Title:
BULK ACOUSTIC RESONATOR, BULK ACOUSTIC RESONATOR ASSEMBLY, FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/083712
Kind Code:
A1
Abstract:
The present disclosure relates to a bulk acoustic resonator, comprising: a substrate, an acoustic mirror, a bottom electrode, a piezoelectric layer and a top electrode, wherein the piezoelectric layer comprises a first layer and a second layer, the second layer being above the first layer in the thickness direction of the resonator. The resonator further comprises a connection end acoustic resistance layer, which is arranged at an electrode connection end of the top electrode, wherein an inner edge of the connection end acoustic resistance layer is located at an inner side of a boundary of the acoustic mirror in a horizontal direction; and an outer end edge of the first layer and/or the second layer is located at an inner side of an outer edge of the connection end acoustic resistance layer in the horizontal direction. The present disclosure further relates to a bulk acoustic resonator assembly, a filter and an electronic device.
Inventors:
PANG WEI (CN)
BAN SHENGGUANG (CN)
XU YANG (CN)
YANG QINGRUI (CN)
ZHANG MENGLUN (CN)
BAN SHENGGUANG (CN)
XU YANG (CN)
YANG QINGRUI (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2021/125486
Publication Date:
April 28, 2022
Filing Date:
October 22, 2021
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02; H03H9/13; H03H9/15; H03H9/17
Domestic Patent References:
| WO2020098481A1 | 2020-05-22 |
Foreign References:
| CN111262547A | 2020-06-09 | |||
| CN209844929U | 2019-12-24 | |||
| CN111010130A | 2020-04-14 | |||
| CN111371425A | 2020-07-03 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
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