BRUSH MATERIAL FOR SELF-ASSEMBLED FILM

Title:

BRUSH MATERIAL FOR SELF-ASSEMBLED FILM

Document Type and Number:

WIPO Patent Application WO/2023/190807

Kind Code:

A1

Abstract:

Provided is a composition for brush formation that is used in order to induce phase separation of a block copolymer contained in a layer formed on a substrate, the composition containing a brush polymer, an organic base, and a solvent.

Inventors:

MIZUOCHI RYUTA (JP)
SHIMIZU SHOU (JP)
TAMURA MAMORU (JP)

Application Number:

PCT/JP2023/013054

Publication Date:

October 05, 2023

Filing Date:

March 30, 2023

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Assignee:

NISSAN CHEMICAL CORP (JP)

International Classes:

G03F7/11; C08K5/17; C08L101/00; C08L101/02

Domestic Patent References:

WO2013146600A1	2013-10-03
WO2014097993A1	2014-06-26

Foreign References:

JP2017513032A

2017-05-25

Attorney, Agent or Firm:

TAKAOKA Ryoichi et al. (JP)

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