Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CAPACITIVE RESONATORS AND METHODS OF FABRICATION
Document Type and Number:
WIPO Patent Application WO2004027796
Kind Code:
A3
Abstract:
A micro-electro-mechanical system (MEMS) capacitive resonator (200) is disclosed and methods for manufacturing the same. In one embodiment, the MEMS capacitive resonator (200) comprises a semiconductor resonating member (208, 210) and a polysilicon electrode (202) capacitively coupled to the semiconductor resonating member.

Inventors:
AYAZI FARROKH
ANARAKI SIAVASH POURKAMALI
NO SEONG YOEL
Application Number:
PCT/US2003/023905
Publication Date:
August 05, 2004
Filing Date:
July 31, 2003
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
GEORGIA TECH RES INST (US)
International Classes:
H03H3/007; H03H9/24; (IPC1-7): H01L21/00; H01L27/14; G01P3/04; H01P1/06
Foreign References:
US20030006468A12003-01-09
US5976994A1999-11-02
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: METHOD FOR MANUFACTURING BONDED MAGNET AND METHOD FOR MANUFACTURING MAGNETIC DEVICE HAVING BONDED MA...

Next Patent: ARTIFICIAL LAWN AND METHOD OF MANUFACTURING THE SAME