Title:
BIOMIMETIC MICROCANTILEVER STRUCTURE AND MANUFACTURING METHOD THEREFOR, AND PIEZORESISTIVE SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/140567
Kind Code:
A1
Abstract:
A biomimetic microcantilever structure (1) and manufacturing method therefor, and a piezoresistive sensor. The biomimetic microcantilever structure (1) comprises: a silicon substrate (2) in the form of a cantilever structure, biomimetic slit groups (3) provided in the silicon substrate (2), and an on-cantilever varistor (4), a substrate varistor (5), and an electrode lead (6) provided on the upper surface of the silicon substrate (2). The two biomimetic slit groups (3) are symmetrically arranged on the left and right sides of the central axis of the silicon substrate (2). The biomimetic slit group (3) comprises at least one biomimetic slit (7). The biomimetic slit (7) is formed by mimicing the slit sense organs of scorpions. The on-cantilever varistor (4) and the substrate varistor (5) constitute a Wheatstone bridge by means of the electrode lead (6). The biomimetic microcantilever structure (1) capable of hypersensitively sensing microinformation is designed on the basis of the stress amplification principle of slit sense organs at tarsal joints of Heterometrus petersii by using micro-nano manufacturing technology, and has the characteristics of high sensitivity, high detection precision, and easy use in mass production.
Inventors:
HAN ZHIWU (CN)
ZHAO YUFENG (CN)
HOU TAO (CN)
LIU FU (CN)
LIU YUN (CN)
WANG YUEQIAO (CN)
SONG YANG (CN)
YOU ZIYUE (CN)
ZHAO YUFENG (CN)
HOU TAO (CN)
LIU FU (CN)
LIU YUN (CN)
WANG YUEQIAO (CN)
SONG YANG (CN)
YOU ZIYUE (CN)
Application Number:
PCT/CN2019/113172
Publication Date:
July 09, 2020
Filing Date:
October 25, 2019
Export Citation:
Assignee:
UNIV JILIN (CN)
International Classes:
G01D5/16
Foreign References:
| CN109696185A | 2019-04-30 | |||
| CN101419227A | 2009-04-29 | |||
| US20100033058A1 | 2010-02-11 | |||
| CN103777037A | 2014-05-07 | |||
| CN104215283A | 2014-12-17 |
Other References:
WANG, YANCHENG: "Study on the Micro-Accelerometer Inspired from Spider’s Vibration Sensing Mechanism", CHINA DOCTORAL DISSERTATION ZHE JIANG UNIVERSITY, no. 8, 15 August 2011 (2011-08-15), pages 1 - 149, XP009521836, DOI: 20200110193649X
Attorney, Agent or Firm:
JOHNSON INTELLECTUAL PROPERTY AGENCY (SHENZHEN) (CN)
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