Title:
BULK ACOUSTIC WAVE RESONATOR HAVING PLURALITY OF BOTTOM ELECTRODE LAYERS, FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/005426
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic wave resonator and a fabrication method therefor. The resonator comprises a substrate, a bottom electrode, a top electrode, and a piezoelectric layer. The bottom electrode comprises a plurality of electrode layers, the plurality of electrode layers at least comprise a first electrode layer and a second electrode layer provided in the thickness direction of the resonator, and the second electrode layer covers at least part of the upper side of the first electrode layer. The resonator further comprises a cover layer, and on the outer side of a non-electrode connection end of the bottom electrode, the upper surface of the cover layer and the upper surface of the second electrode layer are staggered in the height direction of the resonator. The present invention also relates to a filter and an electronic device.
Inventors:
XU YANG (CN)
PANG WEI (CN)
ZHANG WEI (CN)
HAO LONG (CN)
PANG WEI (CN)
ZHANG WEI (CN)
HAO LONG (CN)
Application Number:
PCT/CN2022/097078
Publication Date:
February 02, 2023
Filing Date:
June 06, 2022
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02
Foreign References:
| CN111510095A | 2020-08-07 | |||
| CN112071975A | 2020-12-11 | |||
| CN112468106A | 2021-03-09 | |||
| CN111092605A | 2020-05-01 | |||
| US20150349743A1 | 2015-12-03 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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