Title:
BASE SUBSTRATE, SINGLE CRYSTAL DIAMOND MULTILAYER SUBSTRATE, METHOD FOR PRODUCING BASE SUBSTRATE, AND METHOD FOR PRODUCING SINGLE CRYSTAL DIAMOND MULTILAYER SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2023/085055
Kind Code:
A1
Abstract:
The present invention provides a method for producing a base substrate for a single crystal diamond multilayer substrate, the method comprising: a step for preparing an initial substrate; and a step for forming an intermediate layer on the initial substrate, the intermediate layer being formed of a monolayer or a multilayer film that comprises at least a single crystal Ir film or a single crystal MgO film. With respect to this method for producing a base substrate, the formation of the single crystal Ir film or the single crystal MgO film, which constitutes the intermediate layer, is performed using a mist CVD method. Consequently, the present invention provides a method for producing a base substrate that enables the formation of a high-quality single crystal diamond layer which has high purity and low stress, while having a large area (a large diameter), high crystallinity, less hillocks, less abnormally grown particles, less dislocation defects and the like, and which is applicable to an electronic/magnetic device.
Inventors:
NOGUCHI HITOSHI (JP)
HASHIGAMI HIROSHI (JP)
SHIRAI SHOZO (JP)
HASHIGAMI HIROSHI (JP)
SHIRAI SHOZO (JP)
Application Number:
PCT/JP2022/039402
Publication Date:
May 19, 2023
Filing Date:
October 21, 2022
Export Citation:
Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
C23C16/27; C30B25/02; C30B29/04
Domestic Patent References:
| WO2015199180A1 | 2015-12-30 |
Foreign References:
| JP2018127367A | 2018-08-16 | |||
| JP2014154734A | 2014-08-25 | |||
| JP2013180942A | 2013-09-12 | |||
| JP2013095944A | 2013-05-20 | |||
| JP2021085050A | 2021-06-03 | |||
| JP2019033142A | 2019-02-28 | |||
| JP2014063973A | 2014-04-10 |
Other References:
MOCHIMARU YUYA, TODA MASAYA, ONO TAKAHITO: "Fabrication and evaluation of CVD diamond resonators", 51ST ANNUAL GENERAL MEETING AND LECTURES, COLLECTION OF LECTURE PAPERS, THE JAPAN SOCIETY OF MECHANICAL ENGINEERS TOHOKU BRANCH, 19 June 2017 (2017-06-19), pages 75 - 76, XP093065688
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
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