Title:
CARRYING APPARATUS AND CARRYING CONTROL METHOD FOR SHEET-LIKE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2005/004230
Kind Code:
A1
Abstract:
A carrying apparatus and a carrying control method for sheet-like substrates, the apparatus for carrying the sheet-like substrates such as liquid crystal display panels and glass substrates into a treatment device, comprising a rather large robot (14) having rotating arms (16) for carrying large-sized sheet-like substrates. The carrying apparatus and a sheet-like substrate carrying system can stably raise the substrates up to the height of approximately 2 m and can carry the substrates with the deflected amount of the extended rotating arms (16) corrected. Horizontal support base parts (13) liftably cantilevered on two upright support bodies (12) are installed in the apparatus, and the carrying robot (14) with the rotating arms (16) is placed on the horizontal support base part (13). Also, the deflected amount of the extended rotating arms is corrected by raising the height of the horizontal support base part (13) according to the amount of the deflection of the rotating arms. The amount of the deflection of the rotating arms can also be corrected by varying the installation angle of the robot (14) placed on the horizontal support base part (13).
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Inventors:
SAKATA KATSUNORI (JP)
OKUTSU HIDEKAZU (JP)
FUJII SEIICHI (JP)
OKUTSU HIDEKAZU (JP)
FUJII SEIICHI (JP)
Application Number:
PCT/JP2004/009438
Publication Date:
January 13, 2005
Filing Date:
July 02, 2004
Export Citation:
Assignee:
RORZE CORP (JP)
SAKATA KATSUNORI (JP)
OKUTSU HIDEKAZU (JP)
FUJII SEIICHI (JP)
SAKATA KATSUNORI (JP)
OKUTSU HIDEKAZU (JP)
FUJII SEIICHI (JP)
International Classes:
B25J9/02; B25J9/04; B25J18/00; B65G49/06; H01L21/677; (IPC1-7): H01L21/68; B25J9/02; B25J9/06; B25J13/08; B65G49/06; B65G49/07
Foreign References:
| JP2000183128A | 2000-06-30 | |||
| JPH0592228A | 1993-04-16 | |||
| JP2002093882A | 2002-03-29 | |||
| JPS63106127U | 1988-07-08 |
Attorney, Agent or Firm:
Matsushita, Makoto (2-2 Iwamoto-cho 3-chom, Chiyoda-ku Tokyo 32, JP)
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