Title:
BULK ACOUSTIC RESONATOR HAVING PLURALITY OF BOTTOM ELECTRODE LAYERS, AND FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/005420
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic resonator and a manufacturing method therefor. The resonator comprises a substrate, a bottom electrode, a top electrode and a piezoelectric layer, wherein the bottom electrode comprises a plurality of electrode layers, the plurality of electrode layers at least comprise a first electrode layer and a second electrode layer, which are arranged in the thickness direction of the resonator, and the materials of the first electrode layer and the second electrode layer are different; and at a non-electrode-connection end of the bottom electrode, an end face of the first electrode layer is covered by the second electrode layer. The present invention further relates to a filter and an electronic device.
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Inventors:
XU YANG (CN)
PANG WEI (CN)
ZHANG WEI (CN)
HAO LONG (CN)
PANG WEI (CN)
ZHANG WEI (CN)
HAO LONG (CN)
Application Number:
PCT/CN2022/096818
Publication Date:
February 02, 2023
Filing Date:
June 02, 2022
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02
Domestic Patent References:
| WO2021073022A1 | 2021-04-22 |
Foreign References:
| CN111082774A | 2020-04-28 | |||
| CN111245394A | 2020-06-05 | |||
| CN111049490A | 2020-04-21 | |||
| CN111934643A | 2020-11-13 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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