Title:
BORON NITRIDE NANOTUBE PELLICLES
Document Type and Number:
WIPO Patent Application WO/2024/058829
Kind Code:
A3
Abstract:
Described herein are thin-film BNNT materials, and methods for making the same. Such materials are especially useful for forming BNNT-based pellicles used in, e.g., Extreme Ultraviolet (EUV) lithographic processes. BNNTs have thresholds for thermal stability and chemical reactions that are above the reaction temperatures associated with EUV lithography and the gases and plasmas formed therein, and in addition, the BNNT-based pellicles can be heat treated to temperatures that will outgas or otherwise remove contaminants that may collect on the pellicles from gases and plasmas utilized in the lithographic processes. BNNTs are have favorable transmissivity and also provide excellent thermal conductivity, which may be advantageous for reducing undesirable temperature increases during processing. Thin-film BNNT materials described herein have the mechanical and tensile strengths to self-support, and withstand lithography processes without mechanical failure.
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Inventors:
JORDAN KEVIN C (US)
KEETER RILEY M (US)
KENNEDY ERIC R (US)
KIRMANI MOHAMMAD H (US)
ROBERTSON VALERIE N (US)
SCAMMELL LYNDSEY R (US)
SMITH MICHAEL W (US)
WHITNEY R ROY (US)
KEETER RILEY M (US)
KENNEDY ERIC R (US)
KIRMANI MOHAMMAD H (US)
ROBERTSON VALERIE N (US)
SCAMMELL LYNDSEY R (US)
SMITH MICHAEL W (US)
WHITNEY R ROY (US)
Application Number:
PCT/US2023/022014
Publication Date:
May 16, 2024
Filing Date:
May 12, 2023
Export Citation:
Assignee:
BNNT LLC (US)
International Classes:
C01B21/064; C01B35/14; C23C16/34; B82Y30/00
Domestic Patent References:
| WO2023096720A2 | 2023-06-01 |
Foreign References:
| DE102017217039A1 | 2019-03-28 | |||
| US20180037457A1 | 2018-02-08 |
Attorney, Agent or Firm:
BRADY, Joshua B. (US)
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