CARBON ELECTRODE FOR GENERATION OF NITROGEN TRIFLUORIDE GAS

WIPO Patent Application WO/2006/013888

A1

A carbon electrode having a low porosity in its structure and having a relatively high mechanical strength produced only through a process of mixing a specified metal fluoride with a carbon material and firing the mixture, which carbon electrode is one for production of nitrogen trifluoride gas that irrespective of either NH₄F-KF-HF gas or NH₄F-HF gas, is not polarized and ensures a prolonged service life. There is provided a carbon electrode for generation of nitrogen trifluoride gas, comprising a dense structure of ≤ 0.5 μm average pore diameter. The carbon electrode is preferably composed of a carbonaceous material and al least one member selected from among aluminum fluoride and magnesium fluoride having a melting point not lower than the firing temperature of the carbonaceous material. The content of al least one member selected from among aluminum fluoride and magnesium fluoride mentioned above is preferably in the range of 3 to 10 wt.%.

TASAKA AKIMASA (JP)
KODAMA MASASHI (JP)
TANAKA UDAI (JP)
TAKEBAYASHI HITOSHI (JP)
TOJO TETSURO (JP)
MIMOTO ATSUHISA (JP)

PCT/JP2005/014197

February 09, 2006

August 03, 2005

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TOYO TANSO CO (JP)
MITSUI CHEMICALS INC (JP)
TASAKA AKIMASA (JP)
KODAMA MASASHI (JP)
TANAKA UDAI (JP)
TAKEBAYASHI HITOSHI (JP)
TOJO TETSURO (JP)
MIMOTO ATSUHISA (JP)

C25B11/12; C25B1/24

JP2001295086A	2001-10-26
JPH055194A	1993-01-14
JPH03232988A	1991-10-16
JPS5623285A	1981-03-05
JPH0247297A	1990-02-16

Kaji, Yoshiyuki c/o Kaji (SUHARA & ASSOCIATES Recruit Shin Osaka BLDG., 14-22, Nishinakajima 5-chome, Yodogawa-k, Osaka-shi Osaka 11, JP)

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