Title:
CARRIER
Document Type and Number:
WIPO Patent Application WO/2022/183925
Kind Code:
A1
Abstract:
The present invention provides a carrier, comprising: a plate body having a first surface and a second surface which are arranged opposite in the thickness direction, wherein the first surface is used for carrying elements, the plate body is provided with a plurality of hollow-out regions which penetrate the first surface and the second surface at corresponding positions, and one hollow-out region corresponds to one element; and a first reinforcing member and a second reinforcing member, which are arranged in parallel on the second surface separately and extend in the length direction of the first surface. The carrier is in contact with rails by means of the respective sides of the first reinforcing member and the second reinforcing member facing away from the second surface. According the described approach, the degree of warpage and deformation of the carrier can be reduced, and a gap between the plate body and the rails can be increased, and the probability of element wear can be reduced.
Inventors:
HU LIN (CN)
ZENG ZHAOKONG (CN)
CHEN WUWEI (CN)
ZHAO MING (CN)
ZENG ZHAOKONG (CN)
CHEN WUWEI (CN)
ZHAO MING (CN)
Application Number:
PCT/CN2022/077179
Publication Date:
September 09, 2022
Filing Date:
February 22, 2022
Export Citation:
Assignee:
SUZHOU TF AMD SEMICONDUCTOR CO LTD (CN)
International Classes:
H01L21/673
Domestic Patent References:
| WO2007019833A1 | 2007-02-22 |
Foreign References:
| CN2593400Y | 2003-12-17 | |||
| DE19636554A1 | 1998-03-12 | |||
| CN2592534Y | 2003-12-17 | |||
| CN201894001U | 2011-07-06 | |||
| CN113140494A | 2021-07-20 |
Attorney, Agent or Firm:
SUZHOU CREATOR PATENT & TRADEMARK AGENCY, LTD. (CN)
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