Title:
CAPACITIVE SENSOR
Document Type and Number:
WIPO Patent Application WO/2002/088693
Kind Code:
A1
Abstract:
A capacitance type humidity detection sensor used under a high-temperature, high-humidity environment, wherein a sensor body has a capacitor structure comprising a polymer membrane interposed between a pair of electrodes, and the sensor body is disposed on one surface of a substrate having at least one through hole penetrating in the thickness direction of the substrate holding the sensor body.
Inventors:
OGURA TSUTOMU (JP)
OBARA SACHIKO (JP)
OBARA SACHIKO (JP)
Application Number:
PCT/JP2002/004283
Publication Date:
November 07, 2002
Filing Date:
April 26, 2002
Export Citation:
Assignee:
YAMATAKE CORP (JP)
OGURA TSUTOMU (JP)
OBARA SACHIKO (JP)
OGURA TSUTOMU (JP)
OBARA SACHIKO (JP)
International Classes:
G01N27/22; (IPC1-7): G01N27/22
Foreign References:
| JPH02309238A | 1990-12-25 | |||
| US4305112A | 1981-12-08 | |||
| JPH06294765A | 1994-10-21 | |||
| JPS6148861B2 | 1986-10-27 | |||
| JPH0523124U | 1993-03-26 | |||
| JPS5116978A | 1976-02-10 | |||
| JP2001004579A | 2001-01-12 |
Attorney, Agent or Firm:
Nagato, Kanji (8-1 Shinbashi 5-chom, Minato-ku Tokyo, JP)
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