively simple structure, and has a stable load support structure so as to be used for various objects.
Inventors:
HYUN SAE HWAN (KR)
Application Number:
PCT/KR2022/013859
Publication Date:
July 13, 2023
Filing Date:
September 16, 2022
Export Citation:
Assignee:
BLUEROBOT (KR)
International Classes:
H01L21/687
Foreign References:
| KR101732851B1 | 2017-05-04 | |||
| KR101234343B1 | 2013-03-15 | |||
| JP2012052888A | 2012-03-15 | |||
| KR20180023739A | 2018-03-07 | |||
| KR102422225B1 | 2022-07-18 |
Attorney, Agent or Firm:
DODAM IP LAW FIRM (KR)
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