Title:
BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREFOR, AND FILTER
Document Type and Number:
WIPO Patent Application WO/2024/044926
Kind Code:
A1
Abstract:
The present disclosure relates to the technical field of radio frequency micro-electromechanical systems. Provided are a bulk acoustic resonator and a manufacturing method therefor, and a filter. The bulk acoustic resonator of the present disclosure comprises a dielectric substrate, a first electrode, a piezoelectric layer, and a second electrode, wherein the dielectric substrate has a first cavity penetrating in the thickness direction thereof; a first opening of the first cavity penetrates through a first surface, and a second opening penetrates through a second surface; the first opening comprises a plurality of first edges sequentially arranged in the clockwise direction, and first connecting edges for connecting neighboring first edges; the second opening comprises a plurality of second edges sequentially arranged in the clockwise direction, and second connecting edges for connecting neighboring second edges; and the first edges are arranged in one-to-one correspondence with the second edges, and the first connecting edges are arranged in one-to-one correspondence with the second connecting edges.
Inventors:
WEI QIUXU (CN)
LI YUE (CN)
WANG LIHUI (CN)
REN YANFEI (CN)
ZHANG TAONAN (CN)
XIAO YUELEI (CN)
WU YIFAN (CN)
FENG YULIN (CN)
CAO XUE (CN)
HAN KIDONG (CN)
AN QICHANG (CN)
CHANG WENBO (CN)
LI HUIYING (CN)
QU FENG (CN)
LI YUE (CN)
WANG LIHUI (CN)
REN YANFEI (CN)
ZHANG TAONAN (CN)
XIAO YUELEI (CN)
WU YIFAN (CN)
FENG YULIN (CN)
CAO XUE (CN)
HAN KIDONG (CN)
AN QICHANG (CN)
CHANG WENBO (CN)
LI HUIYING (CN)
QU FENG (CN)
Application Number:
PCT/CN2022/115654
Publication Date:
March 07, 2024
Filing Date:
August 30, 2022
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
BEIJING BOE OPTOELECTRONICS TECH CO LTD (CN)
BEIJING BOE OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
H03H3/02; H03H9/15
Foreign References:
| CN103326692A | 2013-09-25 | |||
| CN212012592U | 2020-11-24 | |||
| CN114070244A | 2022-02-18 | |||
| US20210099156A1 | 2021-04-01 | |||
| CN113556100A | 2021-10-26 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
Download PDF:
Previous Patent: SIDE INCIDENCE IMAGE SENSORS WITH PROTRUDING INTEGRATED CIRCUIT CHIPS
Next Patent: REAGENT STORAGE DEVICE AND REAGENT OPERATING SYSTEM
Next Patent: REAGENT STORAGE DEVICE AND REAGENT OPERATING SYSTEM