Title:
CARTRIDGE LOCKING APPARATUS FOR MULTI-PROBER
Document Type and Number:
WIPO Patent Application WO/2023/074947
Kind Code:
A1
Abstract:
A cartridge locking apparatus for a multi-prober is provided. The present invention relates to an apparatus for locking a card assembly and a chuck assembly in a cartridge, which comprises the card assembly including a probe card with a plurality of probes, and the chuck assembly having a wafer arranged thereon, the apparatus comprising: a locking part, which locks and connects the lower end of the card assembly and the upper end of the chuck assembly to each other so as to generate a locking force for integrating the card assembly, the wafer and the chuck assembly; and an elastic stopper, which has at least one elastic body arranged between a stationary member fixed to the chuck assembly and a movable member fastened, in vertically movable manner, to the stationary member, so as to elastically support the movable member toward the card assembly, and thus generates an elastic force so that the probes are elastically in contact with the wafer while maintaining the distance between the probes and the wafer when the elastic stopper is in contact with the card assembly.
Inventors:
NAM KYUNG TAE (KR)
MO SEUNG KEE (KR)
CHOO SUNG WON (KR)
MO SEUNG KEE (KR)
CHOO SUNG WON (KR)
Application Number:
PCT/KR2021/015322
Publication Date:
May 04, 2023
Filing Date:
October 28, 2021
Export Citation:
Assignee:
KOREA INST IND TECH (KR)
International Classes:
G01R31/28; G01R1/04; G01R1/073
Foreign References:
| KR20210009094A | 2021-01-26 | |||
| KR20210012348A | 2021-02-03 | |||
| KR20210009136A | 2021-01-26 | |||
| KR20170064750A | 2017-06-12 | |||
| KR102033560B1 | 2019-10-17 |
Attorney, Agent or Firm:
ERUUM & LEEON INTELLECTUAL PROPERTY LAW FIRM (KR)
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