Title:
CALIBRATION METHOD AND FLOW-RATE MEASUREMENT METHOD FOR FLOW-RATE CONTROLLER OF GAS SUPPLYING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/014375
Kind Code:
A1
Abstract:
Flow-rate calibration is executed, by opening just an exit-side opening/closing valve of a flow-rate controller to be calibrated and letting gas with a set flow-rate flow into a calibration unit (5), measuring, at time (t0) when gas temperature and gas pressure within a tank (BT) has stabilized, the gas temperature (T0) and the gas pressure (P0) within the tank (BT) for the first time, then closing an exit-side opening/closing valve (V2) of the calibration unit (5) to build up gas within the tank (BT), closing an entrance-side opening/closing valve (V1) of the calibration unit (5) at time (t1) and measuring the gas temperature (T2) and the gas pressure (P2) within the tank for the second time at time (t2), which is subsequent to the closing of the entrance-side opening/closing valve (V1), calculating the gas flow-rate (Q) from the measured values with a formula of Q = (22.4V/R•Δt) × (P2/T2 - P0/T0) (wherein V is the internal volume of the tank (BT), R is the gas constant, and Δt is the build-up time (t1 - t0)), and comparing the gas flow rate that was set and the calculated gas flow rate (Q).
Inventors:
NAGASE MASAAKI (JP)
IKEDA NOBUKAZU (JP)
SAWADA YOHEI (JP)
HIRAI TOORU (JP)
MORISAKI KAZUYUKI (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
SAWADA YOHEI (JP)
HIRAI TOORU (JP)
MORISAKI KAZUYUKI (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
Application Number:
PCT/JP2011/003679
Publication Date:
February 02, 2012
Filing Date:
June 28, 2011
Export Citation:
Assignee:
FUJIKIN KK (JP)
NAGASE MASAAKI (JP)
IKEDA NOBUKAZU (JP)
SAWADA YOHEI (JP)
HIRAI TOORU (JP)
MORISAKI KAZUYUKI (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
NAGASE MASAAKI (JP)
IKEDA NOBUKAZU (JP)
SAWADA YOHEI (JP)
HIRAI TOORU (JP)
MORISAKI KAZUYUKI (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
International Classes:
G05D7/06; G01F3/38; G01F25/00
Domestic Patent References:
| WO2006075406A1 | 2006-07-20 | |||
| WO2005123236A1 | 2005-12-29 |
Foreign References:
| JP2003065814A | 2003-03-05 | |||
| JP2009145986A | 2009-07-02 | |||
| JP2007214406A | 2007-08-23 | |||
| JPH08247827A | 1996-09-27 |
Attorney, Agent or Firm:
SUGIMOTO, Takeo et al. (JP)
Sugimoto Strong (JP)
Sugimoto Strong (JP)
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Claims:
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