Title:
BOLOMETER DEVICE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/153738
Kind Code:
A1
Abstract:
A bolometer device is disclosed. The bolometer device comprises: a substrate; at least one sensing layer formed from vanadium oxide polymorphs, which comprises V2O3 containing a vanadium ion in the +3 valence state, VO2 containing a vanadium ion in the +4 valence state, and V2O5 containing a vanadium ion in the +5 valence state; at least one aluminum oxide layer adjacent to the sensing layer; and each of a first electrode and a second electrode arranged on the substrate so as to be distanced from each other, and thus is in contact with a different part of the sensing layer.
Inventors:
SEO HYUNG TAK (KR)
SHIN HEE CHEOL (KR)
SHIN HEE CHEOL (KR)
Application Number:
PCT/KR2023/001635
Publication Date:
August 17, 2023
Filing Date:
February 06, 2023
Export Citation:
Assignee:
UNIV AJOU IND ACADEMIC COOP FOUND (KR)
International Classes:
G01J5/02; G01J5/08; G01J5/20
Foreign References:
| KR20220014617A | 2022-02-07 | |||
| KR101439263B1 | 2014-09-11 | |||
| KR102284749B1 | 2021-08-02 | |||
| KR20130119868A | 2013-11-01 | |||
| KR102275391B1 | 2021-07-12 |
Attorney, Agent or Firm:
NAM, Gun Pil et al. (KR)
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