Title:
CAPACITOR, ELECTRIC CIRCUIT, CIRCUIT BOARD, DEVICE, AND METHOD FOR MANUFACTURING CAPACITOR
Document Type and Number:
WIPO Patent Application WO/2023/234343
Kind Code:
A1
Abstract:
This capacitor 1a comprises a metal tantalum 10, a conductor 20, and a tantalum oxide film 30. The tantalum oxide film 30 is disposed in contact with the metal tantalum 10, and is disposed between the metal tantalum 10 and the conductor 20. The tantalum oxide film 30 includes a first part 31 and a second part 32 containing fluorine. The second part 32 exists at a position closer to the metal tantalum 10 than the first part 31 in the thickness direction of the tantalum oxide film 30. Additionally, the concentration of fluorine in the second part 32 is lower than the concentration of fluorine in the first part 31.
Inventors:
GOTO TAKEHITO
KITAMURA NAOYA
KANOU MANABU
KIKUCHI RYOSUKE
KITAMURA NAOYA
KANOU MANABU
KIKUCHI RYOSUKE
Application Number:
PCT/JP2023/020267
Publication Date:
December 07, 2023
Filing Date:
May 31, 2023
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01G9/07; H01G4/30; H01G4/33; H01G9/042; H01G9/15
Foreign References:
| JPH02276215A | 1990-11-13 | |||
| JPH10135080A | 1998-05-22 | |||
| JP2009290088A | 2009-12-10 | |||
| JP2005294401A | 2005-10-20 |
Attorney, Agent or Firm:
KAMADA Koichi et al. (JP)
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