CAPACITANCE TYPE SENSOR, AND METHOD FOR CORRECTING NON-LINEAR OUTPUT

Title:

CAPACITANCE TYPE SENSOR, AND METHOD FOR CORRECTING NON-LINEAR OUTPUT

Document Type and Number:

WIPO Patent Application WO/2014/163076

Kind Code:

A1

Abstract:

This capacitance type sensor (10) is provided with a moveable electrode (110), a support (120), beam members (130), fixed electrodes (141, 180), a detector unit (200), and a correction unit (300). The beam members (130) function as springs to attach the moveable electrode (110) in moveable fashion to the support (120). The detector unit (200) detects changes in capacitance arising between the moveable electrode (110) and the fixed electrodes (141, 180). The correction unit (300) corrects the detected result from the detector unit (200) and generates an acceleration signal indicating acceleration.

Inventors:

KAKINUMA MINORU (JP)
KISHIRO MASAMI (JP)

Application Number:

PCT/JP2014/059634

Publication Date:

October 09, 2014

Filing Date:

April 01, 2014

Export Citation:

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Assignee:

FUJI ELECTRIC CO LTD (JP)

International Classes:

G01P21/00; G01P15/125; G01P15/18

Domestic Patent References:

WO2001096815A1

2001-12-20

Foreign References:

JPH0954114A	1997-02-25
JP2002022760A	2002-01-23
JP2009020094A	2009-01-29
JP2007198789A	2007-08-09
JP2003248017A	2003-09-05
JPH02110383A	1990-04-23
JPH0572225A	1993-03-23
JPH05340958A	1993-12-24
JPH08313552A	1996-11-29
JPH07120498A	1995-05-12

Other References: