Title:
BLANKING APERTURE ARRAY SYSTEM AND CHARGED PARTICLE BEAM DRAWING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/089923
Kind Code:
A1
Abstract:
This blanking aperture array system includes a data output circuit for outputting first data and a first error detection code generated from the first data. A shift register transfers the first data and the first error detection code inputted from the data output circuit. A buffer receives the first data from a first register. An electrode receives a voltage based on the first data outputted from the buffer. An error detection circuit receives the first data and the first error detection code from the register in a final stage, generates a second error detection code from the first data received from the shift register in the final stage, and generates a detection signal, which indicates a match if the first error detection code from the register in the final stage and the second error detection code match, and indicates a mismatch if the first error detection code and the second error detection code do not match.
Inventors:
HASEGAWA KEI (JP)
KIMURA HAYATO (JP)
KIMURA HAYATO (JP)
Application Number:
PCT/JP2022/033750
Publication Date:
May 25, 2023
Filing Date:
September 08, 2022
Export Citation:
Assignee:
NUFLARE TECHNOLOGY INC (JP)
International Classes:
H01L21/027; G03F7/20; H01J37/147; H01J37/305
Foreign References:
| JP2017152485A | 2017-08-31 | |||
| JP2015228471A | 2015-12-17 | |||
| JP2014039011A | 2014-02-27 |
Attorney, Agent or Firm:
SUZUYE & SUZUYE (JP)
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