A CARRIER

TECHNICAL FIELD

[0001] Embodiments of the present disclosure relate to apparatuses and methods for transporting carriers, particularly carriers for carrying substrates or masks during processing. More specifically, embodiments of the present disclosure relate to apparatuses and methods for transporting carriers in a vacuum processing system employing magnetic levitation.

BACKGROUND

[0002] Techniques for layer deposition on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD) and thermal evaporation. Coated substrates can be used in several applications and in several technical fields. For instance, coated substrates may be used in the field of display devices. Display devices can be used for the manufacture of television screens, computer monitors, mobile phones, other hand-held devices, and the like for displaying information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

[0003] In order to deposit a layer stack, an in-line arrangement of processing modules can be used. An in-line processing system includes a plurality of processing modules, such as deposition modules and optionally further processing modules, e.g., cleaning modules and/or etching modules, wherein processing aspects are subsequently conducted in the processing modules such that a plurality of substrates can continuously or quasi-continuously be processed in the in-line processing system. [0004] The substrate may be carried by a carrier, i.e. a carrying device for carrying the substrate in the vacuum system. The carrier carrying the substrate is typically transported through the vacuum system using a transport system. The transport system may be a magnetic levitation system, such that the carrier can be transported contactlessly or essentially contactlessly. The transport system may be configured for conveying the carrier having the substrate positioned thereon along one or more transport paths in the vacuum system, e.g. from one processing device to another processing device.

[0005] An accurate and smooth transportation of the carriers through the vacuum system is challenging. For instance, particle generation due to wear of moving parts can cause a deterioration in the manufacturing process. Accordingly, there is a demand for transportation of carriers in processing systems with reduced or minimized particle generation. Further challenges are, for example, to provide high precision and robust carrier transport systems for high temperature vacuum environments at low costs.

[0006] Accordingly, there is a demand for providing improved apparatuses and methods for transporting carriers as well as for improved processing systems which overcome at least some of the problems of the state of the art.

SUMMARY

[0007] In light of the above, a carrier transportation apparatus for transporting a carrier, a carrier transport system, a processing system and a method of transporting a carrier according to the independent claims are provided. Further aspects, advantages, and features are apparent from the dependent claims, the description, and the accompanying drawings.

[0008] According to an aspect of the present disclosure, a carrier transportation apparatus for transporting a carrier is provided. The carrier transportation apparatus includes a magnetic levitation unit for contactlessly levitating the carrier. Further, the carrier transportation apparatus includes a drive unit for moving the carrier in a transport direction. The drive unit is connected to an elastic support.

[0009] Accordingly, embodiments of the carrier transportation apparatus as described herein are improved compared to conventional carrier transportation apparatuses, particularly with respect to accurate and smooth transportation of the carrier in vacuum environments, particularly high temperature vacuum environments. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs compared to conventional carrier transportation apparatuses. In particular, embodiments of the carrier transportation apparatus as described herein are more insensitive to manufacturing tolerances, deformation, and thermal expansion.

[0010] According to another aspect of the present disclosure, a carrier transport system for transporting a carrier is provided. The carrier transport system includes a carrier transportation apparatus. The carrier transportation apparatus includes a magnetic levitation unit for contactlessly levitating the carrier. Further, the carrier transportation apparatus includes a drive unit for moving the carrier in a transport direction. The drive unit is connected to an elastic support. Additionally, the carrier transport system includes a carrier for carrying an object, particularly a mask or a substrate. The carrier includes one or more first magnetic counterparts for interacting with the magnetic levitation unit.

