Title:
BULK ACOUSTIC WAVE RESONATOR FOR SELECTING ANGLE OF PROTRUDING STRUCTURE TO IMPROVE PERFORMANCE
Document Type and Number:
WIPO Patent Application WO/2024/087628
Kind Code:
A1
Abstract:
The present application relates to a bulk acoustic wave resonator, comprising: a substrate; an acoustic mirror; a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. An edge of an effective area of the resonator is provided with a protruding structure, and an angle of an inner end of the protruding structure is within the range of 25°-60°. The present application also relates to a method for improving performance of a bulk acoustic wave resonator. The method comprises the steps: providing a protruding structure at an edge of an effective area of the resonator, and selecting an angle of an inner end of the protruding structure, so as to smooth the frequency-impedance curve of the resonator in an area starting at 30 MHz at the end of a parasitic area, or the part of the 60-80 MHz interval below a series resonance frequency. The present application also relates to a filter and an electronic device.
Inventors:
ZHENG ZHIQIANG (CN)
ZHANG WEI (CN)
ZHANG LANYUE (CN)
MA XIAODAN (CN)
HUANG YUANQING (CN)
JI YANLI (CN)
JIANG XINGYONG (CN)
HAO LONG (CN)
ZHANG WEI (CN)
ZHANG LANYUE (CN)
MA XIAODAN (CN)
HUANG YUANQING (CN)
JI YANLI (CN)
JIANG XINGYONG (CN)
HAO LONG (CN)
Application Number:
PCT/CN2023/097300
Publication Date:
May 02, 2024
Filing Date:
May 31, 2023
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17; H03H3/04; H03H9/02; H03H9/54
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
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