Title:
BULK ACOUSTIC RESONATOR WITH TOP ELECTRODE HAVING UPPER AND LOWER GAPS, MANUFACTURING METHOD THEREFOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/037572
Kind Code:
A1
Abstract:
A bulk acoustic resonator and a manufacturing method therefor. The resonator comprises a base, an acoustic lens, a bottom electrode, a piezoelectric layer, a top electrode, and a covering layer, which at least covers a non-electrode connection end of the top electrode, wherein an overlap area of the top electrode, the piezoelectric layer, the bottom electrode and the acoustic lens in the thickness direction of the resonator forms an effective area of the resonator; and the lower side and the upper side of the non-electrode connection end of the top electrode are respectively provided with a first gap and a second gap along the effective area, the position where the second gap is located is the position where a removed corresponding part of the covering layer and/or the top electrode is located, and the removed corresponding part forms the second gap. The present invention further relates to a filter and an electronic device.
Inventors:
PANG WEI (CN)
BAN SHENGGUANG (CN)
ZHANG MENGLUN (CN)
BAN SHENGGUANG (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2021/112989
Publication Date:
February 24, 2022
Filing Date:
August 17, 2021
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
| CN111355466A | 2020-06-30 | |||
| CN111130490A | 2020-05-08 | |||
| CN111245393A | 2020-06-05 | |||
| US20190089331A1 | 2019-03-21 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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