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Title:
BULK ACOUSTIC WAVE RESONATOR HAVING FRACTURE STRUCTURE AND MANUFACTURING METHOD THEREFOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/098484
Kind Code:
A1
Abstract:
A bulk acoustic wave resonator, comprising: a substrate (101), an acoustic mirror (103), a bottom electrode (105) provided above the substrate (101), a top electrode (109) that is provided opposite to the bottom electrode (105) and is provided with a main body part and a connection part connected with the main body part, a piezoelectric layer (107) provided above the bottom electrode (105) and between the bottom electrode (105) and the top electrode (109), and a passivation layer (111) provided above the top electrode (109), wherein a region where the acoustic mirror (103), the bottom electrode (105), the piezoelectric layer (107), and the top electrode (109) are overlapped in the thickness direction of the substrate (101) is the effective region of the resonator; the passivation layer (111) is adjacent to the boundary of the effective region and is provided with at least one first fracture structure (113) above the connection part. A filter having the resonator, an electronic device having the filter, and a method for manufacturing the bulk acoustic wave resonator.

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Inventors:
ZHANG MENGLUN (CN)
PANG WEI (CN)
LIU BOHUA (CN)
YANG QINGRUI (CN)
Application Number:
PCT/CN2019/114004
Publication Date:
May 22, 2020
Filing Date:
October 29, 2019
Export Citation:
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Assignee:
UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H3/02
Foreign References:
US20170310303A12017-10-26
US20170310303A12017-10-26
CN108336982A2018-07-27
CN209844929U2019-12-24
CN107623502A2018-01-23
US20120326807A12012-12-27
US20160352308A12016-12-01
US20160126930A12016-05-05
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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