Title:
BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES
Document Type and Number:
WIPO Patent Application WO2004034435
Kind Code:
A3
Abstract:
Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
Inventors:
NEEF CHARLES J
BHAVE MANDAR
FOWLER MICHELLE
WINDSOR MICHELLE
BHAVE MANDAR
FOWLER MICHELLE
WINDSOR MICHELLE
Application Number:
PCT/US2003/032091
Publication Date:
July 28, 2005
Filing Date:
October 07, 2003
Export Citation:
Assignee:
BREWER SCIENCE INC (US)
International Classes:
C09B69/00; G03F7/09; (IPC1-7): G03C1/76; G03F7/00
Foreign References:
| US6316165B1 | 2001-11-13 | |||
| US5919598A | 1999-07-06 | |||
| US20030162125A1 | 2003-08-28 |
Other References:
DATABASE CHEMCATS [online] 9 July 2002 (2002-07-09), "2,4-imidazolidinedione, 1,3-bis[3-benzoyloxy)-2-hydroxypropyl-5,5.dimethyl", XP002904002, accession no. Interchim Intermediates Database accession no. 2002-2742256
See also references of EP 1573785A4
See also references of EP 1573785A4
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