Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
COMPOSITIONS AND METHODS FOR THE ELECTROLESS DEPOSITION OF NiFe ON A WORK PIECE
Document Type and Number:
WIPO Patent Application WO2005048275
Kind Code:
A3
Abstract:
Methods and compositions are provided for the electroless deposition of NiFe on a work piece (30). A deposition solution for use in electroless deposition of NiFe on a work piece (30) is formed from a nickel ion source, a ferrous iron source, a complexing agent, a reducing agent, and a pH reducing agent. The deposition solution is substantially free from alkali metal ions. A method for fabricating a flux concentrating system for use in a magnetoelectronics device begins by providing a work piece (30) and forming an insulating material layer (34) overlying the work piece (30). A trench (36) is formed in an insulating layer (34) and a barrier layer (40) is deposited within the trench (36). A NiFe cladding (46) layer is deposited overlying the barrier layer (40). After depositing the NiFe cladding layer (46), the insulating material layer (34) proximate to the trench has a concentration of alkali metal ions less than about 1 x 10

Inventors:
D URSO JOHN J (US)
MOLLA JAYNAL A (US)
KYLER KELLY W (US)
Application Number:
PCT/US2004/034832
Publication Date:
February 09, 2006
Filing Date:
October 20, 2004
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FREESCALE SEMICONDUCTOR INC (US)
D URSO JOHN J (US)
MOLLA JAYNAL A (US)
KYLER KELLY W (US)
International Classes:
C23C18/16; C23C18/50; H01L21/288; H01L21/768; H01L27/22; (IPC1-7): B05D7/24; B05D1/18; B05D5/12
Foreign References:
US4072781A1978-02-07
US6174737B12001-01-16
US5956267A1999-09-21
Download PDF: