Title:
BULK ACOUSTIC RESONATOR WITH VARIABLE DOPING CONCENTRATION, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/244332
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic resonator, comprising: a substrate; an acoustic mirror; a bottom electrode provided over the substrate; a top electrode provided oppositely to the bottom electrode and having an electrode connection portion; and a piezoelectric layer which is provided above the bottom electrode and between the bottom electrode and the top electrode, wherein the piezoelectric layer comprises at least three piezoelectric sub-layers, and the types of doped substances and/or the concentrations of the doped substances of the at least three piezoelectric sub-layers have alternate changes and/or periodic changes in the thickness direction of the piezoelectric layer. The present invention further relates to a filter having the bulk acoustic resonator, an electronic device having the filter, and a manufacturing method for the bulk acoustic resonator.
Inventors:
YANG QINGRUI (CN)
PANG WEI (CN)
ZHANG MENGLUN (CN)
PANG WEI (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2020/086552
Publication Date:
December 10, 2020
Filing Date:
April 24, 2020
Export Citation:
Assignee:
UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
| CN111010131A | 2020-04-14 | |||
| CN106026964A | 2016-10-12 | |||
| CN102946236A | 2013-02-27 | |||
| CN107689781A | 2018-02-13 | |||
| CN103795366A | 2014-05-14 |
Other References:
See also references of EP 3982537A4
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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