Title:
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2006/013717
Kind Code:
A1
Abstract:
Disclosed is a capacitive micromachined ultrasonic transducer comprising at least a silicon substrate, a first electrode arranged on the silicon substrate, a second electrode arranged opposite to the first electrode with a certain space therebetween, and a membrane supporting the second electrode. This capacitive micromachined ultrasonic transducer is characterized in that a part thereof is charged.
Inventors:
ADACHI HIDEO (JP)
WAKABAYASHI KATSUHIRO (JP)
KANEKO SHINJI (JP)
NEMOTO KIYOSHI (JP)
MURAKAMI MIYUKI (JP)
WAKABAYASHI KATSUHIRO (JP)
KANEKO SHINJI (JP)
NEMOTO KIYOSHI (JP)
MURAKAMI MIYUKI (JP)
Application Number:
PCT/JP2005/013190
Publication Date:
February 09, 2006
Filing Date:
July 15, 2005
Export Citation:
Assignee:
OLYMPUS CORP (JP)
ADACHI HIDEO (JP)
WAKABAYASHI KATSUHIRO (JP)
KANEKO SHINJI (JP)
NEMOTO KIYOSHI (JP)
MURAKAMI MIYUKI (JP)
ADACHI HIDEO (JP)
WAKABAYASHI KATSUHIRO (JP)
KANEKO SHINJI (JP)
NEMOTO KIYOSHI (JP)
MURAKAMI MIYUKI (JP)
International Classes:
H04R19/01; H04R19/00; H04R31/00
Domestic Patent References:
| WO2003035281A2 | 2003-05-01 | |||
| WO2000005001A1 | 2000-02-03 | |||
| WO2000072631A2 | 2000-11-30 |
Foreign References:
| JPH0252599A | 1990-02-22 | |||
| JP2003527161A | 2003-09-16 | |||
| JP2002218594A | 2002-08-02 | |||
| JP2002033241A | 2002-01-31 | |||
| JP2002125297A | 2002-04-26 | |||
| JPS56125200A | 1981-10-01 | |||
| JPH0329498A | 1991-02-07 | |||
| JP2003163996A | 2003-06-06 | |||
| JP2003199197A | 2003-07-11 | |||
| JP2004503313A | 2004-02-05 | |||
| JPH0252599A | 1990-02-22 | |||
| JP2002218594A | 2002-08-02 | |||
| GB2060259A | 1981-04-29 |
Other References:
WEGENER ET AL.: "Corona-induced partial discharges, internal charge separation and electromechanical transducer properties in cellular polymer films", PROCEEDINGS OF THE 11TH. INTERNATIONAL SYMPOSIUM ON ELECTRETS. (ISE 11). GLEN WAVERLY, MELBOURNE, AUSTRALIA, OCT. 1 - 3, 2002; [PROCEEDINGS OF THE INTERNATIONAL SYMPOSIUM ON ELECTRETS. (ISE)], 20021001, 1 October 2002 (2002-10-01)
See also references of EP 1781067A4
See also references of EP 1781067A4
Attorney, Agent or Firm:
Osuga, Yoshiyuki (Nibancho Bldg. 8-20, Nibancho, Chiyoda-k, Tokyo 84, JP)
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