Title:
CALIBRATION APPARATUS AND METHOD FOR THIN-FILM SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/143347
Kind Code:
A1
Abstract:
A calibration apparatus and method for a thin-film sensor (9). The calibration apparatus for the thin-film sensor (9) comprises: a shock tube (1), which comprises a high-pressure tube body (2) and a low-pressure tube body (3) that are connected, a diaphragm (4) being provided between the high-pressure tube body (2) and the low-pressure tube body (3); an air supply device (5), which is used for inflating the high-pressure tube body (2); a first pressure sensor (6), which is provided on the inner wall of the low-pressure tube body (3); a second standard pressure sensor (7) that is provided on a test end face, the test end face being the inner end face of the low-pressure tube body (3) at the end away from the high-pressure tube body (2), and the thin-film sensor (9) to be calibrated being provided on the test end surface; and an oscilloscope (8). The thin-film sensor (9), the first pressure sensor (6) and the second standard pressure sensor (7) are all electrically connected to the oscilloscope (8), wherein the inflation of the high-pressure tube body (2) ruptures the diaphragm (4) to generate shock waves, the first pressure sensor (6) is a trigger signal source of the oscilloscope (8), and the oscilloscope (8) starts to collect electrical signals of the second standard pressure sensor (7) and the thin-film sensor (9) after receiving the trigger signal source. The calibration apparatus is able to accurately obtain the dynamic characteristics of the thin-film sensor (9) in combination with a calibration method.
Inventors:
JING JIANPING (CN)
CONG JIQING (CN)
DAI ZEZENG (CN)
CONG JIQING (CN)
DAI ZEZENG (CN)
Application Number:
PCT/CN2020/130106
Publication Date:
July 22, 2021
Filing Date:
November 19, 2020
Export Citation:
Assignee:
UNIV SHANGHAI JIAOTONG (CN)
International Classes:
G01L27/00
Foreign References:
| CN205426420U | 2016-08-03 | |||
| CN109029551A | 2018-12-18 | |||
| CN111174973A | 2020-05-19 | |||
| CN109282942A | 2019-01-29 | |||
| CN110057531A | 2019-07-26 | |||
| CN202661226U | 2013-01-09 | |||
| CN206876662U | 2018-01-12 | |||
| JPS59195132A | 1984-11-06 |
Attorney, Agent or Firm:
SHANGHAI HANGSOME INTELLECTUAL PROPERTY LTD (CN)
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