BULK ACOUSTIC WAVE RESONATOR HAVING GAP LAYER ON ELECTRODE AND MANUFACTURING METHOD THEREFOR, FILTER, AND ELECTRONIC DEVICE

Title:

BULK ACOUSTIC WAVE RESONATOR HAVING GAP LAYER ON ELECTRODE AND MANUFACTURING METHOD THEREFOR, FILTER, AND ELECTRONIC DEVICE

Document Type and Number:

WIPO Patent Application WO/2021/114556

Kind Code:

A1

Abstract:

The present invention relates to a bulk acoustic wave resonator and a manufacturing method therefor. The resonator comprises: a substrate; a bottom electrode; a top electrode; and a piezoelectric layer provided between the bottom electrode and the top electrode, wherein the bottom electrode is a gap electrode; the gap electrode has a gap layer; there is a distance between the gap layer and the top surface of the gap electrode and between the gap layer and the bottom surface of the gap electrode in the thickness direction of the gap electrode; the gap layer forms an acoustic mirror cavity of the resonator, or an acoustic mirror structure is provided in the gap layer; the substrate is provided with at least one electric connection through hole; the through hole has one end connected to the bottom electrode, and the other end suitable for being connected to a bonding pad located on the lower side of the substrate. The present invention further relates to a filter having the resonator and an electronic device having the filter or the resonator.

Inventors:

XU YANG (CN)
PANG WEI (CN)
BAN SHENGGUANG (CN)
KONG QINGLU (CN)

Application Number:

PCT/CN2020/088702

Publication Date:

June 17, 2021

Filing Date:

May 06, 2020

Export Citation:

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Assignee:

ROFS MICROSYSTEM TIANJIN CO LTD (CN)

International Classes:

H03H9/02

Foreign References:

US20170077385A1	2017-03-16
CN103413795A	2013-11-27
CN105897211A	2016-08-24
CN107196618A	2017-09-22
CN110166014A	2019-08-23
US20170047907A1	2017-02-16

Other References:

ZHU, FENG ET AL.: "An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators", 《ACTA MECHANICA SOLIDA SINICA》, vol. 30, no. 3, 27 April 2017 (2017-04-27), XP085151267, ISSN: 0894-9166, DOI: 10.1016/j.camss.2017.04.001
See also references of EP 4092910A4

Attorney, Agent or Firm:

BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)

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