Title:
CAPACITATIVE TYPE PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/225853
Kind Code:
A1
Abstract:
A diaphragm vacuum gauge (100) is provided with a temperature difference calculating unit (14) and an abnormality determining unit (15). The temperature difference calculating unit (14) obtains a temperature difference Δt between a temperature t1 inside a sensor case (4), measured by means of a control temperature sensor (9), and a temperature t2 of a heater (5), measured by means of a heater monitoring temperature sensor (10). The abnormality determining unit (15) determines that an indication of an abnormality in the heater (5) has appeared if the temperature difference Δt obtained by the temperature difference calculating unit (14) exceeds an abnormality determination threshold Δtth stored in an abnormality determination threshold storage unit (16). It is thus possible to discover an abnormality of the heater (5) at an early stage.
Inventors:
SEKINE MASASHI (JP)
ISHIHARA TAKUYA (JP)
SOEDA MASARU (JP)
TOCHIGI HIDENOBU (JP)
ISHIHARA TAKUYA (JP)
SOEDA MASARU (JP)
TOCHIGI HIDENOBU (JP)
Application Number:
PCT/JP2018/022000
Publication Date:
December 13, 2018
Filing Date:
June 08, 2018
Export Citation:
Assignee:
AZBIL CORP (JP)
International Classes:
G01L27/00; G01L9/12; G01L21/00
Domestic Patent References:
| WO2000054018A1 | 2000-09-14 |
Foreign References:
| JP2015148579A | 2015-08-20 | |||
| JP2012503199A | 2012-02-02 | |||
| US20060278004A1 | 2006-12-14 |
Attorney, Agent or Firm:
YAMAKAWA, Shigeki et al. (JP)
Download PDF:
Previous Patent: AUTONOMOUS ELECTRICAL CLEANING APPARATUS
Next Patent: METHOD FOR PRODUCING UNSATURATED NITRILE
Next Patent: METHOD FOR PRODUCING UNSATURATED NITRILE