Title:
BULK ACOUSTIC WAVE RESONATOR HAVING PLURALITY OF BOTTOM ELECTRODE LAYERS, FILTER, AND ELECTRONIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/006092
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic wave resonator and a manufacturing method therefor. The resonator comprises a substrate, a bottom electrode, a top electrode, and a piezoelectric layer. The bottom electrode comprises a plurality of electrode layers; the plurality of electrode layers comprise at least a first electrode layer and a second electrode layer that are arranged in a thickness direction of the resonator; the first electrode layer is closer to the substrate than the second electrode layer; and the first electrode layer is a metal layer containing aluminum. At a non-connecting electrode end of the bottom electrode, an end face of the first electrode layer is covered by the second electrode layer. An acoustic mirror of the resonator can be an acoustic mirror cavity. The resonator can further comprise a block layer, the first electrode layer covers the block layer, and the block layer defines an upper boundary of the acoustic mirror cavity. The present invention further relates to a filter and an electronic apparatus.
Inventors:
XU YANG (CN)
PANG WEI (CN)
ZHANG WEI (CN)
HAO LONG (CN)
PANG WEI (CN)
ZHANG WEI (CN)
HAO LONG (CN)
Application Number:
PCT/CN2022/109111
Publication Date:
February 02, 2023
Filing Date:
July 29, 2022
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17
Domestic Patent References:
| WO2021073022A1 | 2021-04-22 |
Foreign References:
| CN111082774A | 2020-04-28 | |||
| CN111600566A | 2020-08-28 | |||
| CN111245394A | 2020-06-05 | |||
| CN111049490A | 2020-04-21 | |||
| CN111934643A | 2020-11-13 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
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