[0011] According to a further aspect of the present disclosure, a processing system for vertically processing a substrate is provided. The processing system includes at least one vacuum chamber including a processing device. Further, the processing system includes a carrier transportation apparatus. The carrier transportation apparatus includes a magnetic levitation unit for contactlessly levitating the carrier. Additionally, the carrier transportation apparatus includes a drive unit for moving the carrier in a transport direction. The drive unit is connected to an elastic support. Accordingly, compared to the state of the art, an improved processing system is provided, particularly for large area substrate processing, e.g. used for display manufacturing. [0012] According to another aspect of the present disclosure, a method of transporting a carrier in a vacuum chamber in a transport direction is provided. The method includes levitating the carrier with a magnetic levitation unit. Additionally, the method includes moving the carrier in the transport direction with a drive unit. Further, the method includes adjusting a position of the drive unit with respect to the carrier by using an elastic support connected to the drive unit.

[0013] Accordingly, compared to the state of the art, an improved method of transporting a carrier in a vacuum chamber is provided, particularly with respect to accurate and smooth transportation of the carrier.

[0014] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Accordingly, another aspect of the present disclosure is a method of manufacturing a coated substrate using at least one of the carrier transportation apparatus according to embodiments described herein, the carrier transport system according to embodiments described herein, the processing system for vertically processing a substrate according to embodiments described herein, and a method of transporting a carrier in a vacuum chamber in a transport direction according to embodiments described herein. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus. For instance, according to a further aspect of the present disclosure, a method of coating a substrate, particularly for manufacturing an electronic device, is provided. The electronic device may be an opto-electronical, e.g. a display. The method of coating a substrate includes using at least one of a carrier transportation apparatus according to any embodiments described herein, a carrier transport system according to any embodiments described herein, a processing system according to any embodiments described herein, and a method of transporting a carrier according to any embodiments described herein.

BRIEF DESCRIPTION OF THE DRAWINGS

[0015] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIG. 1 shows a schematic front view of a carrier transportation apparatus according to embodiments described herein;

FIGS. 2A and 2B show schematic top views of a carrier transportation apparatus according to embodiments described herein illustrating a carrier transport in the transport direction;

FIG. 3 shows a schematic top view of a carrier transportation apparatus having a damping according to embodiments described herein;

FIG. 4 shows a schematic view of a processing system for vertically processing a substrate according to embodiments described herein; and

FIG. 5 shows a flowchart for illustrating a method of transporting a carrier according to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0016] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, same reference numbers refer to same components. Only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0017] With exemplary reference to FIG. 1, a carrier transportation apparatus 100 for transporting a carrier 10 according to the present disclosure is described. The carrier 10 can be transported in a transport direction T, as exemplarily indicated in FIG. 1. In FIG. 1 the transport direction T is perpendicular to the paper plane. The transport direction T is typically an essentially horizontal direction (horizontal +/-10 ⁰ ). In the present disclosure, the term “transport direction” can be understood as the direction in which the carrier is transported along a transport path by the carrier transportation apparatus. The transport path can be linear or curved. Further, the transport direction may vary along the transport path. Further, in FIG. 1 the vertical direction V and the lateral direction L are indicated.

[0018] According to embodiments, which may be combined with other embodiments described herein, the carrier transportation apparatus 100 includes a magnetic levitation unit 120 for contactlessly levitating the carrier 10, as exemplarily shown in FIG. 1. In particular, the magnetic levitation unit 120 is configured for holding the carrier 10 in a carrier transportation space 15. The carrier transportation space 15 may be understood as a zone where the carrier 10 is arranged during the transport of the carrier in the transportation direction T along a transport path. In particular, as exemplarily shown in FIG. 1, the carrier transportation space can be a vertical carrier transportation space having a height H extending in a vertical direction and a width W extending in a horizontal direction. For instance, the aspect ratio of H/W can be H/W > 5, particularly H/W > 10. From FIG. 1, it is to be understood that the dimension of the carrier typically corresponds to the dimension of the carrier transportation space 15. Accordingly, the carrier may have a height corresponding to the height H of the carrier transportation space 15. Further, the carrier may have a width corresponding to the width W of the carrier transportation space 15. Accordingly, typically, the magnetic levitation unit 120 is arranged above the carrier transportation space 15. In particular, as exemplarily shown in FIG. 1, the magnetic levitation unit 120 is arranged to interact with one or more first magnetic counterparts 181 of the carrier 10.

[0019] Further, as exemplarily shown in FIG. 1, the carrier transportation apparatus 100 includes a drive unit 130 for moving the carrier 10 in a transport direction T. The drive unit 130 is connected to an elastic support 140. In particular, the drive unit 130 and the elastic support 140 are laterally arranged in a lower portion 15 L of the carrier transportation space 15. In particular, the drive unit 130 includes a stator part 131 being arranged to interact with one or more second magnetic counterparts 182 of the carrier 10. As exemplarily shown in FIG. 1, the one or more second magnetic counterparts 182 can be provided at a lateral face 11 of the carrier 10, the lateral face extending essentially vertically during the transport of the carrier. During carrier transportation, the one or more second magnetic counterparts 182 moves in the transport direction T passing the stator part 131. Accordingly, the stator part 131 can be understood as the stator of an electro magnetic linear motor and the one or more second magnetic counterparts 182 can be understood as the mover part of the electro-magnetic linear motor. For instance, typically the stator part 131 may include one or more second actuators 132 as described herein. Accordingly, the stator part 131 can be understood as being static with respect to the mover part, i.e. the one or more second magnetic counterparts 182. According to an example, the electro-magnetic linear motor as described herein may be an asynchronous linear motor.

[0020] FIGS. 2A and 2B show schematic top views of a carrier transportation apparatus 100 according to embodiments described herein illustrating a movement of the carrier 10 in the transport direction T. The vertical direction V is perpendicular to the paper plane.

[0021] In particular, FIGS. 2A and 2B show schematic illustrations for the case that there is a lateral displacement within the support structure 142 along the transport direction T. For example, the lateral displacement may be caused by vacuum deformations of the vacuum chamber, particularly the side wall of the vacuum chamber. FIGS. 2A and 2B show a sequence of six drive units 130 arranged along the transport direction T. In FIG. 2 A, a first lateral displacement xi is indicated. The first lateral displacement xi is characterized in that the lateral distance between the carrier 10 and the support structure 142 increases along the transport direction. As an example, in FIG. 2A, the first lateral displacement xi is between the second drive unit and the third drive unit of the six drive units 130.

[0022] In FIG. 2B, a second lateral displacement X2 is indicated. The second lateral displacement X2 is characterized in that the lateral distance between the carrier 10 and the support structure 142 decreases along the transport direction. As an example, in FIG. 2B, the second lateral displacement X2 is between the fourth drive unit and the fifth drive unit of the six drive units 130. Elastic support 140 of the drive unit 130 beneficially provides for the capability that lateral displacement, e.g. due to deformation, misalignment or manufacturing inaccuracies, can be compensated. In particular, a drive unit 130 as described herein is movable towards the carrier 10 in the case that the distance between the carrier and subsequent drive units increases along the transport direction, as exemplarily illustrated by the first lateral displacement xi and the movement (indicated by arrow 1) of the third drive unit of the six drive units 130 towards the carrier 10. For instance, the drive unit may be moved towards the carrier by attractive magnetic forces acting between the drive unit and the carrier, particularly attractive magnetic forces acting between the one or more second actuators 132 and the one or more second magnetic counterparts 182, as described herein.

[0023] Further, it is to be understood that a drive unit 130 as described herein is movable towards the support structure 142 in the case that the distance between the carrier and subsequent drive units decreases along the transport direction, as exemplarily illustrated in FIG. 2B by the second lateral displacement X2 and the movement (indicated by arrow 2) of the fifth drive unit of the six drive units 130 towards the support structure 142. For instance, the drive unit may be moved towards the support structure by the carrier, particularly the carrier may push the drive unit towards the support structure. In this regard, it is to be noted that it may be beneficial to provide the drive unit 130 with guiding elements 135, as exemplarily shown in FIGS. 2B and 3. The guiding elements 135 may be guide rollers or other suitable guiding elements suitable for facilitating that a leading edge of the carrier can push the drive unit 130 towards the support structure 142.

[0024] Accordingly, in view of the embodiments of the carrier transportation apparatus as described herein, it is to be understood that, compared to the prior art, an improved carrier transportation apparatus is provided, particularly with respect to accurate and smooth transportation of the carriers in vacuum environments, particularly high temperature vacuum environments. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs compared to conventional carrier transportation apparatuses. In particular, embodiments of the carrier transportation apparatus as described herein are more insensitive to manufacturing tolerances, deformation, and thermal expansion.

[0025] In particular, it is to be noted that conventionally magnetic levitation transport systems typically involve tight tolerances at areas with small gaps between the moving carrier and the drive unit fixed to the wall of the vacuum chamber. For example, typically gaps between the drive unit and the carrier to be transported are in the range of 1 mm to 2 mm or below, whereas the carrier and chamber-size usually is in the range of several meters. Further, it is to be noted that vacuum chambers may underlie vacuum deformations in the range of some millimeters as well. Moreover, floor sagging can lead to further misalignment between the drive unit and the carrier over time. An approach according to the state of the art is to try to align the rigid wall-side components, e.g. the drive unit, to a perfectly straight line. However, meeting the high demands of manufacturing and assembly tolerances remains challenging and cost intensive.

[0026] To overcome the problems associated with the high demands of manufacturing and assembly tolerances, embodiments of the present disclosure beneficially provide for the capability that the wall-side components, i.e. the drive unit, can follow the moving carrier, namely by providing an elastic support. Accordingly, embodiments of the present disclosure provide the advantage that small gaps, e.g. gaps of 2 mm or below, particularly 1 mm or below, more particularly 0.5 mm or below, between the drive unit and the carrier can be realized, without the need to exactly align all components, e.g. the individual actuators of the drive unit.

[0027] Before various further embodiments of the present disclosure are described in more detail, some aspects with respect to some terms and expressions used herein are explained.

[0028] In the present disclosure, a “carrier transportation apparatus” can be understood as an apparatus configured for transporting a carrier along a transport path in a transport direction T. In particular, the carrier transportation apparatus may be configured for transporting an essentially vertically oriented carrier. “Essentially vertically” as used herein may encompass a deviation of 10° or less from an exactly vertical orientation of a lateral face of the carrier.

[0029] In the present disclosure, a “carrier” can be understood as a carrying device configured for carrying an object, e.g. a substrate or a mask, through a vacuum environment. In particular, the carrier can be a substrate carrier or a mask carrier used in a processing system, e.g. for vertically processing a substrate. The carrier may include a carrier body and a holding device, e.g. a mechanical, electrostatic, or magnetic chucking device, configured for holding the object, e.g. the substrate or the mask, at an object support surface of the carrier body. The carrier may be configured to carry a large-area substrate, i.e. a substrate having a size of 1 m ² or more, particularly 5 m ² or more, or even 8 m ² or more. Transporting and holding large and heavy carriers is challenging, particularly using magnetic levitation.

[0030] In the present disclosure, the term “substrate” may particularly embrace substantially inflexible substrates, e.g., a wafer, slices of transparent crystal such as sapphire or the like, or a glass plate. However, the present disclosure is not limited thereto, and the term “substrate” may also embrace flexible substrates such as a web or a foil. The term “substantially inflexible” is understood to distinguish over “flexible”. Specifically, a substantially inflexible substrate can have a certain degree of flexibility, e.g. a glass plate having a thickness of 0.5 mm or below, wherein the flexibility of the substantially inflexible substrate is small in comparison to the flexible substrates. According to embodiments described herein, the substrate may be made of any material suitable for material deposition. For instance, the substrate may be made of a material selected from the group consisting of glass (for instance soda-lime glass, borosilicate glass etc.), metal, polymer, ceramic, compound materials, carbon fiber materials or any other material or combination of materials which can be coated by a deposition process.

[0031] In the present disclosure, a “magnetic levitation unit” can be understood as a unit configured for holding an object, e.g. a carrier, in a contactless manner by using magnetic force. In the present disclosure, the term “levitating” or “levitation” refers to a state of an object, e.g. a carrier carrying a substrate or a mask, wherein the object floats without mechanical contact or support.

[0032] In the present disclosure, “contactlessly levitating” can be understood in the sense that a weight, e.g. the weight of a carrier, particularly the weight of a carrier carrying a substrate or a mask, is not held by a mechanical contact or mechanical forces, but is held by a magnetic force. In other words, the term “contactless” as used throughout the description can be understood in that a carrier is held in a levitating or floating state using magnetic forces instead of mechanical forces, i.e. contact forces.

[0033] In the present disclosure, a “drive unit” can be understood as a unit configured for moving the carrier as described herein in the transport direction. In particular, the drive unit as described herein may be configured to generate a magnetic force acting on the carrier in the transport direction T. Accordingly, the drive unit can be a linear motor. More specifically, a drive unit for moving or transporting the carrier can be understood as a unit configured for providing a driving force, e.g. a force in a direction different from the levitation force, wherein the carrier is moved from one position to another, different position, for example a different position along the transport direction. For example, a carrier carrying a substrate or a mask can be levitated by the magnetic levitation unit, i.e. by a force counteracting gravity, and can be moved by the drive unit in the transport direction T (different from a direction parallel to gravity) while being levitated.

[0034] In the present disclosure, an “elastic support” can be understood as a support having one or more elastic elements, e.g. one or more springs or one or elements of elastic material. For instance, the “elastic support” can be compliant and/or provide a suspension. In particular, the elastic support is configured for providing elasticity substantially perpendicular to the transport direction T. “Substantially perpendicular” may be understood as a deviation of ± 20°, particularly ± 10°, from exact perpendicularity.

[0035] According to embodiments, which may be combined with other embodiments described herein, the elastic support 140 includes one or more elastic elements 141 and a support structure 142, as exemplarily shown in FIGS. 2A and 2B. A first end 141 A of the one or more elastic elements 141 is connected to the support structure 142. A second end 14 IB of the one or more elastic elements 141 is connected to the drive unit 130. The support structure 142 can be a wall, particularly a side wall 211, of a vacuum chamber 210, as exemplarily shown in FIG. 4. Alternatively, the support structure 142 can be a base structure 145 that extends along the transport path of the carrier. It is to be understood that the support structure 142 extends in the transport direction T that is typically a horizontal direction which is perpendicular to the sectional plane depicted in FIGS. 1 and 4. The support structure 142 is laterally arranged in the lower portion 15L of the carrier transportation space 15. In particular, the support structure 142 is a rigid mechanical structure.

[0036] According to embodiments, which may be combined with other embodiments described herein, the magnetic levitation unit 120 includes one or more first actuators 121 for contactlessly holding the carrier 10 in a carrier transportation space 15. For instance, the one or more first actuators 121 may be attached to an outside surface of an upper chamber wall 212, e.g. of a vacuum chamber.

[0037] In the present disclosure, a “first actuator” of the magnetic levitation unit can be understood as an active and controllable element. In particular, the one or more first actuators may include a controllable magnet such as an electromagnet. The magnetic field of the one or more first actuators may be actively controllable for maintaining and / or adjusting the distance between the magnetic levitation unit and the carrier. In other words, a “first actuator” of the magnetic levitation unit can be understood as an element with a controllable and adjustable magnetic field to provide a magnetic levitation force acting on the carrier.

[0038] According to embodiments, which may be combined with other embodiments described herein, the drive unit 130 includes one or more second actuators 132 connected to the elastic support 140. Typically, the one or more second actuators are configured for moving the carrier in the transport direction, particularly in a contactless manner. The one or more second actuators can be one or more controllable magnets, e.g. electromagnets. Accordingly, the one or more second actuators may be actively controllable for exerting a moving force on the carrier in the transport direction T.

[0039] With exemplary reference to FIG. 3, according to embodiments which may be combined with other embodiments described herein, the elastic support 140 further includes one or more damping elements 143. As exemplarily shown in FIG. 3, a first end 143A of the one or more damping elements 143 is connected to the support structure 142. A second end 143B of the one or more elastic elements 143 is connected to the drive unit 130. Providing one or more damping elements 143 can be beneficial for reducing or avoiding vibrations. Accordingly, a smoother carrier transport can be achieved.

[0040] According to another aspect of the present disclosure, a carrier transport system 150 for transporting a carrier 10 is provided. The carrier transport system 150 includes a carrier transportation apparatus 100 including a magnetic levitation unit 120 for contactlessly levitating the carrier 10 and a drive unit 130 for moving the carrier 10 in a transport direction T. The drive unit 130 is connected to an elastic support 140. In particular, the carrier transportation apparatus 100 can be a carrier transportation apparatus according to any embodiments described herein. Further, the carrier transport system 150 includes a carrier 10 for carrying an object, particularly a mask or a substrate. The carrier 10 includes one or more first magnetic counterparts 181 for interacting with the magnetic levitation unit 120.

[0041] As exemplarily shown in FIG. 1, the one or more first magnetic counterparts 181 may be arranged at a top part of the carrier 10. The one or more first magnetic counterparts 181 of the carrier may magnetically interact with the one or more first actuators 121 of the magnetic levitation unit 120. In particular, the one or more first magnetic counterparts 181 can be passive magnetic elements. For instance, the one or more first magnetic counterparts 181 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0042] A “passive magnetic element” or “passive magnet” as used herein may be understood as a magnet which is not actively controlled, e.g. via a feedback control. For example, no output parameter such as a magnetic field strength of the passive magnet is controlled depending on an input parameter such as a distance. For example, a “passive magnetic element” may include one or more permanent magnets. Alternatively or additionally, a “passive magnetic element” or “passive magnet” may include one or more electromagnets which may not be actively controlled.

[0043] According to embodiments of the carrier transport system 150, which may be combined with other embodiments described herein, the drive unit 130 has one or more second actuators 132 being electromagnets and the carrier 10 includes one or more second magnetic counterparts 182 for interacting with the one or more second actuators 132 of the drive unit. [0044] As exemplarily shown in FIG. 1, the one or more second magnetic counterparts 182 may be arranged at a lower lateral portion of the carrier 10. More specifically, the one or more second magnetic counterparts 182 can be arranged at or attached to a lateral surface 10L of the lower portion of the carrier. Typically, the lateral surface 10L on which the one or more second magnetic counterparts 182 are provided faces the drive unit 130. The one or more second magnetic counterparts 182 of the carrier may magnetically interact with the one or more second actuators 132 of the drive unit 130. In particular, the one or more second magnetic counterparts 182 can be passive magnetic elements. For instance, the one or more second magnetic counterparts 182 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0045] The carrier 10 can be a substrate carrier or a mask carrier. In particular, the carrier can be a substrate carrier for large area substrates or a mask carrier for masks employed for masking large area substrates. In the present disclosure, the term “large area substrate” refers to a substrate having a main surface with an area of 0.5 m ² or larger, particularly of 1 m ² or larger. In some embodiments, a large area substrate can be GEN 4.5, which corresponds to about 0.67 m ² of substrate (0.73mx0.92m), GEN 5, which corresponds to about 1.4 m ² of substrate (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m ² of substrate (1.95 m x 2.2 m), GEN 8.5, which corresponds to about 5.7 m ² of substrate (2.2 m x 2.5 m), or even GEN 10, which corresponds to about 8.7 m ² of substrate (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented.

[0046] With exemplary reference to FIG. 4, a processing system 200 for vertically processing a substrate according to the present disclosure is described. The processing system 200 includes at least one vacuum chamber 210 including a processing device 205. The processing device 205 may be selected from the group consisting of a deposition source, an evaporation source, and a sputter source, or other processing devices used for the processing of large area substrates employed for display manufacturing. In FIG. 4, the processing device 205 is a deposition source, wherein a material to be deposited is indicated by dotted arrows 201. The material to be deposited may be an organic material, e.g. a material for OLED manufacturing, or an inorganic material, e.g. a semi-conductive material. Additionally, the processing system 200 includes a carrier transportation apparatus 100. The carrier transportation apparatus 100 includes a magnetic levitation unit 120 for contactlessly levitating the carrier 10. Further, the carrier transportation apparatus 100 includes a drive unit 130 for moving the carrier 10 in a transport direction T. The drive unit 130 is connected to an elastic support 140. In particular, the carrier transportation apparatus 100 is a carrier transportation apparatus according to any of the embodiments described herein.

[0047] The term “vacuum” can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. Typically, the pressure in a vacuum chamber as described herein may be between 10 ⁵ mbar and about 10 ⁸ mbar, more typically between 10 ⁵ mbar and 10 ⁷ mbar, and even more typically between about 10 ⁶ mbar and about 10 ⁷ mbar. According to some embodiments, the pressure in the vacuum chamber may be considered to be either the partial pressure of the evaporated material within the vacuum chamber or the total pressure, which may approximately be the same when only the evaporated material is present as a component to be deposited in the vacuum chamber. In some embodiments, the total pressure in the vacuum chamber may range from about 10 ⁴ mbar to about 10 ⁷ mbar, especially in the case that a second component besides the evaporated material is present in the vacuum chamber (such as a gas or the like). Accordingly, the vacuum chamber can be a “vacuum deposition chamber”, i.e. a vacuum chamber configured for vacuum deposition.

[0048] With exemplary reference to FIG. 5, a method 300 of transporting a carrier in a vacuum chamber in a transport direction T is described. According to embodiments, which may be combined with other embodiments described herein, the method 300 includes levitating (represented by block 310 in FIG. 5) the carrier 10 with a magnetic levitation unit 120. Additionally, the method includes moving (represented by block 320 in FIG. 5) the carrier 10 in the transport direction T with a drive unit 130. Further, the method includes adjusting (represented by block 330 in FIG. 5) a position of the drive unit 130 with respect to the carrier 10 by using an elastic support 140 connected to the drive unit 130.

[0049] According to embodiments, which may be combined with other embodiments described herein, adjusting (represented by block 330 in FIG. 5) the position of the drive unit 130 with respect to the carrier 10 includes moving (represented by block 331 in FIG. 5) the drive unit 130 towards the carrier 10 by employing a magnetic attractive force acting between the drive unit 130 and the carrier 10.

[0050] According to embodiments, which may be combined with other embodiments described herein, adjusting (represented by block 330 in FIG. 5) the position of the drive unit 130 with respect to the carrier 10 includes moving (represented by block 332 in FIG. 5) the drive unit 130 towards a support structure 142 by means of the carrier 10. In particular, the carrier may push the drive unit 130 towards the support structure 142.

[0051] According to embodiments, which may be combined with other embodiments described herein, adjusting (represented by block 330 in FIG. 5) the position of the drive unit 130 with respect to the carrier 10 includes using one or more damping elements 143, e.g. damping elements as described herein. Damping can be beneficial for reducing or avoiding vibrations. Accordingly, a smoother carrier transport can be achieved.

[0052] In view of the above, it is to be understood that compared to the state of the art, embodiments of the present disclosure beneficially provide for a carrier transportation apparatus, a carrier transport system, a processing system for vertically processing a substrate, and a method of transporting a carrier in a vacuum chamber which are improved with respect to accurate and smooth transportation of the carriers in vacuum environments, particularly for high quality display manufacturing. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs compared to conventional carrier transportation apparatuses.

[0053] While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope, and the scope is determined by the claims that follow.