Title:
BULK ACOUSTIC RESONATOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/161142
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic resonator, comprising a substrate, a top electrode, a piezoelectric layer, a bottom electrode, and an acoustic mirror. A support layer is disposed between the substrate and a resonant structure, and the piezoelectric layer is a single crystal piezoelectric layer arranged roughly parallel to the substrate. In one first cross section that is parallel to the thickness direction of a resonator and passes through a non-electrically connected end of the bottom electrode and a non-electrically connected end of the top electrode, a portion of an outer end of the non-electrically connected end of the bottom electrode is covered by the support layer, at least a portion of the piezoelectric layer at the non-electrically connected end of the bottom electrode is removed, and at least a portion of an upper surface of the non-electrically connected end of the bottom electrode is flush with an upper surface of the support layer. The present invention also relates to a filter and an electronic device.
Inventors:
ZHANG MENGLUN (CN)
PANG WEI (CN)
YANG QINGRUI (CN)
PANG WEI (CN)
YANG QINGRUI (CN)
Application Number:
PCT/CN2022/070884
Publication Date:
August 04, 2022
Filing Date:
January 10, 2022
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H3/02; H03H9/02; H03H9/17
Foreign References:
| CN113497593A | 2021-10-12 | |||
| CN111682101A | 2020-09-18 | |||
| CN111756351A | 2020-10-09 | |||
| CN111262547A | 2020-06-09 | |||
| CN111010100A | 2020-04-14 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
Download PDF: